• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.127-132
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• 2001

In this paper, transmitted sound reduction performance of smart panels is studied according to different piezoelectric materials with piezoelectric shunt damping. Peizo-damping is implemented by using a newly proposed tuning method. This method is based on electrical impedance model and maximizing the dissipated energy at the shunt circuit. By measuring the electrical impedance at the piezoelectric patch bonded on a structure, an equivalent electrical model is constructed near the system resonance frequency. After shunting elements are connected to the equivalent circuit, the shunt parameters are optimally searched based on the criterion of maximizing the dissipated energy at the shunt circuit. Transmitted sound reduction performance is compared according to different piezoelectric materials with peizo-damping. Two piezoelectric materials are selected: PZT-5 and QuickPack IDE actuator. When resonant shunt circuit is considered, the use of PZT-5 exhibited the good sound reduction performance.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.59-67
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• 2003

This paper presents a new approach for the use of smart materials, piezoelectric materials of PVDF and PZT, for vibration attenuation of a planar parallel manipulator. Since lightweight linkages of parallel manipulators deform under high acceleration/deceleration, an active damper is needed to attenuate vibration due to structural flexibility of linkages. Based on the dynamic model of a planar parallel manipulator, an active damping controller is developed, which consists of a PD feedback control scheme, applied to linear electrical motors, and a linear velocity feedback (L-type) scheme applied to either PVDF layer or PZT actuator(5). Simulation results show that piezoelectric materials yield good damping performance, resulting in precise manipulations of a planar parallel manipulator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.477-482
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• 2002

This research is concerned with the study of an active vibration absorber using piezoelectric actuators and Isolation pad. The active isolation system consists of 4-pairs of PZT actuators bonded on the surface of an aluminum plate and a passive damping material. The active system is connected to the passive system in series. The Signals of the accelerometers are fed into the PZT actuator through the controller. We proposed a new control technique which can deal with the shock as well as the base excitation in this study. The Positive Acceleration Feedback(PAE) tuned to the natural frequency of the vibration isolation system is used to suppress the vibrations caused by the shock using the top accelerometer signal. The Negative Acceleration Feedback (NAF) based on the base acceleration signal is used to counteract the base motion. Experimental results show that the proposed active vibration isolation system can suppress vibrations.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.1
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• pp.15-19
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• 2004

In this paper, we present the fabrication and characteristic analysis of Sagnac interferometric optical fiber senior(OFS) system for detecting pulsed ultrasonic signal in underwater. The hollow cylindrical mandrel wound round by single mode optical fiber is used as sensing component. The ultrasonic signal source is simulated by the PZT actuator operated by an function generator. The distance dependency of the OFS's sensitivity was measured. The sensitivity has been shown to be inversely propotional to the square-root of distance between ultrasonic source and sensing component. It has also been shown that the OFS could detect the signals less affected by ultrasonic path comparing to conventional acousto-electric sensor. and accurate location of ultrasonic signal could be carried out using two OFSs.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.243-244
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• 2008

점점 전송 기술이 발달함에 따라, 고속/대용량의 광 연결 기술이 많이 응용되고 있다. 소자들 또한 이러한 광 신호를 받기에 적합한 형태가 필요하다. 따라서 본 논문에서는, 미리 설계한 광 신호로 동작하는 PZT 액추에이터의 동작 범위와 변위를 FEM 시뮬레이션(Finite Element Method Simulation)을 통해 해석해 보니 10V 전압에서 532nm의 변위를 확인할 수 있었고, 또한 열적, 기계적, 전기적 해석을 통하여 차후 제작에 감안할 점들을 찾아내는데 주안점을 두었다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.9
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• pp.495-501
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• 2000

This paper presents a method to minimize the initial deflection of a multi-layer piezoelectric microactuator without loosing its piezoelectric deflection performance required for light modulating micromirror devices. The multi-layer piezoelectric actuator composed of PZT silicon nitride and platinum layers deflects or buckles due to the gradient of residual stress. Based on the structural analysis results and relationship between process conditions and mechanical properties we have modified the fabrication process and the thickness of thin film layers to reduce the initial residual stress deflection without decreasing its piezoelectric deflection performance. The modified designs fabricated by surface-micromachining process achieved the 77% reduction of the initial deflection compared with that of the conventional method based on the measured micromechanical material properties is applicable to the design refinement of multi-layer MEMS devices and micromechanical structures.

• Electrical & Electronic Materials
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• v.3 no.4
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• pp.271-278
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• 1990

본 논문에서는 내부전극 Pt를 갖는 적층형 압전액튜에이터의 제조와 적층수에 따른 압전액튜에이터 압전특성에 대해 조사 연구하였다. 먼저, Dr.blade방법을 사용하여 두께 ~220.mu.m의 PZT green sheet를 제작하였다. green sheet의 밀도는 결합제 양과 외부압력에 대해 크게 의존하였으며 소결체의 밀도는 green sheet의 밀도가 커질수록 더 높게 나타났다. 다음에는 적층수에 따른 압전정수의 변화에 대한 것으로써 압전정수(d$_{33}$)는 PZT세라믹스의 적층수가 증가할수록 매우 크게 증가되었으며 압전정수를 도입하여 계산된 변형량(.DELTA.l/l)은 10층 시편에 대해 2*$10^{6}$V/m의 전계에서 3*$10^{-3}$값을 얻었다. 이와같은 결과로써 적층형 압전액튜에이터는 저전압에서도 큰 변위를 나타내며 따라서 제어장치의 미세작동에 충분히 이용 될 수가 있다.다.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1400-1401
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• 2006

In this study, in order to develop low temperature sintering piezoelectric ceramics for multilayer piezoelectric actuator, $PbSr(Mn_{1/3}Nb_{2/3})O_3-(Mg_{1/3}Nb_{2/3})O_3-(ZrTi)O_3$ ceramics were fabricated using $Na_{2}CO_{3}-Li_{2}CO_{3}$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the sintering tempo rature. At the sintering temperature of $900^{\circ}C$, the density, electrom echanical coupling factor(kp), mechanical quality factor(Qm) and dielectric constant(${\varepsilon}r$) of specimen showed the optimum value of $7.730[g/cm^2]$, 0.552, 1134, 1492 and 330[pC/N], respectively.