• 응용통계연구
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• 제35권3호
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• pp.407-419
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• 2022

반도체는 제조 공정이 복잡하고 길어 결함이 발생될 때 빠른 탐지와 조치가 이뤄져야 결함으로 인한 손실을 최소화할 수 있다. 테스트 공정을 거쳐 구성된 웨이퍼 빈 맵(WBM)의 체계적인 패턴을 탐지하고 분류함으로써 문제의 원인을 유추할 수 있다. 이 작업은 수작업으로 이뤄지기 때문에 대량의 웨이퍼를 단 시간에 처리하는 데 한계가 있다. 본 논문은 웨이퍼 빈 맵의 정상 여부를 구분하기 위해 계층적 군집 분석을 활용한 새로운 결함 패턴 탐지 방법을 제시한다. 제시하는 방법은 여러 장점이 있다. 군집의 수를 알 필요가 없으며 군집분석의 조율 모수가 적고 직관적이다. 동일한 크기의 웨이퍼와 다이(die)에서는 동일한 조율 모수를 가지므로 대량의 웨이퍼도 빠르게 결함을 탐지할 수 있다. 소량의 결함 데이터만 있어도 그리고 데이터의 결함비율을 가정하지 않더라도 기계학습 모형을 훈련할 수 있다. 제조 특성상 결함 데이터는 구하기 어렵고 결함의 비율이 수시로 바뀔 수 있기 때문에 필요하다. 또한 신규 패턴 발생시에도 안정적으로 탐지한다. 대만 반도체 기업에서 공개한 실제 웨이퍼 빈 맵 데이터(WM-811K)로 실험하였다. 계층적 군집 분석을 이용한 결함 패턴탐지는 불량의 재현율이 96.31%로 기존의 공간 필터(spatial filter)보다 우수함을 보여준다. 결함 분류는 혼합 유형에 장점이 있는 계층적 군집 분석을 그대로 사용한다. 직선형과 곡선형의 긁힘(scratch) 결함의 특징에 각각 주성분 분석의 고유값과 2차 다항식의 결정계수를 이용하고 랜덤 포레스트 분류기를 이용한다.

• Journal of Electrical Engineering and Technology
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• 제11권6호
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• pp.1787-1792
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• 2016

Previous walking pattern generation methods could generate walking patterns that allow only straight walking on flat and uneven terrain. They were unable to generate modifiable walking patterns whereby the sagittal and lateral step lengths and walking direction can be changed at every footstep. This paper proposes a novel walking pattern generation method to realize modifiable walking of humanoid robots on unknown uneven terrain. The proposed method employs a walking pattern generator based on the 3-D linear inverted pendulum model (LIPM), which enables a humanoid robot to vary its walking patterns at every footstep. A control strategy for walking on unknown uneven terrain is proposed. Virtual spring-damper (VSD) models are used to compensate for the disturbances that occur between the robot and the terrain when the robot walks on uneven terrain with unknown height. In addition, methods for generating the foot and vertical center of mass (COM) of the 3-D LIPM trajectories are developed to realize stable walking on unknown uneven terrain. The proposed method is implemented on a small-sized humanoid robot platform, DARwIn-OP and its effectiveness is demonstrated experimentally.

• 한국운동역학회지
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• 제21권5호
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• pp.529-540
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• 2011

The purpose of this study was to evaluate the kinematic characteristics of $5^{th}$ and $6^{th}$ hurdle clearances during the final of the 110-m hurdles at the IAAF World Championships, Daegu 2011. To this end, the hurdling motions of the top 4 ranked male hurdlers in the competition were analyzed. A total of 12 cameras were used to record their motions, with a sampling frequency of 120 Hz. The cameras were calibrated using $11{\times}2{\times}1\;m$ control objects that covered all of the lanes (1st~8th lanes). After analyzing all the data, we arrived at the following results. In the take-off phase, all athletes revealed similar take-off times (CT), and similar distances from the take-off to hurdleto (L1) and hurdle to landing (L2). In particular, Turner, ranked $3^{rd}$, had an inconsistent L2 and may need further training to correct it. In the flight phase, Richardson, ranked $1^{st}$, showed the longest flight distance, whereas Xiang, who was ranked $2^{nd}$, showed the highest CG height from the hurdle. For the step patterns, to increase the pitch frequency, Richardson and Xiang used shorter 3-step lengths than Turner and Oliver.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.39-45
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• 2012

Cu-Cu 패턴의 직접접합 공정을 위하여 Buffered Oxide Etch(BOE) 및 Hydrofluoric acid(HF)의 습식 조건에 따른 Cu와 $SiO_2$의 식각 특성에 대한 평가를 수행하였다. 접촉식 3차원측정기(3D-Profiler)를 이용하여 Cu와 $SiO_2$의 단차 및 Chemical Mechanical Polishing(CMP)에 의한 Cu의 dishing된 정도를 분석 하였다. 실험 결과 BOE 및 HF 습식 식각 시간이 증가함에 따라 단차가 증가 하였고, BOE가 HF보다 더 식각 속도가 빠른 것을 확인하였다. BOE 및 HF 습식 식각 후 Cu의 dishing도 식각시간 증가에 따라 감소하였다. 식각 후 산화막 유무를 알아보기 위해 Cu표면을 X-선 광전자 분광법(X-ray Photoelectron Spectroscopy, XPS)를 이용하여 분석 한 결과 HF습식 식각 후 BOE습식 식각보다 Cu표면산화막이 상대적으로 더 얇아 진 것을 확인하였다.

• Design & Manufacturing
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• 제17권2호
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• pp.22-26
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• 2023

As Light-Emitting Diodes(LEDs) continue to advance in performance, their application in automotive lamps is increasing. Automotive LEDs utilize light guides not only for aesthetics but also to control light quantity and direction. Light guides employ patterns of a few hundred micrometers(㎛) to regulate the light, and the surface roughness(Ra) of these patterns can reach tens of nanometers(nm). Given that these light guides are produced through injection molding, mold processing technology with high surface quality micro-patterns is required. This study serves as a preliminary investigation into the development of high surface quality micro-pattern processing technology. It examines the surface roughness of the workpiece based on the cutting direction of the pattern and the cutting fluid type when cutting micro-patterns on STAVAX steel using cubic Boron Nitride(cBN) tools. The experiments involved machining a step-shaped micro-pattern with a height of 60 ㎛ and a pitch of 400 ㎛ in a 22×22 mm area under identical cutting conditions, with only the cutting direction and cutting fluid type being varied. The machining results of four cases were compared, encompassing two cases of cutting direction(parallel to the pattern, orthogonal to the pattern) and two cases of cutting fluid type (flood, mist). Consequently, the Ra value was found to be the highest(Ra 128.33 nm) when machining with the flood type in parallel to the pattern, while it was the lowest(Ra 95.22 nm) when machining with the mist type orthogonal to the pattern. These findings confirm that there is a difference of up to 25.8 % in the Ra value depending on the cutting direction and cutting fluid type.

• 대한물리치료과학회지
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• 제18권3호
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• pp.33-39
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• 2011

Background : The purpose of this study was to apply cervical orthosis for temporal parameters of gait was to evaluate the effect. Methods : Seven normal adults participated in this study. Before and after applying a cervical orthosis compared to gait. Outcome measure were: general characteristics, temporal parameters of gait. General chacteristics included age, gender, height, weight. Temporal parameters included the Velocity cycle, Stride length, Step length, Cadence cycle, Initial double support time. Temporal parameters of gait, using the motion analysis system for cervical orthosis were evaluated before and after applying. The data was analyzed using SPSS 12.0 software and the Wilcoxon's signed-ranks test. Results : Velocity cycle and Step length were no significant differences(p>0.05). But Stride length, Cadence cycle, Initial double support time were significant(p<0.05). After apply Cervical orthosis in gait, Stride length and Initial double support time was decreased and Cadence cycle was increased. Conclusion : Changes in temporal of temporal parameters of gait was apply a cervical orthosis with the limitations of vision due to take effect. Therefore, Cervical orthosis does not interfere with the normal gait pattern by limiting the Range of Motion so that we consider to apply.

• 한국정밀공학회지
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• 제19권5호
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• pp.149-158
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• 2002

Recently, the minimum line width shows a tendency to decrease and the multi-level increases in semiconductor. Therefore, a planarization technique is needed and chemical mechanical polishing(CMP) is considered as one of the most suitable process. CMP accomplishes a high polishing performance and a global planarization of high quality. However there are several defects in CMF, such as micro-scratches, abrasive contaminations and non-uniformity of polished wafer edges. Wet etching process including spin-etching can eliminate the defects of CMP. It uses abrasive-free chemical solution instead of slurry. On this study, ILD(Interlayer-Dielectric) was removed by CMP and wet etching process using DHF(Diluted HF) in order to investigate the possibility of planrization by wet etching mechanism. In the thin film wafer, the results were evaluated from the viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU). And the pattern step heights were also compared for the purpose of planarity characterization of the patterned wafer. Moreover, Chemical polishing process which is the wet etching process with mechanical energy was introduced and evaluated for examining the characteristics of planarization.

• 한국운동역학회지
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• 제18권4호
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• pp.209-216
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• 2008

본 연구의 목적은 대학 세단뛰기 선수들의 각 지지국면에서 충격력과 운동학적 변인을 조사하는 것이다. 실제 경기 상황을 촬영하였고 경기력이 올림픽 B기준을 통과한 선수를 대상으로 영상분석 방법을 이용하여 자료를 산출하였다. 본 연구의 결과는 스텝 이륙과 착지 평균 거리가 홉과 점프의 이륙과 착지 거리보다 더 긴 것으로 조사되었다. 홉 이륙거리를 길게 하고 스텝의 착지거리를 줄여야 하는 것으로 조사되었다. 세단뛰기 각 국면에서 이륙과 접지순간에 나타나는 평균 신체중심의 높이 변화 패턴은 이륙순간에 medium-low-high이였고 접지순간에는 홉과 스텝이 동일한 패턴 이였다. 홉의 도약각도는 선행연구 보다 2도 더 높은 것으로 나타났고, 평균 충격력은 수평방향으로 체중에 약 0.6배에서 0.7배 범위에 있었고 수직방향으로는 약 2.8배에서 3.0배의 범위에 있는 것으로 나타났다.

• 한국의상디자인학회지
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• 제11권2호
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• pp.11-21
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• 2009

Recently, as custom-made demand about female underwear is increased, securing of a various dimension system is urgent, and satisfaction of each customer cannot be heightened with established dimensions. If we could measure shape of a living body with a fast and simple method, the custom-made demand of customers could be satisfied in the underwear as well as a clothing industry by using the method. One of the alternatives is shape measurement of the living body by a Moire fringe method. If we put a grating in front of an object to be measured and illuminate light, a Moire fringe with contour line shape is generated in the object, so we can conveniently measure object shape without touching directly by using the pattern. The Moire fringe and three-dimensional shape of the breast of the living body was acquired by a PMP method using a polygon mirror, and height and bottom width of the breast of the living body were measured by using obtained data in this study. Data of breast shape measurement through a mannequin was collected in a previous step as basic material for measuring the breast shape measurement of the living body. Three women in the twenties were selected as one of methods for measuring breast shape of a woman. As a result of the breast shape measurement of a living body A, it was measured that height of the breast was about 67.24mm and the bottom width was $13781.60mm^2$. This study is expected to contribute for collecting basic data of a female underwear industry and establishing a specification of a dimension system.

• 한국안전학회지
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• 제17권1호
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• pp.54-60
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• 2002

To obtain the breakthrough characteristics for the design of fixed bed adsorption plant, adsorption experiment on granular activated carbon was performed with tharonil in the fixed bed. The pore diffusivity and surface diffusivity of tharonil estimated by the concentration-time curve and adsorption isotherm were $D_s=2.825{\times}10^{-9}cm^2/s,\;D_p=1.26{\times}10^{-5}cm^2/s$, respectively. From comparison of the pore diffusivity and surface diffusivity, it was found that surface diffusion was controlling step for intrapaticle diffusion. The breakthrough curve predicted by constant pattern-linear driving force model were shown to agree with the experimental results. The surface diffusivity and film mass transfer coefficient had no effect on the theoretical breakthrough curve but the adsorption isotherm had fairly influence on it. Appearance time of breakthrough curve is faster with the increase flow rate and inflow concentration of liquid. The utility of granular activated carbon is enhanced with the increase of bed height and with the decrease of inflow rate.