• 제목/요약/키워드: Phase-shifting method

검색결과 182건 처리시간 0.033초

Correction Simulation for Metal Patterns on Attenuated Phase-shifting Lithography

  • Lee, Hoong-Joo;Lee, Jun-Ha
    • Transactions on Electrical and Electronic Materials
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    • 제5권3호
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    • pp.104-108
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    • 2004
  • Problems of overlap errors and side-lobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

스트로보스코픽 전자 스페클 패턴 간섭법을 이용한 디스크 브레이크의 진동 모드의 정량적 가시화에 관한 연구 (A Study on Quantitiative visualization of Vibration Mode Shape of Disk Brake by Using Stroboscopic ESPI)

  • 강영준
    • 한국자동차공학회논문집
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    • 제7권9호
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    • pp.97-104
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    • 1999
  • Brake squeal noise has been a problem since the early days of motoring . It is important to obtain vibration mode shape for reduction of brake noise . Stroboscopic Electronic Speckle Pattern Interferometry is a very powerful measuring method for study of vibrating objects in static state compared with conventional methods because this method can give both resonance frequency and quantitative visualization of vibration mode shape at the same time. In this paper, we performed qualitative visualization and quantitative analysis of vibration mode shpae of disk brake by using stroboscopic ESPI and phase shifting method. The stroboscopic wavefronts are obtained by chopping continuous wave laser beam using acousto-optic modulator .Experiments were performed at the same constraint conditions as disk brake of the practical vehicle as far as possible. The experimental results of this paper show quantitative measurement of vibration mode shape and quantiative visualization of vibration amplitude of disk brake with 3D plotting.

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Phase Error Reduction for Multi-frequency Fringe Projection Profilometry Using Adaptive Compensation

  • Cho, Choon Sik;Han, Junghee
    • Current Optics and Photonics
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    • 제2권4호
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    • pp.332-339
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    • 2018
  • A new multi-frequency fringe projection method is proposed to reduce the nonlinear phase error in 3-D shape measurements using an adaptive compensation method. The phase error of the traditional fringe projection technique originates from various sources such as lens distortion, the nonlinear imaging system and a nonsinusoidal fringe pattern that can be very difficult to model. Inherent possibility of phase error appearing hinders one from accurate 3-D reconstruction. In this work, an adaptive compensation algorithm is introduced to reduce adaptively the phase error resulting from the fringe projection profilometry. Three different frequencies are used for generating the gratings of projector and conveyed to the four-step phase-shifting procedure to measure the objects of very discontinuous surfaces. The 3-D shape results show that this proposed technique succeeds in reconstructing the 3-D shape of any type of objects.

얇은 직각판의 진동 모드에 대한 ESPI 시뮬레이션 (ESPI Simulation for the Vibration Modes of the Thin Right-Angled Plate)

  • 장순석
    • 소음진동
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    • 제9권3호
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    • pp.509-516
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    • 1999
  • The ESPI (Electronic Speckle Pattern Interferometry) algorithm has been simulated to calculate vibrational modes of a thin right-angled STS304 plate. The phase transformation of the reference wave of the ESPI is carried out only one time during vibration in order to clarify ESPI speckle patterns. Two dimensional vibrational modes are calculated from one ESPI pattern before vibration onset and two ESPI patterns during vibrations but with and without the phase transformation. The ESPI harmonic results are compared with those derived from the finite element method (FEM), and they agree very well. Additionally a phase unwrapping algorithm has been newly developed to derive a displacement map from an ESPI phase map.

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파장판를 이용한 스펙클패턴 전단간섭법에 있어서의 위상오차 해석 (Phase Error Analysis in Shearography Using Wave Plates)

  • 김수길
    • 조명전기설비학회논문지
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    • 제19권1호
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    • pp.34-39
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    • 2005
  • 본 논문에서는 Wollaston 프리즘을 이용한 스펙클패턴 전단간섭법(shearography)에서 수동소자인 두 개의 파장판과 편광판의 조합을 통해 각각 90도의 위상천이를 가지는 4개의 스펙클 패턴을 얻고, 이로부터 스펙클패턴의 각 지점에서의 위상을 얻을 수 있는 방법을 제시하였다. 제안된 방법에 사용되는 파장판에 의한 위상오차를 Jones 행렬을 이용하여 분석하였다.

Wollaston prism을 이용한 스펙클패턴 전단간섭법에 있어서 파장판의 방위각에 의한 위상오차 해석 (Analysis of Phase Error Due to the Azimuth Angle of the Wave Plates in the Shearography Using Wollaston Prism)

  • 김수길;김기수;고명숙
    • 조명전기설비학회논문지
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    • 제19권8호
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    • pp.1-7
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    • 2005
  • 본 논문에서는 편광소자를 이용하는 스펙클패턴 전단간섭법(shearography)에서 각각 90도의 위상천이를 가지는 4개의 스펙클 패턴을 얻고, 이로부터 스펙클패턴의 각 지점에서의 위상을 얻을 수 있는 방법을 설명하고, 제안된 방법에 사용되는 파장판의 방위각에 의한 위상오차를 Jones 행렬을 이용하여 분석하였다.

홀로그래피 간섭무늬 해석을 위한 위상변위법 응용연구 (Quantitative Analysis of Holographic Fringe by using Phase Shifting Method)

  • 박승옥;권영하;고영욱;강대임
    • 한국광학회:학술대회논문집
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    • 한국광학회 1990년도 광학 및 양자전자학 워크샵
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    • pp.73-77
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    • 1990
  • 홀로그래피 간섭무늬로부터 변형의 요철방향을 구하기 위하여 위상변위방법을 응용하였다. 위상변위법에 의하여 물체파의 위상을 변화시켜 이에따른 홀로그래피 간섭무늬의 이동을 측정하였다. 간섭무늬가 일정지점을 중심으로 좌우로 이동하는 현상으로부터 변형의 요철방향을 파악하고 최대지점의 위치를 구할 수 있었다.

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