• 한국전기전자재료학회논문지
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• 제30권8호
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• pp.501-507
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• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.422-423
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• 2005

RF Micro switches is a miniature device or an array of integration devices and mechanical components and fabricated with Ie batch-processing techniques. RF Micro switches application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF Micro switches have been developed for the application to the milimeter wave system. RF Micro switches offer a substantilly higher performance than PIN diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.3131-3135
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• 2008

This paper presents an energy harvester using piezoelectric elements that is a kind of generator which converts the mechanical power to the electric one using windmill system with many PZT actuators. In this study, low frequency characteristics of the cantilever-type piezoelectric actuator are experimentally investigated. Advantages of the cantilever use are to take a very large displacement and to improve the endurance of the PZT element. The material of cantilever is an aluminum and three kinds of cantilever of which size is $150[mm]{\times}20[mm]{\times}1.5[mm]$, $170[mm]{\times}20[mm]{\times}1.5[mm]$ and $190[mm]{\times}20[mm]{\times}1.5[mm]$ were experimented, respectively. The cantilever was fixed on the vibrator. The characteristics of frequency and mass variation of cantilever end part such as 0[g], 5[g], 10[g] are investigated. Maximum voltage was outputted at the condition of $150[mm]{\times}20[mm]{\times}1.5[mm]$ and 10[g] of mass. It was confirmed that the lower natural frequency at the larger length of cantilever and at the bigger of mass is gotten.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.247-252
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국소음진동공학회논문집
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• 제18권12호
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• pp.1293-1300
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국전산구조공학회논문집
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• 제25권1호
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• pp.91-99
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• 2012

본 연구에서는 PZT 소자의 정압전 효과에 의한 동적 응답신호를 이용하는 보 구조물 손상 모니터링 기법을 제안하였다. 특히, 모드 변형에너지기반 보 구조물 손상 모니터링에 PZT 정압전 응답신호를 입력자료로 활용하는 방안에 대한 연구에 주안점이 있다. 먼저, PZT 소자의 정압전 효과 및 동적 변형률 응답의 이론적 배경을 요약하였다. 다음으로, 모드 변형에너지기반 보 구조물 손상위치 모니터링 기법을 제시하였다. 제시된 기법의 적합성을 검증하기 위해, 캔틸레버 보 모형을 대상으로 강제진동 실험을 수행하였으며, 세 종류의 센서(가속도계, PZT 센서, 변형률계)를 통해 동적 응답신호가 계측되었다. 손상 전후에 계측된 이들 진동신호들을 사용하여 모드 변형에너지기반의 손상위치 모니터링이 수행되었다.

• 한국전기전자재료학회논문지
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• 제30권12호
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• pp.768-775
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• 2017

Energy harvesting characteristics of trapezoidal piezoelectric cantilever generator, which has a lead zirconate titanate (PZT) laminate film, were compared by longitudinal (3-3) and transverse (3-1) modes. The PZT laminate film, fabricated by a conventional tape casting process, was cofired with Ag electrode at $850^{\circ}C$ for 2 h. A multi-layered Ag electrode by a planar pattern and an interdigitated pattern was applied to the PZT laminate to implement the 3-3 and 3-1 modes, respectively. The energy harvesting performance of the 3-3 mode trapezoidal piezoelectric cantilever generator was better than that of the 3-1 mode. An extremely high output power density of $26.7mW/cm^3$ for the 3-3 mode was obtained at a resonant frequency of 145 Hz under a load resistance of $50{\Omega}$ and acceleration of 1.3 G, which is ~3-times higher than that for the 3-1 mode. Therefore, the 3-3 mode is considered significantly efficient for application to high-performance piezoelectric cantilever generator.

• ETRI Journal
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• 제31권6호
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• pp.688-694
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• 2009

In this paper, we present the results of a preliminary study on the piezoelectric energy harvesting performance of a Zr-doped $PbMg_{1/3}Nb_{2/3}O_3-PbTiO_3$ (PMN-PZT) single crystal beam. A novel piezoelectric beam cantilever structure is used to demonstrate the feasibility of generating AC voltage during a state of vibration. The energy-harvesting capability of a PMN-PZT beam is calculated and tested. The frequency response of the cantilever device shows that the first mode resonance frequency of the excitation model exists in the neighborhood of several hundreds of hertz, which is similar to the calculated value. These tests show that several significantly open AC voltages and sub-mW power are achieved. To test the possibility of a small scale power source for a ubiquitous sensor network service, energy conversion and the testing of storage experiment are also carried out.

• 한국전기전자재료학회논문지
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• 제26권11호
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• pp.831-835
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• 2013

In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.