Acknowledgement
Supported by : 한국과학재단
DOI QR Code
Since it is not possible to generate spatially uniform particle distribution at low pressures in which in-situ particle monitors(ISPMs) are normally operated, it is of interest to investigate the response of an ISPM to particle beams at low pressures. The purpose of this study is to develop technique that can control the size of particle beams. In this study, particle beams were generated at low pressures by using identical aerodynamic lenses, and their shape and size were visualized by collecting uniform sized methylene blue aerosol particles on a filter media. It was found that the size of particle beams depends on the number of lens, the distance between lenses, and the downstream distance from the final lens. The size of particle beams decreases with increasing distance between lenses, and increases with increasing downstream distance from the final lens. The experimental results obtained in this work will be used to investigate performance of an ISPM at low pressures.
Supported by : 한국과학재단