• Title/Summary/Keyword: Patterning method

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Variation of Nutrient Broth Droplets Patterned by Electrospray System with Flow Rates (정전분무를 이용한 패턴화된 생물현탁액 액적의 유량에 따른 변화 연구)

  • Jeong, Sang Bin;Jang, Kyung Soo;Lee, Gunwoong;Chong, Euiseok;Heo, Ki Joon;Lee, Byung Uk
    • Particle and aerosol research
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    • v.11 no.4
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    • pp.115-118
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    • 2015
  • An electrospray patterning method has been considered as a new and effective way for controlling very fine droplets. Drop-on-demand patterning for unstained nutrient broth on wafers was newly conducted with an electrospray pulsed jet. The patterns had been made under varying experimental conditions including flow rate, vibration frequency, and translational speed of the electrospray patterning system. In this experiment, especially, variation of nutrient broth droplet was measured under varying flow rate conditions. This new technique has a potential to be applied in biology experiments and hormone medical industry.

Multi-head Inkjet Patterning System for Manufacturing a Full Color Polymer Light Emitting Device (pLED) (고분자 유기 EL 제조를 위한 멀티헤드형 잉크젯 패터닝 시스템)

  • Oh, Je-Hoon;Kim, Si-Kyoung;Yoon, Hee-Youl;Oh, Se-Il;Kang, Yoo-Myung;Kim, Kwang-Il
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1219-1225
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    • 2003
  • According to the increase of lifetime and efficiency, the interest in the pLED has dramatically increased recently because pLED can be applied to large-size and flexible displays. The core process in the manufacture of pLED is the printing process of red, green and blue light emitting polymers (LEP), and inkjet printing method is one of the promising technology to print red, green and blue LEP on glass substrates. In this work, we developed a multi-head inkjet patterning system with 3 heads for each color. The developed inkjet patterning system is composed of the precise positioning system, head controller circuit, real-time ink drop evaluation system, maintenance system, and stable ink supply system. Finally, we investigated the stability and reliability of the system by printing red, green and blue LEP on the dummy substrate.

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Monte Carlo Simulation Study: the effects of double-patterning versus single-patterning on the line-edge-roughness (LER) in FDSOI Tri-gate MOSFETs

  • Park, In Jun;Shin, Changhwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.13 no.5
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    • pp.511-515
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    • 2013
  • A Monte Carlo (MC) simulation study has been done in order to investigate the effects of line-edge-roughness (LER) induced by either 1P1E (single-patterning and single-etching) or 2P2E (double-patterning and double-etching) on fully-depleted silicon-on-insulator (FDSOI) tri-gate metal-oxide-semiconductor field-effect transistors (MOSFETs). Three parameters for characterizing the LER profile [i.e., root-mean square deviation (${\sigma}$), correlation length (${\zeta}$), and fractal dimension (D)] are extracted from the image-processed scanning electron microscopy (SEM) image for each photolithography method. It is experimentally verified that two parameters (i.e., ${\sigma}$ and D) are almost the same in each case, but the correlation length in the 2P2E case is longer than that in the 1P1E case. The 2P2E-LER-induced $V_TH$ variation in FDSOI tri-gate MOSFETs is smaller than the 1P1E-LER-induced $V_TH$ variation. The total random variation in $V_TH$, however, is very dependent on the other major random variation sources, such as random dopant fluctuation (RDF) and work-function variation (WFV).

Polyelectrolyte Micropatterning Using Agarose Plane Stamp and a Substrate Having Microscale Features on Its Surface

  • Lee, Min-Jung;Lee, Nae-Yoon;Lee, Sang-Kil;Park, Sung-Su;Kim, Youn-Sang
    • Bulletin of the Korean Chemical Society
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    • v.26 no.10
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    • pp.1539-1542
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    • 2005
  • We have introduced polyelectrolyte micro-patterning technique employing agarose plane stamp and a hard substrate having microscale features on its surface. With this method, chemically micropatterned surfaces with both positive and negative functionalities were successfully embedded in well-defined microstructures, and selective impartment of charge functionalities was confirmed by patterning bead bearing surface charge. Furthermore, this technique allows highly sensitive immobilization of protein onto targeted surface simply by endowing functionalities, which extends the potential of its use as a tool for high-throughput protein microarray and proteomics. Because plane agarose stamp is free of structures on its surface, there is no concern for pattern collapse, and the combination of agarose plane stamp with patterned substrate is more suited for selective protein patterning compared with adopting surface-patterned agarose stamp with flat substrate. Our technique using agarose plane stamp and a substrate having microscale features on its surface suggests a range of possible applications, including the micropatterning of biofunctionalized copolymer having polyelectrolyte block, immobilization of micro- and nanoparticle with biofunctionalities such as biotin and streptavidine, and establishing optoelectronic microstructures with micro-beads on various surfaces.

Formation of Copper Electroplated Electrode Patterning Using Screen Printing for Silicon Solar Cell Transparent Electrode (실리콘 태양전지 투명전극용 스크린 프린팅을 이용한 구리 도금 전극 패터닝 형성)

  • Kim, Gyeong Min;Cho, Young Joon;Chang, Hyo Sik
    • Korean Journal of Materials Research
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    • v.29 no.4
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    • pp.228-232
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    • 2019
  • Copper electroplating and electrode patterning using a screen printer are applied instead of lithography for heterostructure with intrinsic thin layer(HIT) silicon solar cells. Samples are patterned on an indium tin oxide(ITO) layer using polymer resist printing. After polymer resist patterning, a Ni seed layer is deposited by sputtering. A Cu electrode is electroplated in a Cu bath consisting of $Cu_2SO_4$ and $H_2SO_4$ at a current density of $10mA/cm^2$. Copper electroplating electrodes using a screen printer are successfully implemented to a line width of about $80{\mu}m$. The contact resistance of the copper electrode is $0.89m{\Omega}{\cdot}cm^2$, measured using the transmission line method(TLM), and the sheet resistance of the copper electrode and ITO are $1{\Omega}/{\square}$ and $40{\Omega}/{\square}$, respectively. In this paper, a screen printer is used to form a solar cell electrode pattern, and a copper electrode is formed by electroplating instead of using a silver electrode to fabricate an efficient solar cell electrode at low cost.

Direct Growth of Patterned-Graphene Using PVP Nanowire Shadow Mask (PVP 나노와이어를 활용한 패턴된 그래핀의 직성장)

  • Eunho Lee;Daesuk Bang
    • Journal of Adhesion and Interface
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    • v.24 no.4
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    • pp.120-123
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    • 2023
  • Graphene, with its exceptional mechanical and electrical properties, has gained significant attention from researchers due to its superior characteristics compared to conventional materials. However, the application of graphene in electronic devices requires a crucial transcription and patterning process, which often introduces numerous defects, substantially impairing its properties. To overcome this limitation and unlock the full potential of graphene for commercial use, there have been various efforts to develop integrated processes for transcription and patterning. In this study, we present a novel growth method that simultaneously achieves precise patterning using polymer nanowires as masks, allowing for the direct growth of graphene. This innovative approach holds promise for realizing advanced electronic components based on nanomaterials in the future.

NUMERICAL STUDY ON THE MICRO-LINE PATTERNING PROCESS USING AN INKJET PRINGTING METHOD (잉크젯 방법을 통한 마이크로 라인 형성에 관한 수치적 연구)

  • Lee, W.R.;Son, G.
    • 한국전산유체공학회:학술대회논문집
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    • 2010.05a
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    • pp.548-550
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    • 2010
  • The droplet motion on a flat substrate with contact angle hysteresis is studied by solving the equations governing the conservation of mass and momentum. The liquid- gas interface is determined by an level-set method which is based on a sharp-interface representation for accurately imposing the matching or coupling conditions at the interface. The method is modified to treat the dynamic contact angle at the liquid-gas-solid interface. The computations are performed to investigate a droplet impact and merging pattern on a flat substrate to find a optimal condition in a micro-line patterning process. The effects of dynamic contact angles on droplet motion are quantified.

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Development of Ink-Jet Head Controller for Electro-Luminescence Display (유기 EL 디스플레이 생산 공정을 위한 잉크젯헤드 제어시스템 구현)

  • Jung, S.U.;Lee, H.S.;Ryoo, J.H.;Park, J.S.;Chung, M.J.
    • Proceedings of the KIEE Conference
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    • 2004.11c
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    • pp.623-625
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    • 2004
  • In Electro-Luminescence Display making process, it is necessary to do high molecule patterning effectively. Recently, one of the most effective way is the patterning method using Ink-Jet head controller. To maximize the effect, it is needed to control each channel of Ink-Jet head and develop that controller. Thus, we implement the Ink-Jet Head Controller which can control the parameters of 128 fire pulses independently, improve the accuracy of patterns more than 100 times previous ones, and apply random patterns.

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High resolution patterning of polyfluorene derivative containing photo cross-linkable oxetane units

  • Park, Moo-Jin;Lee, Jeong-Ik;Chu, Hye-Yong;Kim, Seong-Hyun;Zyung, Taeh-Young;Hwang, Do-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1419-1420
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    • 2005
  • We have synthesized a photo patternable blue lightemitting polyfluorene (PF) derivative containing cross-linkable oxetane units. Poly(9,9-bis-(4-octyloxyphenyl)- fluorene-2,7-diyl-alt-9,9-bis-((3-hexyloxy-3'- ethyl)-oxetane)-fluorene-2,7-diyl) has been synthesized by Suzuki coupling polymerization. The relationship between patterning property and several variables such as the intensity of the exposed UV light, the concentrations of additives, has been studied by using optical microscope UV/visible spectroscopy, photoluminescence and scanning electron microscope (SEM). We obtained fine patterns with 10 mm resolution using the polymer film after exposure and development. This patterning method using conjugated polymers can be applicable to make fine pixels for PLEDs and OFETs.

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Photolithographic Method of Patterning Barrier Ribs for PDP by Green Sheet

  • Park, Lee-Soon;Jang, Dong-Gyu;Hur, Young-June;Lee, Sung-Ho;Kim, Duck-Gon;Kwon, Young-Hwan
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1225-1228
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    • 2005
  • Barrier ribs in the plasma display panel(PDP) function to maintain the discharge space between the glass plates as well as to prevent optical crosstalk. Patterning of barrier ribs is one of unique processes for making PDP. In this work photosensitive barrier rib pastes were prepared by incorporating binder polymer, solvent, functional monomers photoinitiator, and barrier rib powder of which surface was treated with fumed silica particles. Study on the function of materials for the barrier rib paste were undertaken. After optimization of paste formulation and photolithographic process, it was found that photolithographic patterning of barrier ribs with photosensitive barrier rib green sheet could be used in the fabrication of high resolution PDP.

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