• Journal of Korean Society for Atmospheric Environment
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• v.16 no.5
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• pp.445-451
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• 2000

To estimate dry deposition flux of 12 elements in aerosols, aerosol particles were sampled by a low-pressure impactor(LPI) and a dust jar. The concentrations of 12 elements in aerosol particle and dry deposition were analyzed by a PIXE analysis using as a 2.0 MeV-proton beam. The mean dry deposition velocities of 12 elements were estimated by ranges of 0.74∼2.62 cm/sec. The results showed that the highest value was 3.26 cm/sec for Ca and the lowest value 0.74 cm/sec for Fe. The dry deposition flux for elements was calculated as a function of particle size by 1-step method and 12-step method. In this work, dry deposition velocities were computed with the two existing models; the coarse-particle fraction(4∼30 mm diameter) using the dry deposition velocity model of the Noll and Fang(1998) and the fine-particle fraction (0.05∼4mm diameter) using the Shemel and Hodgson(1980) model. The ratios of the mean calculated/measured fluxes were 3.59 for 1-step method and 0.60 for 12-step method respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.235-240
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• 2017

The effect of particle sizes on the aerosol deposition (AD) of Cu films is investigated in order to understand the deposition behaviors of metal powder during the AD process. The Cu coatings fabricated by using $2{\mu}m$ Cu powders had a dense microstructure, a high deposition rate ($1.6{\pm}0.2{\mu}m/min$), and low resistance ($9.42{\pm}0.4{\mu}{\Omega}{\cdot}cm$) compared to that from using Cu powder with a particle size greater than $5{\mu}m$. Also, from estimating the internal micro-strain of Cu films, the Cu coatings fabricated by using $2{\mu}m$ Cu particles exhibited a high micro-strain value of $3.307{\times}10^{-3}$. On the other hand, the strain of Cu coatings fabricated with $5{\mu}m$ particles was decreased to $2.76{\times}10^{-3}$. These results seem to show that the impacted Cu particles are compressed and flattened by shock waves, and that their bonding is associated with the high internal micro-strain caused by plastic deformation.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.7 no.3
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• pp.521-527
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• 1995

The average particle deposition velocity toward a vertical wafer surface in a vertical airflow chamber was measured by a wafer surface scanner(PMS Model SAS-3600). Polystyrene latex(PSL) spheres with diameters between 0.3 and $0.8{\mu}m$ were used. To examine the effect of the airflow velocity on the deposition velocity, experiments were conducted for three vertical airflow velocities ; 20, 30, 50cm/s. Experimental data of particle deposition velocity were compared with those given by prediction model suggested by Liu and Ahn(1987).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.3
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• pp.219-224
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• 2020

Al₂O₃ powders with particle sizes of 0.35 ㎛, 0.5 ㎛, 1.5 ㎛, and 2.5 ㎛ are deposited onto glass and Cu substrates using the aerosol deposition (AD) process. The deposition characteristics of Al₂O₃ films using those four types of Al₂O₃ powders are investigated to determine the influence of the particle size on the films. To observe detailed micro-structures of the films, the cross-section and surface morphology are observed. Then, the crystalline size and internal strain are calculated from X-ray diffraction peaks in order to confirm the hammering effect as well as the micro-strain during the AD deposition. From the above results, deposition mechanisms related to the particle size are studied. The results of this study indicate the optimal particle size and formation mechanisms for dense Al₂O₃ film with a smooth surface roughness as well as for a porous Al₂O₃ film with a rough surface roughness.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.3
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• pp.501-508
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• 1987

Experimental studies of particle (TiO$\_$2/) deposition from the laminar hot gas particle flow (about 1565K) onto the cold wall surface (about 1215K-1530K) were carried out by the 'real time' laser light reflectivity method (LLRM) and the photographs of scanning electron microscope(SEM). The LLRM was used for the measurement of thermophoretic deposition rates of small particles (d$\_$p/<3.mu.m), and the photographs of SEM were used for determining what factors control the collection of particles having diameters ranging from 0.2 to 30 microns. Two phenomena are primarily responsible for transport of the particles across the laminar boundary layers and deposition: (1) particle thermophoresis (i.e. particles migration down a temperature gradient), and (2) particle inertial impaction, the former effect being especially larger factor of the particle deposition in its size over the range of 0.2 to 1 microns. And also, this study indicates that thermophoresis can be important for particles as large as 15 microns. Beyond d$\_$p/=16.mu.m, this effect diminishes and the inertial impaction is taken into account as a dominant mechanism of particle deposition. The results of present experiments found to be in close agreement with existing theories.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.1
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• pp.51-53
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• 2008

A new nano-particle deposition system (NPDS) was developed for a ceramic and metal coating process. Nano- and micro-sized powders were sprayed through a supersonic nozzle at room temperature and low vacuum conditions to create ceramic and metal thin films on metal and polymer substrates without thermal damage. Ceramic titanium dioxide ($TiO_2$) powder was deposited on polyethylene terephthalate substrates and metal tin (Sn) powder was deposited on SUS substrates. Deposition images were obtained and the resulting chemical composition was measured using X-ray photoelectron spectroscopy. The test results demonstrated that the new NPDS provides a noble coating method for ceramic and metal materials.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.1
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• pp.212-222
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• 1994

In the annular Modified Chemical Vapor Deposition process using two concentric tubes, the inner tube is heated to maintain high temperature gradients to have high thermophoretic force which can increase particle deposition efficiency. However, higher axial velocity in a narrow gap between inner and outer tubes can result in a longer tapered entry length. In the present paper, a new concept using an annular jet from the inner tube is presented and shown to significantly reduce the tapered entry length with maintaining high efficiency. Effects of a jet injection on heat transfer, fluid flow and particle deposition have been studied. Of particular interests are the effects of jet velocity, jet location and temperature on the deposition efficiency and tapered length . Torch heating effects from both the previous and present passes are included and the effect of surface radiation between inner and outer tubes is also considered.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.10
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• pp.1284-1293
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• 1997

The electrostatic effect on particle deposition onto a heated, Horizontal free-standing wafer surface was investigated numerically. The deposition mechanisms considered were convection, Brownian and turbulent diffusion, sedimentation, thermophoresis and electrostatic force. The electric charge on particle needed to calculate the electrostatic migration velocity induced by the local electric field was assumed to be the Boltzmann equilibrium charge. The electrostatic forces acted upon the particle included the Coulombic, image, dielectrophoretic and dipole-dipole forces based on the assumption that the particle and wafer surface are conducting. The electric potential distribution needed to calculate the local electric field around the wafer was calculated from the Laplace equation. The averaged and local deposition velocities were obtained for a temperature difference of 0-10 K and an applied voltage of 0-1000 v.The numerical results were then compared with those of the present suggested approximate model and the available experimental data. The comparison showed relatively good agreement between them.

• Journal of Industrial Technology
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• v.17
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• pp.233-239
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• 1997

The effects of preheating the gas stream on deposition characteristics of ultrafine $SiO_2$ particles were investigated theoretically. The model equations such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, $SiCl_4$ concentrations, $SiO_2$ particle volumes, $SiO_2$ particle sizes and deposition efficiencies of $SiO_2$ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the $SiO_2$ particle size distribution becomes more uniform, because the effect of $SiCl_4$ diffusion decreases.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.238.1-238.1
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• 2011

본 연구에서는 non-contact deposition method의 일환인 ESD (electroctatic deposition)의 박막공정을 이용하여 Conductive layer 위에 Gold nanoparticles 및 Silver nanoparticles 등 organic/inorganic nano particle conductive ink system의 단분산 2D 박막을 제조를 연구하였다. ESD head를 통해 여러가지 organic / inorganic nano particle conductive ink system을 Deposition하였으며 분산도가 높고 균일한 단분산의 2차원 박막 구조를 얻을 수 있었으며, 전도성 PEDOT과의 Hybridization을 통해 균일상의 표면 Morphology를 갖는 고 전도성 투명 필름을 제작하였다. ESD technique를 이용하는 박막공정 기술은 나노입자 및 나노구조물의 박막화 패턴화를 포함하는 새로운 Deposition 기술로써 이를 응용하여 금속 나노입자의 2차원의 패턴화된 박막 구현을 통해 유기반도체 및 전자소자에의 응용성을 증거할 수 있었다.