• Journal of the Korean Society for Precision Engineering
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• v.8 no.2
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• pp.78-88
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• 1991

The existing axial piston pump/motors of swash plate type rapidly drop efficiency in high speed region in comparison with low speed. This is the reason why the pump/motors were designed only in a view point of power supply. But, in this paper, the motor which was optimally designed on power supply load capacitancy, flow loss volume, axial stiffness and tiliting stiffness keeps up high efficiency in high speed region and in high pressure resion too.

• Journal of Advanced Marine Engineering and Technology
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• v.32 no.8
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• pp.1149-1156
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• 2008

The principle of self clamping friction clutch is presented in this paper and the transmitted torque capacity is also calculated. In order to enlarge the friction force, a part of rotating force of driving side is converted to normal force of friction materials by clamping arm. The increased normal force of friction materials assures the large friction force and the transmitted torque capacity of clutch becomes large. The self clamping friction clutch is adopted in the tube type air pressure clutch and the condition of stability is investigated. It is proven that the inclined angle of clamping arm and the friction factor of friction materials are the essential elements in stability and torque capacity of self clamping friction clutch. The transmitted torque capacity of self clamping friction clutch is compared with air pressure clutch. The normal force of friction lining is magnified by 1/(1-k) and the transmitted torque capacity is also magnified with same proportion comparing with air pressure clutch. The larger the friction factor of friction lining, the larger the magnification factor. The longer the clamping arm, the smaller the magnification factor. It must be also noted that the value of k=${\mu}Y/X$ is the criterion of stability. If the value of k=${\mu}Y/X$ is greater than or equal to 1, the self clamping friction clutch is unstable and it can not be used as clutch.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2 \; (PN_2)$ gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and $PN_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.5
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• pp.191-195
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• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.11
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• pp.231-237
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• 2014

In this paper, we have proceeded research for failures of semiconductor device stressed by Pressure Cooker Test(PCT). After PCT stress, we found various failures such as delamination between aluminium line and device layers and chemical composition transition of aluminium. We have executed the analysis using the physical and chemical observation equipments. There were the main failures that aluminium loss of aluminium pad is occurred and $Al_xO_y$($Al_2O_3$ or $Al(OH)_3$)) layer is formed abnormally. The primary cause of the failures is reaction of supplied fluorine or chlorine gases and infiltrated moisture during etching process.

• Journal of Physiology & Pathology in Korean Medicine
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• v.21 no.3
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• pp.652-657
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• 2007

This experimental study was designed to investigate the effects of FOENICULI FRUCTUS freeze dry powder (FF) on the change of cerebral hemodynamics [regional cerebral blood flow (rCBF) and mean arterial blood pressure (MABP)] in normal and further to determine the mechanism of action of FF. The results in normal rats were as follows ; FF significantly increased rCBF in a dose-dependent, but decreased MABP, This results were suggested that FF significantly increased rCBF by dilating PAD. The FF-induced increase in rCBF was significantly inhibited by pretreatment with 1H[1,2,4]oxadizolo[4,3-a]quinoxalin-1-one (ODQ, 10 ${\mu}$g/kg, i.p.), an inhibitor of guanylate cyclase and indomethacin (IDN, 1 mg/kg, i.p.), an inhibitor of cyclooxygenase and propranolol (PPN, 3 mg/kg, i.p.), a blocker of adrenalic f receptor and Lu-Nitro-L-Arginine (L-NNA, 1 m9/kB, i.p.), an inhibitor of nitric oxide synthase. The FFE-induced decrease in MABP was significantly increased by pretreatment with L-NNA and was increased by pretreatment with PPN, Dut was inhibited by pretreatment with ODQ and IDN, This results were suggested that the mechanism of FF was mediated by nitric oxide synthase and adrenalic ${\beta}$ receptor.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.2
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• pp.167-175
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• 2014

If volumetric flaws such as bearing pad fretting flaws and debris fretting flaws are detected in the pressure tubes of pressurized heavy water reactors during in-service inspection, the initiation of fatigue cracks and delayed hydrogen cracking from the detected volumetric flaws shall be assessed by using elastic stress concentration factors in accordance with CSA N285.8-05. The CSA N285.8-05 presents only an approximate formula based on linear elastic fracture mechanics for the debris fretting flaw. In this study, an engineering formula considering the geometric characteristics of the debris fretting flaw in detail was derived using two-dimensional finite element analysis and Kinectrics, Inc.'s engineering procedure with slight modifications. Comparing the application results obtained using the derived formula with the three-dimensional finite element analysis results, it is found that the results obtained using the derived formula agree well with the results of the finite element analysis.

• Journal of the Korean Society of Propulsion Engineers
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• v.21 no.1
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• pp.44-50
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• 2017

Vehicle Holding Device(VHD) has a role that holding the launch vehicle on its launch pad until the engine therust reaches a steady condition. The analytical study of shape parameters and dynamic characteristics of hydraulic cylinders is carried out. The contraction of cylinder is considered as the major factor of releasing mechanism. Through the analysis, the decreasing of cylinder slit size and increasing initial charging pressure increase the contraction force. Through the transient analysis, cylinder load, displacement and inner pressure distribution are confirmed. The cylinder contraction force is converged to the cylinder external force when the cylinder starts to move. Also, the pressure distribution in the hydraulic cylinder is constant.

• Physical Therapy Korea
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• v.28 no.2
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• pp.154-160
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• 2021

Background: Theoretically, balance is affected by the height of center of mass (COM) during quiet standing. However, no one examined this in humans with variables derived from the center of pressure (COP). Objects: We have conducted balance experiment to measure COP data during quiet standing, in order to examine how the COP measures were affected by the height of COM, vision, floor conditions, and gender. Methods: Twenty individuals stood still with feet together and arms at sides for 30 seconds on a force plate. Trials were acquired with three COM heights: 1% increased or decreased, and not changed, with two vision conditions: eyes closed (EC) and eyes open (EO), and with two floor conditions: unstable (foam pad) and stable (force plate) floor. Outcome variables included the mean distance, root mean square distance, total excursion, mean velocity, and 95% confidence circle area. Results: All outcome variables were associated with the COM height (p < 0.0005), vision (p < 0.0005), and floor condition (p < 0.003). The mean velocity and 95% confidence circle area were 5.7% and 21.8% greater, respectively, in raised COM than in lowered COM (24.6 versus 23.2 mm/s; 1,013.4 versus 832.3 mm²). However, there were no interactions between the COM height and vision condition (p > 0.096), and between the COM height and floor condition (p > 0.183) for all outcome variables. Furthermore, there was no gender difference in all outcome variables (p > 0.186). Conclusion: Balance was affected by the change of COM height induced by a weight belt in human. However, the effect was not affected by vision or floor condition. Our results should inform the design of balance exercise program to improve the outcome of the balance training.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.1
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• pp.33-38
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• 2007

We studied a bonding at low temperature using polymer bump and Non-Conductive Adhesive (NCA), and studied the reliability of the polymer bump/Al pad joints. The polymer bumps were formed on oxidized Si substrates by photolithography process, and the thin film metals were formed on the polymer bumps using DC magnetron sputtering. The substrate used was AL metallized glass. The polymer bump and Al metallized glass substrates were joined together at $80^{\circ}C$ under various pressure. Two NCAs were applied during joining. Thermal cycling test ($0^{\circ}C-55^{\circ}C$, cycle/30 min) was carried out up to 2000 cycles to evaluate the reliability of the joints. The bondability was evaluated by measuring the contact resistance of the joints through the four point probe method, and the joints were observed by Scanning Electron Microscope (SEM). The contact resistance of the joints was $70-90m{\Omega}$ before the reliability test. The joints of the polymer bump/Al pad were damaged by NCA filler particles under pressure above 200 MPa. After reliability test, some joints were electrically failed since thinner metal layers deposited at the edge of bumps were disconnected.