• Title/Summary/Keyword: Pd thin film

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NOx Sensing Characteristics of the $WO_{3}$-Based Thin-Film Gas Sensors (박막형 $WO_{3}$계 가스센서의 NOx 감도 특성)

  • Yoo, Kwang-Soo
    • Journal of Sensor Science and Technology
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    • v.5 no.5
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    • pp.39-46
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    • 1996
  • The Pd or Pt-doped $WO_{3}$ thin-film NOx sensor was fabricated. The $WO_{3}$-based thin films as a gas-sensing layer were deposited at ambient temperature in a high-vacuum resistance heated evaporator and annealed at $500^{\circ}C$. The gas sensitivity ($R_{gas}/R_{air}$) to 5 ppm $NO_{2}$ measured at the operating temperature of $300^{\circ}C$ was 50 (highest sensitivity) for the 0.5 wt.% $Pt-WO_{3}$ sensor.

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Fabrication and Characteristics of poly-Si thin film transistors by double-metal induced lteral crystallization at 40$0^{\circ}C$ (이중 금속 측면 결정화를 이용한 40$0^{\circ}C$ 다결정 실리콘 박막 트랜지서터 제작 및 그 특성에 관한 연구)

  • 이병일;정원철;김광호;안평수;신진욱;조승기
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.4
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    • pp.33-39
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    • 1997
  • The crystallization temperature of an amorphous silicon (a-Si) can be lowered down to 400.deg. C by a new method : Double-metal induced lateral crystallization (DMILC). The a-Si film was laterally crystallized from Ni and Pd deposited area, and its lateral crystallization rate reaches up to 0.2.mu.m/hour at that temperature and depends on the overlap length of Ni and Pd films; the shorter the overlap length, the faster the rate. Poly-Silicon thin film transistors (poly-Si TFT's) fabricated by DMILC at 400.deg. C show a field effect mobility of 38.5cm$^{3}$/Vs, a minimum leakage current of 1pA/.mu.m, and a slope of 1.4V/dec. The overlap length does not affect the characteristics of the poly-Si TFT's, but determines the lateral crystallization rate.

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The Photoluminescence(PL) Spectroscopy and the Photo-Darkening(PD) Effect of the Amorphous SeGe Thin Films (비정질 SeGe 박막의 PL 특성과 광흑화 효과에 관한 연구)

  • 김진우;이현용;정홍배
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.5
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    • pp.435-440
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    • 2002
  • In this study, we have investigated photo-induced changes of optical energy gap( $E_{OP)}$ and photoluminescence (PL) in amorphous ($\alpha$-) S $e_{100-x}$G $e_{x}$ (x=5, 25 and 33) thin films prepared by conventional thermal evaporation method. In the $\alpha$-S $e_{100-x}$G $e_{x}$ thin film, the $E_{OP}$ is obtained by a linear extrapolation of the ($\alpha$hν)$^{\frac{1}{2}}$ versus hν plot to the energy axis using the optical absorption coefficient ($\alpha$) calculated from the extinction coefficient k measured in the wavelength range of 290~900nm. Although the values of $\Delta$ $E_{OP}$ are very different, all films exhibit photo-induced photo-darkening (PD) effect that is a red shift of $E_{OP}$ . In particular, $\Delta$ $E_{OP}$ in $\alpha$-S $e_{75}$ G $e_{25}$ thin film exhibits the largest value (i, e., $\Delta$ $E^{OP}$ ~40meV for $\alpha$-S $e_{95}$ G $e_{5}$ , $\Delta$ $E_{OP}$ ~200meV for $\alpha$-S $e_{75}$ G $e_{25}$ , $\Delta$ $E_{OP}$ ~130meV for $\alpha$-S $e_{67}$ G $e_{33}$ ). PL spectra in $\alpha$-SeGe by hν$_{HeCd}$ have no-Stokes shift (SS) and show a tendency dependent on both composition and illumination time. We explain the energy-induced phenomena such as the PD and thermal bleaching, the native charged-defect generation and the no-SS PL, etc..the PD and thermal bleaching, the native charged-defect generation and the no-SS PL, etc..tc..

Synergistic Effect on the Photocatalytic Degradation of 2-Chlorophenol Using $TiO_2$Thin Films Doped with Some Transition Metals in Water

  • Jeong, O Jin
    • Bulletin of the Korean Chemical Society
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    • v.22 no.11
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    • pp.1183-1191
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    • 2001
  • The metallorganic chemical vapor deposition (MOCVD) method has been used to prepare TiO2 thin films for the degradation of hazardous organic compounds, such as 2-chlorophenol (2-CP). The effect of supporting materials and metal doping on the photocatalytic activity of TiO2 thin films also has been studied. TiO2 thin films were coated onto various supporting materials, including stainless steel cloth(SS), quartz glass tube (QGT), and silica gel (SG). Transition metals, such as Pd(II), Pt(IV), Nd(III) and Fe(III), were doped onto TiO2 thin film. The results indicate that Nd(Ⅲ) doping improves the photodegradation of 2-CP. Among all supporting materials studied, SS(37 ${\mu}m)$ appears to be the best support. An optimal amount of doping material at 1.0 percent (w/w) of TiO2-substrate thin film gives the best photodegration of 2-CP.

Pd Shunt Resistor for Josephson Junction : Fabrication and Dynamic Simulation (Pd Shunt저항의 제작 및 동력학특성 조사)

  • 김규태;남두우;이규원;유광민
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.02a
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    • pp.143-145
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    • 2003
  • External shunt resistor is used in Nb/AlOx/Nb Josephson junction which is basic component of RSFQ circuit. This is to increase damping and to make the so called 'self-reset' optimized for high speed operation. In this study, we fabricated and investigated sheet resistance of Pd and PdAu thin film, and simulated the inductance effect of the shunt resistor to the Josepshon junction dynamics.

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A PLC-Based Optical Sub-assembly of Triplexer Using TFF-Attached WDM and PD Carriers

  • Han, Young-Tak;Park, Yoon-Jung;Park, Sang-Ho;Shin, Jang-Uk;Kim, Duk-Jun;Park, Chul-Hee;Park, Sung-Woong;Kwon, Yoon-Koo;Lee, Deug-Ju;Hwang, Wol-Yon;Sung, Hee-Kyung
    • ETRI Journal
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    • v.28 no.1
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    • pp.103-106
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    • 2006
  • We have fabricated a planar lightwave circuit (PLC) hybrid-integrated optical sub-assembly of a triplexer using a thin film filter (TFF)-attached wavelength division multiplexer (WDM) and photodiode (PD) carriers. Two types of TFFs were attached to a diced side of a silica-terraced PLC platform, and the PD carriers with a $45^{\circ}$ mirror on which pin-PDs were bonded were assembled with the platform. A clear transmitter eye-pattern and minimum receiver sensitivity of -24.5 dBm were obtained under 1.25 Gb/s operation for digital applications, and a second-order inter-modulation distortion (IMD2) of -70 dBc was achieved for an analog receiver.

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Pb-based piezoelectric thick films prepared by a screen printing (Screen printing에 위한 Pb계 압전세라믹스 후막의 제조)

  • Paik, D.S.;Shin, H.S.;Sim, S.H.;Park, Y.W.;Kang, C.Y.;Shin, H.Y.;Yoon, S.J.
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1541-1543
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    • 1999
  • Screen printing에 의해 압전 후막을 제조하기 위하여 약 $0.6{\mu}m$의 평균 입자 크기를 갖는 PMN-PZT와 PAN-PZT 분말을 산화물 혼합법에 의해 제조하였다. 치밀한 후막의 제조를 위한 분말과 유기물의 비율은 분산이 가능한 범위에서 80:20 (분말:유기물)의 중량비를 나타내었다 사용된 기판과 하부전극은 각각 $SiO_2$/Si와 AgPd 였으며, 후막 제조시 박리 및 균열현상은 발생되지 않았다. 프린트된 후막은 건조온도와 무관한 미세구조를 나타내었으며, 보다 치밀한 구조를 갖는 후막의 제조를 이해 입자의 분산 및 열처리 조건 그리고 기판과의 매칭에 대해 연구가 계속되어야 할 것으로 생각된다.

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Electrochemical Oxidation of Sulfur Dioxide on Tin Oxide Thin Film Electrode (산화주석 얇은 막 전극에서의 이산화황 산화반응)

  • Jong In Hong;Woon Kie Paik;Ha Suck Kim
    • Journal of the Korean Chemical Society
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    • v.29 no.2
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    • pp.172-177
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    • 1985
  • The semiconducting property of Sb-doped tin oxide thin film electrode was investigated and the electrocatalytic effect of this electrode for $SO_2$ (or sulfite, bisulfite ions) oxidation reaction was studied under various conditions. The anodic oxidation of $SO_2$ at tin oxide thin film electrode commenced at lower potential with increasing pH, and good electrocatalytic effect was shown of $SO_3^=$ oxidation in basic solution. In the acidic solutions the electrocatalytic effect of platinum-or palladium-incorporated tin oxide electrode was found to be due to the sites of Pt or Pd exposed on the electrode surface. The electrocatalytic effect of tin oxide electrode was distinctive from that of Pt-or Pd-containing electrodes.

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Thickness Dependence of Hydrogenation Characteristics on Pd Films (Pd 박막의 두께 변화에 의한 수소화 특성 변화)

  • Cho, Young-Sin
    • Transactions of the Korean hydrogen and new energy society
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    • v.5 no.2
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    • pp.59-63
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    • 1994
  • Thermally evaporated Pd films on substrate were hydrogenated upto 1 bar of hydrogen gas at room temperature. Thickness dependence on hydrogenation on Pd film is examined in the thickness range between $60{\AA}$ and $800{\AA}$. Hydrogenation kinetics of thinner films(thinner than $500{\AA}$) and that of thicker films are different. Thin film(thickness < $200{\AA}$, substrate temp. = RT) showed recrystallization due to hydrogen induced heat. Hydrogen was absorbed by chemisorption process in ${\alpha}$ phase of thinner films, and diffusion process in ${\alpha}'$ phase of thicker films respectively.

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Hydrogen Detection System Based on Pd Coated Single Mode Fiber Sensor (Pd이 코팅된 단일모드 광섬유 센서를 이용한 수소 검출 시스템)

  • Kim, Kwang-Taek;Park, Son-Oc;HwangBo, Seung;Mah, Jae-Pyung;Baik, Se-Jong;Im, Kie-Gon;Kim, Tae-Un;Kim, Hwe-Jong
    • Korean Journal of Optics and Photonics
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    • v.18 no.6
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    • pp.389-394
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    • 2007
  • The characteristics of the single mode fiber hydrogen sensor have been investigated theoretically and experimentally. Palladium is adopted as a material for the transducer and a thin Ni film is used for the adhesion between the fiber end and the Pd film. It is shown that sensitivity and response time strongly depend on the thickness of Pd film. The single mode fiber sensor coated with 5 nm thick Ni adhesion layer and 10 nm thick Pd transducer layer showed 0.6 dB change of reflectivity and $3{\sim}5$ sec of response time as it absorbed 4% hydrogen gas.