• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.680-683
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• 2011

This study deals with damage detection in beam structure by using modal strain energy-based technique with three different sensor types: accelerometer, lead zirconate titanate (PZT) piezoelectric sensor and electrical strain gage. First, the use of direct piezoelectric effect of PZT sensor for dynamic strain response are presented. Next, a modal strain energy-based damage detection method is outlined. For validation, forced vibration tests are carried out on lab-scale aluminum cantilever beam. The dynamic responses are measured for several damage scenarios. Based on damage localization results, the performance of three different sensor types is evaluated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.11
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• pp.688-692
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• 2017

$Pb(Zr,\;Ti)O_3$ (PZT) is a piezoelectric material applied in a typical actuator and has been actively studied. However, in order to overcome the limitations of PZT, piezoelectric ceramics comprising mixed solid solutions of PZT with various relaxer electric materials have been studied. The $Pb(Zn_{1/3}Nb_{2/3})-Pb(Ni_{1/3}Nb_{2/3})-Pb(Zr,\;Ti)O_3$ (PZN-PNN-PZT) piezoelectric ceramic, known to have high piezoelectric constant and electromechanical coupling coefficient, was studied herein. The piezoelectric characteristics with various Zr contents (Zr/Ti ratios), PZN molar ratios, and sintering temperatures were compared. The piezoelectric properties of $d_{33}=580pC/N$ and $k_P=0.68$ were obtained with the $0.1PZN-0.2PNN-0.7PbZr_{0.46}Ti_{0.54}O_3$ composition sintered at $1,290^{\circ}C$.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.245-248
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• 2012

In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

• Journal of Powder Materials
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• v.25 no.6
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• pp.487-493
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• 2018

The impact of different mixing methods and sintering temperatures on the microstructure and piezoelectric properties of PZNN-PZT ceramics is investigated. To improve the sinterability and piezoelectric properties of these ceramics, the composition of $0.13Pb((Zn_{0.8}Ni_{0.2})_{1/3}Nb_{2/3})O_3-0.87Pb(Zr_{0.5}Ti_{0.5})O_3$ (PZNN-PZT) containing a Pb-based relaxor component is selected. Two methods are used to create the powder for the PZNN-PZT ceramics. The first involves blending all source powders at once, followed by calcination. The second involves the preferential creation of columbite as a precursor, by reacting NiO with $Nb_2O_5$ powder. Subsequently, PZNN-PZT powder can be prepared by mixing the columbite powder, PbO, and other components, followed by an additional calcination step. All the PZNN-PZT powder samples in this study show a nearly-pure perovskite phase. High-density PZNN-PZT ceramics can be fabricated using powders prepared by a two-step calcination process, with the addition of 0.3 wt% MnO2 at even relatively low sintering temperatures from $800^{\circ}C$ to $1000^{\circ}C$. The grain size of the ceramics at sintering temperatures above $900^{\circ}C$ is increased to approximately $3{\mu}m$. The optimized PZNN-PZT piezoelectric ceramics show a piezoelectric constant ($d_{33}$) of 360 pC/N, an electromechanical coupling factor ($k_p$) of 0.61, and a quality factor ($Q_m$) of 275.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.195-196
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.361-361
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• 2012

PZT (Pb(Zr,Ti)O3) thin films have been used widely in the MEMS application, due to their inherent ferroelectric and piezoelectric properties. Such ferroelectricity induces much higher dielectric constants compared to those of the nonperovskite materials. In this work, the PZT thin films were deposited onto Indium-Tin-oxide (ITO) substrates through the spin-coating of PZT sols. The deposited PZT thin films were characterized in terms of the electrical and optical properties with special emphases on conductivity and optical constants. The detailed analysis techniques incorporate the dc-based current-voltage characteristics for the electrical properties, spectroscopic ellipsometry for optical characterization, atomic force microscopy for surface morphology, X-ray Photoelectron Spectroscopy for chemical bonding, Energy-dispersive X-ray Spectrometry for chemical analyses and X-ray diffraction for crystallinity. The ferroelectric phenomena were confirmed using capacitance-voltage measurements. The integrated physical/chemical features are attempted towards energy-oriented applications applicable to next-generation high-efficiency power generation systems.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.1 s.94
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• pp.12-19
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• 2005

This paper proposed a dual actuator using Bimorph PZT for information storage device based on prove array NSOM(near-field scanning optical microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual Bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(finite element analysis), and compared with experimental results. Different control algorithms were used for two Bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.331-332
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• 2006

Ag-ceramic composite materials were investigated as internal electrodes for multilayer ceramic actuators (MLCA). Ag-ceramic pastes were prepared by adding PZT-based ceramic powders to a Ag patse in a range of 0 to 50 wt.%. PZT/Ag-PZT multilayered laminates were fabricated by tape casting and fired at low temperatures below $950^{\circ}C$. The addition of ceramic into the Ag electrode resulted in a decrease in the thermal expansion mismatch between the electrode and the ceramic sheet. The maximum strain of PZT/Ag-PZT multilayered actuators were $9{\times}10^{-4}$ under an electric field of 2.5MV/m. In conclusion, Ag-PZT composite materials are efficient for low cost piezoelectric MLCAs.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1512-1514
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• 2001

In this work, PZT thin films were etched as a function of $Cl_2$/Ar and additive $CF_4$ into $Cl_2$(80%)/Ar(20%). The etch rates of PZT films were 1600 $\AA$/min at $Cl_2$(80%)/Ar(20%) gas mixing ratio and 1973 $\AA$/min at 30% additive $CF_4$ into $Cl_2$(80%)/Ar(20%). Therefore the etch rate of PZT in $CF_4/Cl_2/Ar$ plasma is faster than in $Cl_2$/Ar. From XPS and SIMS analysis, metal halides and C-O, FCI and $CClF_2$ were detected. The etching of PZT films in Cl-based plasma is primarily chemically assisted ion etching and the remove of nonvolatile etch byproducts is the dominant step. Consequently, we suggest that the increase of Cl radicals and the volatile oxy-compound such as $CO_y$ are made by adding $CF_4$ into $Cl_2$/Ar plasma. Therefore, the etch rate of PZT in $CF_4/Cl_2/Ar$ plasma is faster than in $Cl_2$/Ar. The etched profile of PZT films was obtained above 70$^{\circ}$ by the SEM micrograph.

• Smart Structures and Systems
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• v.6 no.5_6
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• pp.749-765
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• 2010

There are on-going efforts to utilize guided waves for structural damage detection. Active sensing devices such as lead zirconate titanate (PZT) have been widely used for guided wave generation and sensing. In addition, there has been increasing interest in adopting wireless sensing to structural health monitoring (SHM) applications. One of major challenges in wireless SHM is to secure power necessary to operate the wireless sensors. However, because active sensing devices demand relatively high electric power compared to conventional passive sensors such as accelerometers and strain gauges, existing battery technologies may not be suitable for long-term operation of the active sensing devices. To tackle this problem, a new wireless power transmission paradigm has been developed in this study. The proposed technique wirelessly transmits power necessary for PZT-based guided wave generation using laser and optoelectronic devices. First, a desired waveform is generated and the intensity of the laser source is modulated accordingly using an electro-optic modulator (EOM). Next, the modulated laser is wirelessly transmitted to a photodiode connected to a PZT. Then, the photodiode converts the transmitted light into an electric signal and excites the PZT to generate guided waves on the structure where the PZT is attached to. Finally, the corresponding response from the sensing PZT is measured. The feasibility of the proposed method for wireless guided wave generation has been experimentally demonstrated.