Wafer Edge Profile Control for Improvement of Removal Uniformity in Oxide CMP |
Choi, Sung-Ha
(Graduate School of Mechanical Engineering, Pusan National University)
Jeong, Ho-Bin (Graduate School of Mechanical Engineering, Pusan National University) Park, Young-Bong (Graduate School of Mechanical Engineering, Pusan National University) Lee, Ho-Jun (Graduate School of Mechanical Engineering, Pusan National University) Kim, Hyoung-Jae (Dongnam Division, KITECH) Jeong, Hae-Do (Graduate School of Mechanical Engineering, Pusan National University) |
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