• 한국가스학회지
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• 제25권5호
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• pp.1-10
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• 2021

반도체 Photo Resist (PR) 자동화 장비는 여러 인화성 물질을 혼합하여 사용하며, 인화성 물질이 공정 중 누출되는 경우 다양한 사고로 이어질 수 있어 위험성 평가가 필요하다. 본 연구는 PR 자동화 장비에서 사용되는 Acetone, PGMEA의 누출 빈도와 이러한 누출이 화재 사고로 이어질 수 있는 빈도를 빈도분석 방법을 통해 분석하였으며, 현 설비의 추가적인 위험성 경감 조치의 필요성을 평가하였다. IOGP의 공정 누출 데이터와 점화 확률 데이터를 기반으로 누출 빈도 및 점화 확률을 도출하였으며, 이를 조합하여 실제 화재 사고의 빈도를 분석하였다. 반도체 PR 공정 중에 발생할 수 있는 물질 누출에 대한 빈도는 7.30E-03/year이며, 화재 사고는 물질이 누출되었을 때 인화점 이상의 상태로 존재하는 Acetone에 의해 발생할 수 있으며, 빈도는 1.24E-05/year의 수준으로 계산되었다. UK HSE에서 제시하는 자료에 따르면, 1.24E-05/year의 빈도로 발생하는 주요 사고에 대해서는 7명 이내의 사망자를 발생시킬 때 위험성 경감을 위한 추가 조치가 필요 없는 수준 "Broadly Acceptable" 이라고 정의하고 있어, 2인 1조로 운영되는 공정의 특성상 별도의 위험성 경감 조치가 요구되지 않는다.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제4권1호
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• pp.63-69
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• 2004

In this paper, we propose a general framework for sensor data fusion applied to control systems. Since many kinds of disturbances are introduced to a control system, it is necessary to rely on multisensor data fusion to improve control performance in spite of the disturbances. Multisensor data fusion for a control system is considered a sequence of making decisions for a combination of sensor data to make a proper control input in uncertain conditions of disturbance effects on sensors. The proposed method is applied to a typical control system of a flexible link system in which reduction of oscillation is obtained using a photo sensor at the tip of the link. But the control performance depends heavily on the environmental light conditions. To overcome the light disturbance difficulties, an accelerometer is used in addition to the existing photo sensor. Improvement of control performance is possible by utilizing multisensor data fusion for various output responses to show the feasibility of the proposed method in this paper.

• Advances in Energy Research
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• 제3권1호
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• pp.45-57
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• 2015

This article is addressed to define a new composite electrode constituted by porous nickel and an array of highly ordered $TiO_2$ nanotubes obtained by a previous galvanostatic anodization treatment in an ethylene glycol solution. The electrochemical performances of the composite anode were evaluated in a photo-electrolyser, which showed good solar conversion efficiency with respect to the UV irradiance together with a reduction of energy consumption. Such a combination of materials makes our system simple and able to work both in dark and under solar light exposure, thus opening new perspectives for industrial-scale applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.177-180
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• 2000

We studied the degradation of EVA for the protection of solar cell by UV-rays irradiation. We investigated the reduction of electrical efficiency, photo transmmitance and degradation of EVA by UV-rays irradiation. We utilized the UV irradiation equiped with fluorescent 313nm UV lamp and radiated for 400 hours. For the chemial analysis, we used the UV-vis spectrometer, XPS and examined the degradation mechanism by UV irradiation. It is found that the discolored phenomena, the decrease of photo transmmitance and oxidation reaction is occured by UV irradiation on the EVA sample for the protection of solar cell.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2023년도 가을학술발표대회논문집
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• pp.45-46
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• 2023

This study examined the curing temperature of concrete with a photothermal insulation sheet to shorten the curing time of concrete as part of construction cost and period reduction. According to the experiment results, the heating performance effect is confirmed through the temperature difference between photothermal insulation sheet and bubble sheet. And it has a high curing temperature in the order of bubble sheet (photo heating material B) > bubble sheet (photo heating material A) > bubble sheet on same layers.

• 웰빙융합연구
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• 제5권2호
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• pp.21-27
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• 2022

Purpose: This study is about photocatalytic technology and plasma oxidation-reduction technology. To the main cause of exposure to odor pollution, two deodorization techniques were applied to develop a module with higher removal efficiency and ozone reduction effect. Research design, data and methodology: A composite module was constructed by arranging two types of dry deodorization equipment (catalyst, adsorbent) in one module. This method was designed to increase the responsiveness to the components of complex odors and the environment. standard, unity, two types of oxidizing photo-catalyst technology and plasma dry deodorization device installed in one module to increase the potential by reduction to 76% of ozone, 100%, and 82%. Results: The complex odor disposal efficiency was 92%. Ammonia was processed with 50% hydrogen sulfide and 100% hydrogen sulfide, and ozone was 0.01ppm, achieving a target value of 0.07ppm or less. The combined odor showed a disposal efficiency of 93%, ammonia was 82% and hydrogen sulfide was 100% processed, and ozone achieved a target value of 0.07 ppm or less. Conclusions: Ozone removal efficiency was 76% by increasing Oxidation-Reduction Reaction(ORR). The H2S removal efficiency of the deodorizer was higher than that of the biofilter system currently used in sewage disposal plants.

• Transactions on Electrical and Electronic Materials
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• 제2권2호
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• pp.37-41
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• 2001

Photo catalytic characteristics of nano-sized TiO$_2$ powder with rutile phase produced using homogeneous precipitation process at low temperatures (HPPLT) were compared with those of commercial P-25 powder by Degussa Co. The TiO$_2$ powder by HPPLT showed very higher photoactivity in the removal rate, showing lower pH values in the solution, than the P-25 powder when eliminating metal ions such as Pb and Cu from aqueous metal-EDTA solutions. This can be inferred the more rapid photo-oxidation or -reduction of metal ions from the aqueous solution, together with relatively higher efficiencies in the use of electron-hole pair formed on the surface of TiO$_2$ particle, under UV light irradiation. Also, in the view of the TiO$_2$ particle morphology, compared to the well-dispersed spherical P-25 particle, the agglomerated TiO$_2$ particle by HPPL T consists of acicular typed primary particle with the thickness ranged of 3∼7 nm, which would be more effective to the photocatalytic reactions without electron-hole recombination on the surface of the TiO$_2$ particle under the UV light irradiation. It is, therefore, thought that the higher photo activity of the rutile TiO$_2$ powder by HPPLT in the aqueous solutions resulted from having its higher specific surface area as well as acicular shape primary particle with very thin thickness.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2005년도 춘계학술발표대회 개요집
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• pp.387-392
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• 2005

For the production of further functional bio-degradable plastic(polybutylene succinate:PBS) with $TiO_{2}$ as photocatalyst, which shows the decomposition of detrimental organic compound and pollutant under ultraviolet irradiation, we attempted to prepare $TiO_{2}$ coatings on PBS substrate by HVOF and plasma spraying techniques under various conditions. The microstructures of coatings were characterized with SEM and XRD analysis, and the photocatalytic efficiency of coatings was evaluated through the photo degradation of gaseous acetaldehyde. The effects of primary particle size and spraying parameters on the formation behavior, photo catalytic performance and mechanical characteristics of the coatings have been investigated. The results indicated that with respect to both the HVOF sprayed $P_{200}$ and $P_{30}$ coatings, the high anatase ratio off 100% can be achieved regardless of fuel gas pressure. On the other hand, the HVOF sprayed $P_{7}$ coating exhibited largely decreased anatase ratio (from 100% to 49.1%) with increasing the fuel gas pressure, which may be attributed to the much higher susceptibility to heat of 7nm agglomerated powder. In terms of photocatalytic efficiency, HVOF sprayed $P_{200}$ and $P_{30}$ coatings seem to predominate as compared to that of plasma sprayed $P_{200}$ coatings owing to the higher anatase ratio. However, the HVOF sprayed $P_{7}$ coatings didn't show the photo catalytic activity, which may result from the extremely small reaction surface area to the photo-catalytic activity and low anatase ratio. Such functional PBS with new roles is expected to cosiderably contribute to the reduction of aggravated environmel problem.

• 폴리머
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• 제36권4호
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• pp.536-541
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• 2012

실리카 입자가 첨가된 광경화성 임프린트용 복합체를 제조하여 실리카 양에 따른 경화 특성과 전사된 수 백 나노미터 크기의 임프린트 패턴 형성에 관한 결함을 조사하였다. 상온에서 UV 경화한 임프린트 레진은 실리카 양이 증가할수록 탄성률이 커지고 수축률이 줄어드는 것을 알 수 있었다. 그러나 실리카 입자의 양이 7 wt% 이상인 경우 전사된 나노기둥끼리 서로 달라붙는 결함을 보이는데, 이는 실리카 입자가 광반응을 방해하여 임프린트 레진의 경화가 불완전하게 되면서 광경화된 레진의 점성이 증가했기 때문이다. 임프린트 레진에 실리카 입자를 충전제로 사용하면 경화 후 나노 패턴의 강도를 증가하여 형태를 유지하는데 도움이 되지만, 실리카 양이 7 wt% 이상이 되면 오히려 광반응 전환율이 떨어져 임프린트 공정에 의한 나노 패턴의 전사가 어려운 것을 알 수 있다.

• Macromolecular Research
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• 제11권1호
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• pp.9-13
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• 2003

Poly (vinylidene fluoride) (PVDF) samples were implanted by using high energy (MeV)F$^{2+}$ and Cl$^{2+}$ ions. We observed that AC dielectric constant of the ion-implanted PVDF samples decreased from 10.5 to 2.5 at 1 kHz as the ion dosage increased from 10$^{11}$ to 3 $\times$ 10$^{14}$ ions/$\textrm{cm}^2$. From differential scanning calorimetry experiments, we observed that PVDF samples become more disordered state through the ion implantation. The decrease of the number of bonding of C-H and C-F and the increase of unsaturated bonding were observed from X-ray photoelectron spectroscopy experiments. The emission of HF and H$_2$ molecules during the ion implantation was detected by residual gas analyzer spectrum. Based upon the results, we analyzed that the low AC dielectric constant of the MeV ion-implanted PVDF samples originated from the reduction of polarization due to the structural change of the CF$_2$ molecules in the MeV ion-implanted PVDF samples.les.