A Study on the Fabrication and Characterization of Micro Pb(Zr,Ti)O3 Film Piezoelectric Cantilever Using MEMS Process for Energy Harvesting
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Lee, Junmyung
(Department of Control and Instrumentation Engineering, Korea University)
Chun, Inwoo (Department of Control and Instrumentation Engineering, Korea University) Kim, Moonkeun (Department of Control and Instrumentation Engineering, Korea University) Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University) Lee, Hyun Woo (Division of Electronic, Computer and Communication Engineering, Hanseo University) |
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