• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.603-606
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• 2005

In this paper, the formation and thermal stability of Ni-silicide using Ni-Pd alloys is studied for ultra shallow S/D junction of nano-scale CMOSFETs. There are no different effects when Ni-Pd is used in single structure and TiN capping structure. But, in case of Cobalt interlayer structure, it was found that Pure Ni had lower sheet resistance than Ni-Pd, because of a thick silicide. Also, Ni-Pd has merits that surface of silicide and interface between silicide and silicon have a good morphology characteristics. As a result, Ni-Pd is an optimal candidate for shallow S/D junction when cobalt is used for thermal stability.

• Journal of Korean Society on Water Environment
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• v.34 no.6
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• pp.621-631
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• 2018

In this study, catalyst was made through incipient wetness method using palladium (Pd) as noble metal, indium (In) as secondary metal, and montmorillonite (MK10) and Al pillared montmorillonite (Al-MK10) as supporters. The nitrate reduction rate of the catalysts was measured by batch experiments where H2 gas was used as reducing agent and formic acid as pH controller. Transmission electron microscopy (TEM) equipped with energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) were all used to determine the elemental distribution of Pd, In, Al, and Si on catalysts. It was observed that Al pillaring increased the Al/Si elemental composition ratio and point of zero charge of MK10, but decreased its BET specific surface area and pore volume. The nitrate reduction rate of Al-MK10 Pd/In was 2.0 ~ 2.5 times higher than that of MK10 Pd/In using artificial groundwater (GW) in ambient temperature and pressure. Nitrate reduction rates in GW were 1.2 ~ 1.7 times lower than those in distilled deionized water (DDW). Nitrate reduction rates in acidic conditions were higher than those in neutral condition in both GW and DDW. The amount of produced NH3-N over degraded NO3- at acid conditions was lower than that of neutral condition. Even though the leaching of Pd after reaction was measured in DDW it was not detected when both Al-MK10 Pd/In and MK10 Pd/In were used in GW. The modification of montmorillonite as a supporter significantly increased the reductive catalytic activities of nitrates. However, the ratio of producing ammonia by-products to degraded nitrates in ambient temperature and pressure was similar.

• Proceedings of the Materials Research Society of Korea Conference
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• 1996.11a
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• pp.115-115
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• 1996

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.31-32
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• 2005

Ge 농도가 30%인 SiGe 위에 Ni-Pd 합금을 이용한 새로운 Ni-Germanosilicide의 방법을 제안하여 열안정성 향상에 대해 연구하였다. 새롭게 제안한 Ni-Pd 합금을 이용하여 3 가지 구조 (Ni-Pd, Ni-Pd/TiN, Ni-Pd/Co/TiN) 중 Cobalt 다층구조를 사용한 구조 (Ni-Pd/Co/TiN)가 면저항이 가장 낮고 안정한 silicide 특성을 갖는 것을 나타냈으며, 고온열처리 $700^{\circ}C$, 30분에서도 낮고 안정한 면저항 특성을 유지시켜 열안정성을 개선하였다.

• Journal of Korean Society for Atmospheric Environment
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• v.12 no.2
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• pp.121-130
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• 1996

The catalysts composed of Pt, Pd and W as active-components, $Al_{2}O_{3}$ and $SiO_{2}$ as supports, were perpared on the honeycomb type substrate and characterized by BET, SEM, TGA, FT-IR and XRD for diesel emission control. CO, $C_{3}H_{6}$, and $SO_{2}$ oxidation was carried out over these catalysts in a fixed bed continuous flow reactor at the temperatures between 100-500.deg.C and reactant gas was composed of 10 vol.% $O_{2}$, 1 vol.% CO, 0.8 vol.% $C_{3}H_{6}$ and 88.2 vol.% $N_{2}$. It was found that under these experimental conditions, the CO, $C_{3}H_{6}$ oxidation activity of Pt-W catalyst was higher than that of any other prepared catalyst, and this catalyst had also a good inhibition effect on $SO_{2}$ oxidation. Also it was show that the influence of $SO_{2}$ on $Al_{2}O_{3}$ was more sever than that of $SO_{2}$ on $SiO_{2}$.

• Journal of Hydrogen and New Energy
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• v.3 no.2
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• pp.17-24
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• 1992

Hydrogen gas sensors were fabricated after the form of metal/insulator/semiconductor(MIS) structure on a p-type silicon wafer and a insulating layer (silicon dioxide) thickness was changed from $500{\AA}$ to $5000{\AA}$. Their electrical properties were investigated with the variation of the hydrogen gas concentration at room temperature. At the applied forward bias of lV to both ends of Pd-MIS sensors the current was decreased logarithmically with the increase of hydrogen concentration in air. In the case of a thin $SiO_2$ layered ($500{\AA}$) sensor the current ratio was decreased to 25 % at 1 % of hydrogen concentration in air and 50% for a thick $SiO_2$ layered ($5000{\AA}$) sensor. And the response time of the thick insulating layered sensor to 1% hydrogen containing air was about 50 seconds and regeneration time was 2.5 minutes. When a 0.5mA current was appied to the thick insulating layered sensor the maximun voltage shift was calculated to 0.8V in the case of ${\theta}$ = 1 and the Pd surface coverage of hydrogen was increased logarithmically with hydrogen partial pressure.

• Journal of the Korean Ceramic Society
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• v.41 no.11
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• pp.851-857
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• 2004

The stabilizing characteristics of heavy metals in the silicate glass (SD), borosilicate glass (BD), and leadsilicate glass (PD) containing Electric Arc furnace (EAF) dust were studied by the Toxic Characterization Leaching Procedure (TCLP) test. Also, the dependence of the amount of EAF dust upon structural changes of SD, BD, and PD glasses and the TCLP results were investigated by the XRD and FT-IR spectroscopy. In the XRD results, all of SD, BD, and PD specimens containing dust up to 30 wt% were amorphous without crystallizing. In the TCLP test, the concentration of heavy metals leached from the glasses increased with the amount of EAF dust added. The SD specimen series showed the lowest heavy metal leaching and the heavy metal leachate of the PD specimens were lower than those of the BD specimens. But, the Pb leaching from the PD specimens was the highest in the PD glass composition due to the high Pb content. The value of oxygen/network former ratio could be used to compare the chemical durability within the same glass series, but not proper to do between the different glass series. Adding the EAF dust to the SD mother glass, decreased the Si-O-Si symmetry and increased the non-bridging oxygen, which weakened the structure and decreased the chemical durability of glasses. In the BD series glasses, the addition of EAF dust caused the structural changes from tetra-borate group to di-borate group and the formation of the 2-dimensional layer structure of pyre- and ortho- borate, which decreased the chemical durability of glasses. It is concluded that SD series glass among the 3 kinds of glasses is the most effective to stabilize the heavy metals of EAF dust.

• Journal of Korea Foundry Society
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• v.37 no.4
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• pp.101-107
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• 2017

This study investigated the effect of Pd on the microstructure, tensile and creep properties of Mg-4Al-2Sn (AT42) alloy at a high temperature for transportation-related industrial applications. AT42-xPd (x = 0, 1 and 2 wt. %) alloys were prepared using a permanent mould casting method. The microstructures of the as-cast alloys were characterized by the presence of the intermetallic phases $Mg_{17}Al_{12}$, $Mg_2Sn$ and $Al_4Pd$. The addition of Pd was found to improve the tensile properties of AT42 at room and at elevated temperatures, and to increase the creep resistance at elevated temperatures. A small amount of Pd could markedly improve the tensile properties of AT42 by means of grain-refinement and the dispersion of secondary phase strengthening. Moreover, the thermally stable phase $Al_4Pd$ effectively improves the creep resistance of AT42 due to the strengthened grain boundaries and the suppressed formation of $Mg_{17}Al_{12}$.

• Korean Journal of Materials Research
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• v.6 no.1
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• pp.124-129
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• 1996

TiN 기판상에 CVD와 무전해 도금을 이용하여 구리막을 성장시킬 때 여러 가지 전처리에 따른 증착 양상의 변화에 관하여 조사하였다. Cu(hfac)2를 선재(precursor)로 사용하여 CVD 증착을 실시할 때 각 전처리에 따른 TiN상의 구리막의 덮힘성(coverage)향상은 Pd-HF 활성화 처리>>HF dip> RF remote plasma의 순이었다. 특히 Pd-HF 활성화 처리를 해줄 경우 거의 완전한 연속막을 얻을수 있었으며 scotch tape peel test 결과 매우 양호한 부착특성을 보였으나, 이에 비해 전처리를 해주지 않은 경우에는 오랜 시간이 경과되어도 연속막으로 성장하지 못하고 섬모양의 큰 결정립을 이룰 뿐이었다. 이러한 차이는 Pd-HF 활성화 처리에 의해 표면에 미세하게 형성된 Pd층이 구리의 핵생성과 부착특성을 크게 향상시켰기 때문인 것으로 사료되며 이러한 효과는 무전해 도금의 경우에도 마찬가지였다. 그리고 기판과 증착온도에 따른 선택성을 보면 35$0^{\circ}C$이하에서는 pd-HF 활성화 처리에 의해서 SiO2에 대하여 TiN으로의 선택성을 가지나 그 이상의 온도에서는 선택성이 상실되었다.

• Proceedings of the KIEE Conference
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• 2008.04b
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• pp.174-175
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• 2008

초고압 변전소의 주요설비인 가스절연개폐장치(GIS: Gas Insulated Switchgear)의 신뢰도를 높이기 위해서는 절연체 내부에서 발생하는 부분방전을 사전에 진단하여 예방을 하는 것이 중요하다. 현재 이에 대한 진단장치 개발이 이루어지고 있으며 GIS On-line System 장치 및 휴대용 진단장비가 국내에서 제작되고 있으나 On-line System은 고가의 비용이 들고 휴대용 진단장비는 상시감시가 어렵다는 단점을 가지고 있다. 이러한 단점을 보완하기 위해서 본 연구내용에서는 저가이면서 상시 PD 감시능력을 가진 PD 카운터에 대해 설명하고 GIS 현장에 실제 적용한 자료와 휴대용 진단장비와 함께 비교 적용한 자료를 가지고 PD 카운터의 특성을 확인하는데 역점을 두었다.