Effect of Al2O3 Surface Passivation by Thermal Oxidation of Aluminum for AlGaN/GaN Structure
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Kim, Jeong-Jin
(Department of Semiconductor and Chemical Engineering, Chonbuk University)
Ahn, Ho-Kyun (Electronics and Telecommunications Research Institute) Bae, Seong-Bum (Electronics and Telecommunications Research Institute) Pak, Young-Rak (Electronics and Telecommunications Research Institute) Lim, Jong-Won (Electronics and Telecommunications Research Institute) Moon, Jae-Kyung (Electronics and Telecommunications Research Institute) Ko, Sang-Chun (Electronics and Telecommunications Research Institute) Shim, Kyu-Hwan (Department of Semiconductor and Chemical Engineering, Chonbuk University) Yang, Jeon-Wook (Department of Semiconductor and Chemical Engineering, Chonbuk University) |
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