• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.112-112
• /
• 2008

최근 Ruthenium (Ru) 은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 저유전체와의 높은 안정성 등과 같은 특성으로 인해 금속층-유전막-금속층 캐패시터의 하부전극으로 각광받고 있다. 또한 Cu와의 우수한 Adhesion 특성으로 인해 Cu 배선에서의 Cu 확산 방지막으로도 주목받고 있다. 그러나 이렇게 형성된 Ru 하부전극의 각 캐패시터간의 분리와 평탄화를 위해서는 CMP 공정이 도입이 필요하다. 이러한 CMP 공정에 공급되는 Slurry 에는 부식액, pH 적정제, 연마입자 등이 첨가되는데 이때 연마입자가 응집하여 Slurry의 분산 안전성 저하에 영향을 줄수 있다. 이로 인해 응집된 Slurry는 Scratch와 Delamination 과 같은 표면 결함을 유발할 수 있으며, Slurry의 저장 안정성을 저하시켜 Slurry의 물리적 화학적 특성을 변화시킬 수 있다. 그리하여 본 연구에서는 Ru CMP Slurry에서의 Surfactant와 같은 분산 안정제에 따른 Surface tension, Zeta potential, Particle size, Sedimentation의 분석을 통해 Slurry 안정성에 대한 영향을 살펴보았다. 그 결과 pH9 조건의 31ppm Dispersant 농도에서 50%이상의 Sedimentation 상승효과를 얻을 수 있었다. 또한 선택된 Surfactant가 첨가된 Ru CMP Slurry를 제조하여 Ru wafer의 Static etch rate, Passivation film thickness 와 Wettability를 비교해 보았다. 그리고 CMP 공정을 실시하여 Ru의 Removal rate와 TEOS에대한 Selectivity를 측정해 보았다.

• Resources Recycling
• /
• v.5 no.4
• /
• pp.11-16
• /
• 1996

In the flotation system for deinking process, the ink partcles musl collidc with the air bubbles for adhesion The probability of bubble-particle collision is largely dependent on the hydrodynamic conditions The main reason for the very small ink particles not to be able to float easily may be tound in the hydrodynamic effects, which make small ink particlcs move following the slreamlines around the bubbles rather than achually collide with bubbles. Also. the low floatabdily of the large and heavy ink particles is due to the gravity force and viscous drag which affect uprising molinn of particles through the liquid. Therefore, it is vely important to control not only the surface chemical conditions but the hydrodynamic conditions in practical floialion system

• Membrane Journal
• /
• v.15 no.4
• /
• pp.289-296
• /
• 2005

In the MBR process, the membrane fouling occurs seriously on the membrane surface. In general, the membrane fouling is attributed to factors such as deposition or adhesion of sludge floc. The occurrence of fouling is a main cause of a decrease in membrane module fluk. At this study, our MBR membrane is manufactured by nano-particle with excellent anti-fouling character. The fine nano-material which can repel the sludge Hoc from the membrane surface is distributed in the membrane surface. We confirm anti-fouling effect, test continuously in the pilot site.

• Journal of Information Display
• /
• v.4 no.1
• /
• pp.17-23
• /
• 2003

A thermoset type anisotropic conductive adhesive film (ACAF) comprising epoxy resin and natural butyl rubber (NBR) as the binder, micro-encapsulated imidazole as the curing agent, and Ni/Au coated polymer bead as a conductive particle has been studied. These films have been prepared to respond to requirements such as improved contact resistance, current status less of than 60 ${\mu}m$ and reliability. These films can also be used for connection between the ITO glass for LCD panel and the flexible circuit board. The curing conditions for the connection were 40, 20 and 15 seconds at 150, 170 and 190 $^{\circ}C$, respectively. The initial contact resistance and adhesion strength were 0.5 ${\Omega}/square$ and 0.4 kg/cm under the condition of 30 kgf/$^{cm}^2}$, respectively. After completing one thousand thermal shock cycling tests between -15 $^{\circ}C$ and 100 $^{\circ}C$, the contact resistance was maintained below 0.7 ${\Omega}/square$. Durability against high temperature (80$^{\circ}C$) and high humidity (85 % RH) was also tested to confirm long-term stability (1000 hrs) of the conduction.

• Journal of the Korean Ceramic Society
• /
• v.31 no.4
• /
• pp.427-435
• /
• 1994

Cu-metallized low firing temperature substrates were synthesized by cofiring green sheet of cordierite-based glass with Cu. By Sol-Gel method, Cu powder was coated with borosilicate gel which should act as a glass frit in Cu paste during cofiring. Theoretical weight ratios of Glass/Cu were controlled to be 2.5, 5, 10 and 15% by varying alkoxide concentrations. Average particle size of coated Cu was 0.629~0.674 ${\mu}{\textrm}{m}$ in comparison to that of as-received Cu(0.596 ${\mu}{\textrm}{m}$), which increased with alkoxide concentration but did not increase above certain concentration. The weight ratios of coated layer were 2.11~5.37%. The properties of Cu-metallized low firing temperature substrate, cofired at 90$0^{\circ}C$ for 1h under H2/N2 atmosphere, were as follows; sheet resistance was 13~43 m{{{{ OMEGA }}/$\square$, adhesion strength was 1.0~2.1 kgf/$\textrm{mm}^2$. From the observations of SEM photographs, the gel coated on Cu performed excellently as a glass frit.

• Journal of the Korean Applied Science and Technology
• /
• v.37 no.6
• /
• pp.1627-1634
• /
• 2020

In this study, water-based acrylic adhesives as copolymers with acrylic acid, 2-hydroxyethyl acrylate were synthesized using ethyl acrylate, 2-ethylhexyl acrylate, and lauryl methacrylate as the main monomers. Prepared water-based acrylic adhesive was compared to physical properties such as solid content, average particle size distribution, initial adhesive force, maximum adhesive force, peel strength, and heat resistance.

• Journal of Powder Materials
• /
• v.28 no.1
• /
• pp.25-30
• /
• 2021

The surface of silicon dummy wafers is contaminated with metallic impurities owing to the reaction with and adhesion of chemicals during the oxidation process. These metallic impurities negatively affect the device performance, reliability, and yield. To solve this problem, a wafer-cleaning process that removes metallic impurities is essential. RCA (Radio Corporation of America) cleaning is commonly used, but there are problems such as increased surface roughness and formation of metal hydroxides. Herein, we attempt to use a chelating agent (EDTA) to reduce the surface roughness, improve the stability of cleaning solutions, and prevent the re-adsorption of impurities. The bonding between the cleaning solution and metal powder is analyzed by referring to the Pourbaix diagram. The changes in the ionic conductivity, H2O2 decomposition behavior, and degree of dissolution are checked with a conductivity meter, and the changes in the absorbance and particle size before and after the reaction are confirmed by ultraviolet-visible spectroscopy (UV-vis) and dynamic light scattering (DLS) analyses. Thus, the addition of a chelating agent prevents the decomposition of H2O2 and improves the life of the silicon wafer cleaning solution, allowing it to react smoothly with metallic impurities.

• Analytical Science and Technology
• /
• v.23 no.2
• /
• pp.216-223
• /
• 2010

In previous research, results on efficiency versus size and type of Ag particles showed similarity of detection efficiency comparing the particles of flake and spherical type with the gray particle on the market and in the case of nAg (rod, $0.9\;{\mu}m$) particle, relatively good results was given in the various evaluation methods for detection efficiency of latent fingerprint. However, oxidation was occurred when nAg particles laying on nature condition for a month and due to water absorption, detection efficiency was decreased. Therefore, with need to prevent oxidation and water absorption, more research is necessary. In this research, surface modification on nAg particles using silicon oil was conducted in various methods for complementing weakness of oxidation and water absorption. Then detection efficiency of nAg particles and surface modified nAg particles was evaluated by the number of feature points on the surface of non-porous materials (glass, plastic etc.) and degree of particle adhesion with ridges and contrast of detected fingerprint. Improvement of preventing oxidation and water absorbtion was given by surface modification using silicon oil (DC200, 0.5%) on the surface of non-porous materials.

• Journal of Periodontal and Implant Science
• /
• v.32 no.4
• /
• pp.769-779
• /
• 2002

This present study was carried out to find the effects of calcium aluminate cement($CaO\;{\cdot}\;Al_2O_3$, CAC), which has been developed with bio-compatibility and mechanical properties, in biological environments. Two different particle sizes of CAC - 3.5${\mu}m$ vs. 212${\sim}$250${\mu}m$ which is recommended in periodontal bone grafting procedures-were filled in 8mm calvarial defect in Sprague-Dawley rat. The specimens were examined histologically, especially the bone-cement interface and the response of surrounding tissues. The results are as follows; 1. In the control group, inflammatory cells were observed at 2 weeks. At 8 weeks, periosteum and dura mater were continuously joined together in the defect areas. But in the center of defect area were filled up with the loose connective tissues. 2. In the experimental group l($212{\mu}m{\sim}250{\mu}m$ particle), immature bone was formed and outermost layer was surrounded by osteoid layer at 2 weeks. Osteoblasts were arranged between immature bone and osteoid layer. And, osteoid layer was remained until 8 weeks after surgery. 3. In the experimental group 2, periosteum and dura mater lost its continuity at 2 weeks. Scattering of CAC particles and infiltration of inflammatory cells were observed, which this findings deepened at 8 weeks. The result of this study shows that when calvarial defects in white rats are filled with calcium aluminate cement of 212${\sim}$250${\mu}m$, the materials are to be bio-compatible in growth and healing on surrounding tissues. When further researches are fulfilled, such as direct bone adhesion and bone regeneration ability, it's possible that CAC could be applied to various periodontology fields in the future.

• Journal of the Korean Recycled Construction Resources Institute
• /
• v.8 no.3
• /
• pp.317-324
• /
• 2020

Plastic wastes generated from domestic waste are separated by mixed discharge with foreign substances, and the cost of the separation and screening process increases, so recycling is relatively low. In this study, as a fundamental study for recycling mixed plastic wastes generated from domestic waste into concrete aggregates, changes in concrete properties according to the plastic waste types and the substitution rate were evaluated experimentally. The mixed plastic waste aggregate(MPWA) was found to have a lower density and a higher absorption rate compared to the coarse aggregate with good particle size distribution. On the other hand, the single plastic waste aggregate(SPWA) was composed of particles of uniform size, and both the density and the absorption rate were lower than that of the fin e aggregate. It was found that the MPWA substitution concrete did not cause a material separation phenomenon due to a relatively good particle size distribution even with the largest amount of plastic waste substitution, and the amount of air flow increased little. The compressive strength and flexural strength of the PWA substitution concrete decreased as the amount of substitution of the PWA increased due to the low strength of the PWA, the suppression of the cement hydration reaction due to hydrophobicity, and the low adhesion between the PWA and the cement paste. It was found that the degree of deterioration in compressive strength and flexural strength of concrete substituted with MPWA having good particle size distribution was relatively small.