Effect of Al2O3 Surface Passivation by Thermal Oxidation of Aluminum for AlGaN/GaN Structure (Al의 열산화 방법을 이용한 AlGaN/GaN 구조의 표면 Al2O3 패시베이션 효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.25 no.11
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- pp.862-866
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- 2012