• 반도체디스플레이기술학회지
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• 제9권1호
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• pp.5-10
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• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• 접착 및 계면
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• 제3권4호
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• pp.19-26
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• 2002

고무입자로 강인화된 폴리카보네이트의 강인화 메커니즘을 연구하기 위하여 synchrotron X-선을 이용한 소각 X-선 산란법을 이용하여 실시간으로 변형 과정에서의 폴리카보네이트 내의 micro-void의 생성과 성장과정을 조사하였다. 시료는 직경 $0.3{\mu}m$의 가교화된 아크릴 고무입자로 강인화된 폴리카보네이트이며 wedge test 방식으로 시료에 변형을 가하면서 X-선을 조사하여 산란빔의 세기 변화를 살펴보았다. 변형이 증가함에 따라 산란빔의 세기가 증가하며 이는 폴리카보네이트 매트릭스 내의 micro-void의 생성에 의한 것으로 추정된다. 이러한 micro-void는 폴리카보네이트 매트릭스 내부에 생선된 것으로서 이는 고무입자와 매트릭스간의 계면분리 현상이나 고무입자 내부의 cavitation에 의한 void는 아닌 것으로 추정된다. 이 micro-void는 큰 void들과는 달리 특정한 변형 정도에 이르러 일정한 크기를 갖고 생성되기 시작하며 변형 정도가 증가하여도 그 크기는 증가하지 않고 단지 그 양만이 계속적으로 증가함을 알 수 있다.

• 접착 및 계면
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• 제12권1호
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• pp.1-10
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• 2011

자동화된 반응 열량계를 이용하여 중합비율을 관찰하면서 blockiness가 다른 PVOH를 이용하여 VAE 에멀젼을 합성하였다. 입자 분포도를 관찰 결과 단량체와 물과 비율에 따른 일정한 그라프트율은 없었다. 초기 단량체-물의 비율이 낮은 곳에서 겔 효과가 관찰되었다. 또한 입자 분포는 넓고 이중 피크가 관찰되었다. 지속적으로 제한적으로 응징집되면서 입자성장이 이루어지는 것이 관찰되었다. 이것은 제한적인 응집현상과 사슬이 PVOH로 그라프팅되어 발생한 결과로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.529-529
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• 2007

Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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• pp.109-114
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• 2002

The adhesion of electroless plated Ni layer on Al/Si substrates has been investigated. The zincating treatment was conducted with a conventional method and a modified method. In a modified method, ultrasonic agitation was applied during zincating. Adhesion strength was evaluated by a pull-off test. The ultrasonic agitation during zincating increased the nucleation density of Zn particles and refined Zn particle size. the adhesion strength of electroless Ni layer deposited on the modified zincated surface was higher than that on the conventionally zincated surface. the improvement of adhesion was attributed to the fine and dense Zn particles.

• 접착 및 계면
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• 제3권1호
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• pp.13-19
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• 2002

We have studied on the surface and adhesion properties for acrylic terpolymers, having both hydrophobic and hydrophilic side chains, synthesized via solution polymerization. In order to develop a waterborne material. we tried to synthesize these terpolymers via emulsion polymerization. The polymeric emulsion synthesized was mainly composed of methyl methacrylate (MMA), methoxy-polyethyleneglycol methacrylate (MPEGMA) having hydrophilic side chains and methoxypolypropyleneglycol methacrylate (MPEGMA) having hydrophobic side chains. The viscosities of this series increased with an increase in the content of the co-monomer such as MPEGMA and (MPEGMA). This behavior resulted in the increase in the diameter and heterogeneity of the emulsion particle via AFM observation. Furthermore. the tensile adhesion strength and 90-degree peel strength of the adhesive of these polymeric emulsions were measured. In the case of polymeric emulsion composed of the same content of both hydrophilic and hydrophobic component, the adhesion property showed the highest value. However, since the adhesion properties as a practical applicable adhesive were poor, some improvements were required. When the composition above was modified with butyl acrylate (BA), the improvement effect on adhesion strength was accepted. In particular, 90-degree peel strength increased up to a maximum of 400% of the original value.

• 한국의류학회지
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• 제25권8호
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• pp.1465-1474
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• 2001

The dispersion stability of particles and the adsorption of surfactant were examined as a fundamental environment to adhesion of particulate soil to fabric. The adsorption of surfactant on the PEF fabrics decreased with the addition of electrolytes and decreased with increasing the ionic strengths showed similar tendency to PET fabric. And the dispersion force of $\alpha$-Fe$_2$O$_3$particles decreased with the addition of electrolyte. The adhesion of particulate soil to fabric, increased with decreasing the adsorption of surfactant the correlation between the two was high at low ionic strength. The correlation between the adsorption of surfactants on $\alpha$-Fe$_2$O$_3$ particles and the adhesion of particles to fabric was smaller as shown in the correlation between the adsorption of surfactants on fiber substrate and the adhesion of particles on fabric. However, the correlation between the adhesion of particles to fabric and the stability of particle dispersion was relatively more significant.

• 접착 및 계면
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• 제18권1호
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• pp.25-32
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• 2017

본 연구는 디스플레이 모듈 접합 공정에 적용하기 위해 자외선 경화형 아크릴계 점착제(PSA)에 실리카 나노 입자를 함량별로 첨가하여 실크 스크린 인쇄성 평가를 실시하였고, 유변학적 성질이 인쇄성 및 점착력에 미치는 영향을 고찰하고자 하였다. 점착제(PSA) 중합을 위한 기본 처방으로 2-ethylhexyl acrylate(2-EHA)와 acrylic acid(AA)를 93:7 비율로 고정하고 butyl acylate(BA), 2-hydroxyethyl acrylate(2-HEA)를 첨가하였다. 추가로 나노 입자는 친수성 및 소수성을 가지는 AEROSIL R974 및 AEROSIL 200을 각각 사용하였다. 나노 입자 함량이 4 또는 7 phr 이상 사용함에 따라 G', ${\eta}^*$ 값이 급격히 증가하였으며, 친수성 나노 입자 AEROSIL 200을 7 phr 이상 첨가했을 때에는 스크린 인쇄 시 투과성이 저하되었다. 점착력은 나노 입자 함량이 증가할수록 감소되는 경향을 보였으며, 친수성인 AEROSIL 200의 경우 점착력이 더욱 저하됨을 알 수 있었다.

• 한국의류학회지
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• 제17권3호
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• pp.380-390
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• 1993

Effect of interfacial electrical conditions on adhesion of ${\alpha}-Fe_2O_3$ particles to PET fabric and the removal of ${\alpha}-Fe_2O_3$ particles from PET fabric, were investigated as functions of pH, electrolyte and ionic strength. The ${\zeta}$ potential of PET fiber and ${\alpha}-Fe_2O_3$ particles in the electrolyte solution were measured by streaming potential and microelectrophoresis methods respectively. The potential energy of interaction between ${\alpha}-Fe_2O_3$ particles and PET fabric were calculated by using the heterocoagulation theory for a sphere-plate model. The negative ${\zeta}$ potential of ${\alpha}-Fe_2O_3$ particle and PET fiber increased with pH, and then decreased certain pH and isoelectric points of ${\alpha}-Fe_2O_3$ particles and PET fiber were pH 6.5 and pH 3.5, respectively. The negative ${\zeta}$ potential of ${\alpha}-Fe_2O_3$ particle and PET fiber affected by electrolytes, were relatively high with polyanion electrolytes in solutions and were low with neutral salts. However, at surfactant solution, ${\zeta}$ potential was levelled off. The influence of the ionic strength on the ${\zeta}$ potential of ${\alpha}-Fe_2O_3$ particle was small but the negative ${\zeta}$ potential of PET fiber increased with the ionic strength. In the presence of anionic surfactant, the ${\zeta}$ potential of ${\alpha}-Fe_2O_3$ particle and PET fiber increased regardless of solution conditions. The interaction energy between ${\alpha}-Fe_2O_3$ particle and PET fabric increased with pH. The interaction energy was relatively high with polyanion electrolytes in solution, and the influence of ionic strength on the interaction energy was small, and the effective thickness of electrical double layer increased with decreasing the ionic strength.

• 대한금속재료학회지
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• 제46권7호
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• pp.464-470
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• 2008

Metallic nanostructures have great potential for bio-chemical sensor applications due to the excitation of localized surface plasmon and its sensitive response to environmental change. Unlike the commonly explored absorption-based sensing, the optical scattering provides single particle detection scheme. For the localized surface plasmon resonance spectroscopy, the metallic nanostructures with controlled shape and size have been usually fabricated on adhesion-layer pre-coated transparent glass substrates. In this study, we calculated the optical scattering properties of plasmonic Au nanodisc using a discrete dipole approximation method and analyzed the effect of adhesion layer on them. Our result also indicates that there is a trade-off between the surface plasmon damping and the capability of supporting nanostructures in determining the optimal thickness of adhesion layer. Marginal thickness of Ti adhesion layer for supporting Au nanostructures fabricated on a silica glass substrate was experimentally analyzed by an adhesion strength test using a nano-indentation technique.