A Study of Response Characteristics and False Counts in Optical Particle Counter

광학 입자 계수기의 응답특성 및 오계수에 관한 연구

Response characteristics and false counts of laser and white light optical particle counters (OPC) have been studied as a function of particle size using monodisperse polystylen laterx (PSL) particles. Theoretical light scattering calculations for He-Ne laser based counter have been compared with the experimental results and thus good agreements have been found. The light scattering intensity in monochromatic light shows an oscillatory character for the transparent and spherical particles of PSL due to Mie resonance. Because of this effect, the response of the LAS-X OPC showed almost same responses in the diameter ranges of 0.4mu.m to 0.6mu.m and 0.7mu.m to 1.0mu.m for PSL particles. A laser optical particle counter with high flow rate applied for clean room has been studied to identify the noise sources. Three different manufacturer's clean room optical particle counters alos have been tested to measure the background noise level.

본 연구에서는 Climet사의 백색광원 OPC인 CI226와 PMS사의 laser 광원 OPC인 LAS-X 및 HS-LAS의 응답특성을 측정하여 제작사가 제시한 응답특성과 비교하여 그 정 확성을 논하였으며 아울러 고유량(high flow rate) Clean Room용 OPC인 Climet CI- 7300, Met One 200, Hiac/Royco5120 등 3가지 장치에 관한 오계수의 원인을 박히고자 하였다.