• 대한기계학회논문집B
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• 제22권11호
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• pp.1564-1570
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• 1998

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

• 대한기계학회논문집B
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• 제23권10호
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• pp.1320-1326
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• 1999

Since it is not possible to generate spatially uniform particle distribution at low pressures in which in-situ particle monitors(ISPMs) are normally operated, it is of interest to investigate the response of an ISPM to particle beams at low pressures. The purpose of this study is to develop technique that can control the size of particle beams. In this study, particle beams were generated at low pressures by using identical aerodynamic lenses, and their shape and size were visualized by collecting uniform sized methylene blue aerosol particles on a filter media. It was found that the size of particle beams depends on the number of lens, the distance between lenses, and the downstream distance from the final lens. The size of particle beams decreases with increasing distance between lenses, and increases with increasing downstream distance from the final lens. The experimental results obtained in this work will be used to investigate performance of an ISPM at low pressures.

• Korea-Australia Rheology Journal
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• 제19권1호
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• pp.35-42
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• 2007

The effects of particle size distribution on the magnetorheological response of inverse ferrofluids was investigated using controlled mixtures of two monodisperse non-magnetisable powders of sizes $4.6\;{\mu}m\;and\;80{\mu}m$ at constant volume fraction of 30%, subjected to large amplitude oscillatory shear flow. In the linear viscoelastic regime (pre-yield region), it was found that the storage and loss moduli were dependent on the particle size as well as the proportion of small particles, with the highest storage modulus occurring for the monodisperse small particles. In the nonlinear regime (post yield region), Fourier analysis was used to compare the behaviour of the $1^{st}\;and\;3^{rd}$ harmonics ($I_{1}\;and\;I_{3}\;respectively$) as well as the fundamental phase angle as functions of the applied strain amplitude. The ratio of $I_{3}/I_{1}$ was found to become more pronounced with decreasing particle size as well as with increasing proportion of small particles in the bidisperse mixtures. Furthermore, the phase angle was able to clearly show the transition from solid-like to viscous behaviour. The results suggested that the nonlinear response of a bidisperse IFF is dependent on particle size as well as the proportion of small particles in the system.

• 한국생산제조학회지
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• 제25권6호
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• pp.426-433
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• 2016

This paper investigates the effects of operating conditions of an air classifier mill (ACM) on the particle sizes of PVC and rice hull. Based on the Box-Behnken matrix, the pulverization experiments were performed considering three operating factors: the air flow rate, the classifier speed and the mill speed. The response surface methodology was applied to identify the effects of the operating factors on the particle size. Results show that the particle sizes are governed by the linear variations of the operating factors. As less air is supplied and the mill rotates more slowly, the powder of both PVC and rice hull becomes finer. Furthermore, the classifier speed has a significant effect on the PVC powder but almost no effect on the rice hull powder. Thus, it is found that strong interactions exist between the material characteristics of a particle and the operating conditions of the ACM.

• 대한기계학회논문집B
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• 제27권3호
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• pp.326-333
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• 2003

In the measurement using DMA and CPC in series, there is some time delay for particles classified in DMA to detect in CPC. During this time, the DMA time-response changes due to the velocity profile of sampling tube and the diffusion of particles in the volume that exists between the DMA exit and the detector of ultra-fine CPC. This is called mixing effect. In the accelerated measurement methods like the TSI -SMPS, the size distribution is obtained from the correlation between the time-varying electrical potential of the DMA and the corresponding particle concentrations sampled in DMA. If the DMA time -response changes during this delay time, this can cause the error of a size distribution measured by this accelerated technique. The kernel function considering this mixing effect using the residence time distribution is proposed by Russell et al. In this study, we obtained a size distribution using this kernel to compare to the result obtained by the commercial accelerated measurement system, TSI -SMPS for verification and considered the errors that result from the mixing effect with the geometric mean diameters of originally sampled particles, using virtually calculated responses obtained with this kernel as input data.

• 한국대기환경학회지
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• 제15권6호
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• pp.799-804
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• 1999

Particle collection characteristics of the MOUDI cascade impactor has been studied for coarse particles in the range of 2 to 20$mu extrm{m}$ in aerodynamic diameter. A vibrating orifice aerosol generator was empolyed to generate monodisperse test aerosols. The oleic acid and sodium chloride(NaCl) particles were used as test aerosols. Aluminum foil and Teflon filter were selected as impaction media. The sampling flow rate was changed from 25 to 35L/min. Particle collection efficiency for single stage was examined for liquid particles. The stage response was obtained experimentally for the cascade impactor composed of three stages and a backup filter. The results showed that most of particle collection efficiencies measured in this work are similar to the efficiency curves obtained by Marple et al.(1991). For particles less than cut-off size of the stage, the collection efficiencies of solid particles are similar to those of loquid particles. However, the collection efficiency of solid particles decreases with mereasing particle diameter for the particles greater than the actual cut-off size of the impactor. The particle collection efficiency increases with increasing sampling flow rate at the same particel size. However, the collection efficiency curves seem not to be greatly shifted with the flow rate. The stage responses obtained by direct measurements in this work are in good agreement with those derived from the collection efficiency curves for single stage.

• 한국전기전자재료학회논문지
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• 제25권2호
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• pp.129-134
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• 2012

We analyzed the movement and response time of charged particles according to particle-inserting methods to understand the variation of quantity of q/m of charged particles, which is a very important factor in electrical and optical characteristics of the charged particle type display, such as lifetime, response time, contrast ratio, reflectivity, etc. For our study we used white and black charged particles of which diameter is $20{\mu}m$, prepared pieces of ITO(indium tin oxide) coated glass substrate, and formed ribs on the glass substrates. The width of a rib is $30{\mu}m$ and the cell size is $220{\mu}m{\times}220{\mu}m$. As the particle-inserting methods, the white and black charged particles were respectively inserted into a front and a rear panel with a very small electric field and also the mixture of the white and black charged particles were inserted into a rear panel. As a result of the driving characteristics of charged particles, the factors about variation of quantity of q/m according to the particle inserting method was experimentally demonstrate, showing very different driving voltage, response time, the particle movement, etc.

• 대한기계학회논문집
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• 제16권3호
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• pp.547-554
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• 1992

본 연구에서는 Climet사의 백색광원 OPC인 CI226와 PMS사의 laser 광원 OPC인 LAS-X 및 HS-LAS의 응답특성을 측정하여 제작사가 제시한 응답특성과 비교하여 그 정 확성을 논하였으며 아울러 고유량(high flow rate) Clean Room용 OPC인 Climet CI- 7300, Met One 200, Hiac/Royco5120 등 3가지 장치에 관한 오계수의 원인을 박히고자 하였다.

• Archives of Pharmacal Research
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• 제27권7호
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• pp.797-805
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• 2004

LPD vectors are non-viral vehicles for gene delivery comprised of polycation-condensed plasmid DNA and liposomes. Here, we described a novel anionic LPD formulation containing protamine-DNA complexes and pH sensitive liposomes composed of DOPE and cholesteryl hemisuccinate (Chems). Central composite design (CCD) was employed to optimize stable LPD formulation with small particle size. A three factor, five-level CCD design was used for the optimization procedure, with the weight ratio of protamine/DNA ($X_1$), the weight ratio of Chems/DNA ($X_2$) and the molar ratio of Chems/DOPE in the anionic liposomes ($X_3$) as the independent variables. LPD size ($Y_1$) and LPD protection efficiency against nuclease ($Y_2$) were response variables. Zeta potential determination was utilized to define the experimental design region. Based on experimental design, responses for the 15 formulations were obtained. Mathematical equations and response surface plots were used to relate the dependent and independent variables. The mathematical model predicted optimized $X_1-X_3$ levels that achieve the desired particle size and the protection efficiency against nuclease. According to these levels, an optimized LPD formulation was prepared, resulting in a particle size of 185.3 nm and protection efficiency of 80.22％.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.360-363
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• 2009

In this paper, we describe new approach of ink particle fabrication method for electrophoretic display(EPD) with low voltage and rapid response time. Nano-size ink particles which fabricated using non-aqueous base modified emulsion process and micron-scale particles by non-solvent particle fabrication process are discussed. Finally, specially designed particles and panel structure fabricated considering the interactions between particle/particle, particle/media or particle/electrode dramatically reduce the driving voltages to ${\pm}$ 10V and improve the response time of less than 100msec and white reflectance of 58% for EPD using dielectric fluid as a medium. In case of EPD adapting micron-sized electrophoretic particles and a medium of air, the saturation voltage could be reduced to ${\pm}$ 40V and having white reflectance of 45% without scarification of electrophoretic mobility of the particles.