• 제목/요약/키워드: Pd/Co multilayer

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IN SITU STRESS MEASUREMENTS OF Co-BASED MULTILAYER FILMS

  • Kim, Young-Suk;Shin, Sung-Chul
    • 한국자기학회지
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    • 제5권5호
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    • pp.470-473
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    • 1995
  • We have constructed an apparatus for in sity measurement of stress of the film prepared by sputtering using an optical noncontact displacement detector. A Change of the gap distance between the detector and the substrate, caused by stress of a deposited film, was detected by a corresponding change of the reflectivity. The sensitivity of the displacement detector was $5.9\;{\mu}V/{\AA}$ and thus, it was turned out to be good enough to detect stress caused by deposition of a monoatomic layer. The apparatus was applied to in situ stress measurements of Co/X(X=Pd or Pt) multilayer thin films prepared on the glass substrates by dc magnetron sputtering. At the very beginning of the deposition, both Co and X sublayers have subjected to their own intrinsic stresses. However, when the film was thicker than about $100{\AA}$, constant tensile stress in the Co sublayer and compressive stress in the X sublayer were observed, which is believed to be related to a lattice mismatch between the matching planes of Co and X.

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이동통신 단말기에 이용되는 적층 칩 써미스터 제작 (The Fabrication of Mulilayer Chip NTC Thermistor for Mobile Communication Telephone)

  • 윤중락;이헌응;김지균;이석원
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1794-1796
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    • 2000
  • Oxides of the form $Mn_{3}O_4$-$Co_{3}O_4$-NiO present properties that make them useful as multilayer chip NTC thermistor for mobile communication telephone. When $Mn_{2}Ni_{x}CO_{1-x}O_4$ composition with the X = 0.12$\sim$0.24 at sintered temperature 1250$^{\circ}C$, resistivity and B-constant were 300$\sim$450[${\Omega}-cm$] and 3250$\sim$3450, respectively. Multilayer chip NTC(Negative Temperature Coefficient) resistor were fabricated with 4 layer by a conventional multilayer capacitor techniques, using 100 pd paste as internal electrode and $Mn_{2}Ni_{0.20}CO_{0.8}O_4$ composition as NTC materials. In particular, resistance change ratio (${\Delta}R$), the important factor for reliability, varied within $\pm$3%, indicating the compositions of multilayer chip NTC thermistor products could be available for mobile communication telephone.

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LTCC 기판의 Particle Size 에 따른 Ag-Pd 전극의 Soldering 특성 변화 (Soldering characteristics of Ag-Pd electrodes in relationship to differing particle size of LTCC substrate)

  • 조현민;유명재;박종철
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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    • pp.130-133
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    • 2002
  • Solder leaching resistance of the metal electrode is an important factor with regard to adhesion properties of ceramic substrate. In the Low Temperature Co-fired Ceramics (LTCC), Ag-Pd or Ag-Pt pastes are used instead of pure Ag paste to prevent leaching. Solder leaching behavior of the Ag-Pd paste in relation to LTCC raw material powder size was investigated. First fabrication of LTCC green tape with different particle size was done. LTCC substrates with Ag-Pd electrode were prepared using conventional multilayer ceramic process. Dipping test was performed to test solder leaching behavior of the electrode. Ag-Pd electrode on LTCC substrate with smaller particle size achieved higher solder leaching resistance.

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스퍼터링 압력이 Co/Pd 다층박막의 자화반전 및 수직자기 이방성에 미치는 영향 (Effects of Sputtering Pressure on the Magnetization Reversal Process and Perpendicular Magnetic Anisotropy of Co/Pd Multilayered Thin Films)

  • 오훈상;주승기
    • 한국자기학회지
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    • 제4권3호
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    • pp.256-262
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    • 1994
  • 코발트 단위층의 두께가 $2{\AA}$$4{\AA}$인 두 경우에 대해 막의 총두께가 약 $200{\AA}$인 Co/Pd 다층막을 제조하였으며 이 때 스퍼터링 압력이 자화반전 및 수직자기이방성에 미치는 영향에 대해 연구 하였다. 수직자기이방성 에너저지가 최대치를 보이는 압력이 존재하였으며 $2{\AA}$ 코발트층의 경우 $4{\AA}$ 경우 보다 낮은 압력에서 최대치가 나타났다. 자화시 자구벽 이동은 압력이 높을수록 어려워졌으며 높은 압력에서 는 자구벽 이동으로부터 자기모멘트 회전으로 자화반전기구가 바뀌었다. 또한 코발트층의 두께가 $2{\AA}$인 경우가 $4{\AA}$인 경우보다 수직자기이방성 에너지가 큰 것으로 나타났다.

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Magnetic Circular Dichroism Study of co Thin Films on Pd(111) Surface

  • Kim, Wookje;Kim, Wondong;Kim, Hyunjo;Kim, Jae-Young;Hoon Kho;Park, J.H.;Oh, S.J.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.169-169
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    • 1999
  • We studied magnetic properties of co thin films deposited on Pd (111) surface, which attracted much attention recently due to the perpendicular magnetic anisotropy, using magnetic circular dichroism(MCD). Special attention was paid on the effect of Pd capping and interface roughness on the direction of magnetic easy axis, and for that purpose MCD signals for all Co thicknesses were measured with two different ways : in-plane and out-of-plane geometry. In case of bare Co films deposited on smooth Pd(111) surface, no MCD signal was observed under 4$\AA$ co thickness. At 4$\AA$ Co thickness, MCD signal at the out-of-plane geometry was observed, and for thicker Co films, only in-plane MCD signal was measured. This type of magnetic easy axis transition has been reported for other cases like Co/Pt system. The effect of 5$\AA$ Pd capping on these bare Co films made an remarkable change on the transition of magnetic easy axis. Out-of-plane MCD signals exists up to 20$\AA$ Co thickness, and disappears at 24$\AA$ Co thickness. In-plane MCD signals first appears at 10$\AA$ Co thickness and gradually increases up to 24$\AA$ Co thickness. Between 10$\AA$ and 20$\AA$ Co thickness, in-plane and out-of-plane MCD signal coexist. The formation of multi-domain structure or the existence of tilted magnetic easy axis is an possible scenario for such an interesting coexistence. The effect of interface roughness was also tested by measuring MCD signal on Co films deposited on un-annealed Pd(111) surface. Out-of-plane MCD signal was observed up to 8$\AA$ Co thickness and the anisotropy of MCD signal at 4$\AA$ Co thickness was very large with respect to that of Co film deposited on the smooth substrate. Above 8$\AA$ thickness, there exists only in-plane MCD signal. From above results, it was concluded that both Pd capping and interface roughness induce and reenforce the perpendicular magnetic anisotropy. The large perpendicular magnetic anisotropy of Co/Pd multilayer system made by sputtering method can be well understood from our results.

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마이크로파 소결법을 이용한 Bi0.5Na0.5TiO3계 적층형 세라믹 액추에이터 제조 (Preparation of Bi0.5Na0.5TiO3-Based Multilayer Ceramic Actuators Using Microwave Sintering)

  • 강진규;이재신
    • 한국전기전자재료학회논문지
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    • 제27권11호
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    • pp.702-706
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    • 2014
  • A comparative study has been attempted for microwave and conventional sintering of lead-free $Bi_{0.5}Na_{0.5}TiO_3(BNT)$-based multilayer ceramic actuators(MLAs). It was found that microwave sintering (MWS) could be successfully applied to the co-firing of piezoceramic/AgPd MLAs with a 10 times shorter firing cycle as well as $100^{\circ}C$ lower firing temperature ($850^{\circ}C$) for sufficient densification than conventional furnace sintering ($950^{\circ}C$). Furthermore, MWS-derived specimens showed better electric field-induced strain than that of CFS-derived specimens by effectively suppressing interdiffusions between ceramic and electrode layers.

[Pd/Co] 다층박막을 이용한 수직스핀밸브 구조에서 비자성층에 인접한 강자성 물질과 그 두께에 따른 자유층의 보자력 변화 (Coersivity Alteration of Free Layer in the [Co/Pd] Spin-valves with Perpendicular Magnetic Anisotropy)

  • 허장;최형록;이기암
    • 한국자기학회지
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    • 제20권3호
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    • pp.89-93
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    • 2010
  • 수직자기이방성을 갖는 $[Pd/Co]_N$ 다층박막을 이용한 스핀밸브구조에서 Cu에 인접한 강자성층의 물질의 종류와 두께에 따른 자기적 특성을 연구하였다. 본 연구에서 강한 수직자기이방성에 기인한 자유층의 큰 보자력을 줄이기 위하여 Cu 비자성층에 인접 한 강자성층에 물질을 NiFe, $Co_8Fe_2$, $Co_9Fe_1$로 삽입하여 각 물질이 갖는 수직 이방성 크기를 조절하여 수직자기 이방성을 갖는 스핀밸브 구조의 자기적 특성을 실험하였다. $Co_9Fe_1$ 물질을 Cu에 인접한 두 강자성층에 0.078 nm의 얇은 두께로 삽입한 결과 0.58%의 자기저항비를 가짐과 동시에 5 Oe의 작은 보자력을 나타내었다. 또한 그 두께를 0.7 nm로 증가시켰을 때 최대 6.7%의 자기저항비를 얻었고 자유층의 보자력을 약 100 Oe로 감소시켰다.

산화물을 첨가한 Ag-Pd 전극의 제조 (Synthesis of Ag-Pd Electrode having Oxide Additive)

  • 이재석;이동윤;송재성;김명호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.735-738
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    • 2003
  • Downsizing electronics requires precision position control with an accuracy of sub-micron order, which demands development of ultra-fine displacive devices. Piezoelectric transducer is one of devices transferring electric field energy into mechanical energy and being capable for fine displacement control. The transducer has been widely used as fine Position control device Multilayer piezoelectric actuator, one of typical piezo-transducer, is fabricated by stacking alternatively ceramic and electrode layers several hundred times followed by cofiring process. Electrode material should be tolerable in the firing process maintaining at ceramic-sintering temperatures up to $1100{\sim}1300^{\circ}C$. Ag-Pd can be used as stable electrode material in heat treatment above $960^{\circ}C$. Besides, adding small quantity ceramic powder allow the actuator to be fabricated in a good shape by diminishing shrinkage difference between ceramic and electrode layers, resulting in avoidance of crack and delamination at and/or nearby interface between ceramic an electrode layers. This study presents synthesis of nano-oxide-added Ag/Pd powders and its feasibility to candidate material tolerable at high temperature. The powders were formed in a co-precipitation process of Ag and Pd in nano-oxide-dispersed solution where Ag and Pd precursors are melted in $HNO_3$ acid.

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