• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.289-294
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• 2012

There are several indicators to represent characteristics of chemical mechanical planarization (CMP) such as material removal rate (MRR), surface quality and removal uniformity on a wafer surface. Especially, the removal uniformity on the wafer edge is one of the most important issues since it gives a significant impact on the yield of chip production on a wafer. Non-uniform removal rate at the wafer edge (edge effect) is mainly induced by a non-uniform pressure from nonuniform pad curvature during CMP process, resulting in edge exclusion which means the region that cannot be made to a chip. For this reason, authors tried to minimize the edge exclusion by using an edge profile control (EPC) ring. The EPC ring is equipped on the polishing head with the wafer to protect a wafer from the edge effect. Experimental results showed that the EPC ring could dramatically minimize the edge exclusion of the wafer. This study shows a possibility to improve the yield of chip production without special design changes of the CMP equipment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.4
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• pp.578-583
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• 2017

This paper presents a 3D touch pad technology that uses force touch sensors as a next-generation method for mobile applications. 3D touch technology requires detecting the location and pressure of touches simultaneously, as well as multi-touch function. We used metal foil strain gauges for the touch recognition sensor and detected the weak touch signals using Wheatstone bridge circuit at each strain gauge sensor. We also developed a touch recognition system that amplifies touch signals, converts them to digital data through a microprocessor, and displays the data on a screen. In software, we designed a touch recognition algorithm with C code, which is capable of recognizing two-point touch and differentiating touch pressures. We carried out a successful experiment to display two touch signals on a screen with different forces and locations.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.240-246
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• 1999

The effect of microstructure of gray cast iron disk was investigated by using a pad-on-disk type friction tester. Three different rotors with different microstructures were studied in this work. They showed a pearlitic matrix, a ferritic matrix, and a martensitic structure, respectively. All of them have graphite flakes in common. Drag tests at different pressure and speed conditions were carried out to study friction stability, temperature rise during drags. The rotor containing pearlitic matrix showed lower values of friction coefficient, small amount of temperature rise, and less fading. The results showed that gray cast iron disk containing pearlitic matrix has good friction characteristics.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.247-254
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• 1999

The effect of manufacturing parameters such as molding and curing conditions on friction characteristics of friction materials were studied using a pad-on-disk type friction tester. The optimal manufacturing rendition for the best friction characteristics were investigated using friction materials containing 15 ingredients employing Taguchi robust design experiment. The friction characteristics were strongly affected by pressing time, pressing temperature, pressing pressure, curing time, curing temperature.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.06a
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• pp.24-33
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• 2000

The effect of particulate contamination on friction and wear between a negative-pressure picoslider / tri-pad nanoslider and laser-textured disk was studied. Particles of different concentration were injected at the head-disk interface consisting of disks with various textures and slider types at different speed. Durability increased and coefficient of friction decreased as the disk speed increased in a contaminated environment. Frictional characteristics and durability in the data zone were better for those of the laser-textured zone. It was also found that durability of head-disk interface (HDI)decreased as the particle concentration increased. The interface durability with a picoslider was better than that with a nanoslider at any condition in a contaminated environment. Based on the test results, mechanisms were proposed to explain the reasons why durability with a picoslider was superior to that with a nanoslider.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.975-985
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• 2011

Cu-Matrix sintered brake pads and low alloyed heat resistance steel are most applied to basic brake system for high energy moving machine. In this research, we analyzed tribological characteristics for influence of air velocity between disk and pad. At low brake pressure with air flow, friction stability was decreased due to no formation of tribofilm at disk surface. But there are no significant change of friction coefficient at all test conditions. Wear rate of friction materials were decreased with increasing of air flow velocity. In result, air flow velocity influenced friction stability, wear rate of friction materials and disk but not friction coefficient.

• Proceedings of the ESK Conference
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• 1998.04a
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• pp.149-154
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• 1998

The design of seat is maintaining to final stable posture. The final stable posture is the seated posture in which the force of the pad and spring supporting the body is balanced with the body weight and the bodydoes not sink anyfurther intothe seat. With poorly designed seated seats, your behind maygradually move forward, or localized pressure may result in congestion of the blood or numbness, making you want to move. Therefore, the final stable posture is not maintained. A number of ideas were used in this study will eliminate this problem. In automobile seat design, primary attention has forcused on providing the occupant with a comfortable seat that has sufficient padding and adjuxtments toaccomodate different sizes and postures of people. First of all, whether the process is design-oriented or technology-oriented, the design concept must be human-oriented. The fatigue-alleviating seats which were the primary purpose of this research were studied with a human-oriented approach.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1993.04a
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• pp.32-38
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• 1993

최적의 회전기계 시스템을 설계하기 위해서는 시스템의 운전특성에 적합한 제어링이 선정$\cdot$설계되어져야 한다. 그러기 위해서는 회전 기계에 사용되는 베어링의 운전특성을 잘 예측하는 것이 무엇보다도 중요하다. 대형 틸팅패드 저어널베어링은 고속안정성 특성이 우수한 베어링으로서 터빈발전기 등 대형 고속 회전기계에 널리 사용되고 있다. 하지만, 틸팅패드 저어널베어링은 구조가 복잡하고 경계조건 선정이 까다로와서, 동 베어링에 대하여 여러 논문들이 발표되어 왔지만, 대부분의 결과들이 특정한 가정을 이용하여 정성적인 경향만 제시하고 있다. 다라서 대형 틸팅패드 저어널베어링의 보다 엄밀한 성능예측을 위해서는 실제 운전조건에 적합한 경계조건을 제시하기 위한 실험적 연구가 우선적으로 요구되고 있다. 본 실험 연구에서는 대형 틸팅패드 저어널베어링에서 선단압력 발생에 대하여 실험적으로 관찰함으로써 동 베어링의 성능에 미치는 선단압력의 효과와 압력 및 무부하측패드의 거동에 대한 경계조건을 실험적으로 제시하고자 한다.

• Tribology and Lubricants
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• v.16 no.6
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• pp.469-476
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• 2000

The effect of particulate contamination on the friction and wear between a negative-pressure picoslider/tri-pad nanoslider and laser-textured disk was studied. Particles of different concentration were injected at the head-disk interface consisting of disks with various textures and slider types at different speed. Durability increased and coefficient of friction decreased as the disk speed increased in a contaminated environment. Frictional characteristics and durability in the data Bone were better than those in the laser-textured zone. It was also found that durability of head-disk interface (HDI) decreased as the particle concentration increased. The interface durability with a picoslider was better than that with a nanoslider at any condition in a contaminated environment. Based on the test results, mechanisms were proposed to explain the reasons why durability with a picoslider was superior to that with a nanoslider.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.121-126
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• 1993

Tiling pad journal bearing that has high stability is analyzed about air-lubricated bearing that is usually used to need high precision by using the Direct analysis. The pressure that supports the shaft is occured by the differences between the shaft and pads radii of curvatures. So the characteristics of load capacity for their variable values is important. In this paper the load capacity is compared with some the eccentricity ratio values of0.1, 0.2, 0.5, 0.8. The large load capacity comes from large eccentricity ratio, highbearing number and high preload. But if the preload become high too much, then the shaft makes contact with pads.