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http://dx.doi.org/10.4313/JKEM.2013.26.11.831

A Study on the Fabrication and Characterization of Micro Pb(Zr,Ti)O3 Film Piezoelectric Cantilever Using MEMS Process for Energy Harvesting  

Lee, Junmyung (Department of Control and Instrumentation Engineering, Korea University)
Chun, Inwoo (Department of Control and Instrumentation Engineering, Korea University)
Kim, Moonkeun (Department of Control and Instrumentation Engineering, Korea University)
Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University)
Lee, Hyun Woo (Division of Electronic, Computer and Communication Engineering, Hanseo University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.11, 2013 , pp. 831-835 More about this Journal
Abstract
In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.
Keywords
MEMS; Cantilever; Energy harvesting; PZT; Resonance frequency;
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1 S. P. Beeby, M. J. Tudor, and N. M. White, J. Meas. Sci. Technol., 17, 175 (2006).   DOI   ScienceOn
2 A. Kansal, J. Hsu, S. Zahedi, and M. B. Srivastava, ACM Transactions on Embedded Computing System, 6, 32 (2007).   DOI
3 S. Priya, Appl. Phys. Lett., 87, 184101 (2005).   DOI   ScienceOn
4 H. C. Song, J. Y. Kang, and S. J. Yoon, J. KIEEME, 23, 28 (2010).
5 K. P. Ashok and P. Rudra, J. Micromech. Microeng., 17, 2475 (2007).   DOI   ScienceOn
6 M. K. Kim, B. S. Hwang, J. H. Jeong, N. K. Min, and K. H. Kwon, J. KIEEME, 24, 515 (2011).
7 J. Q. Liu, H. B. Fang, Z. Y. Xu, X. H. Mao, X. C. Shen, D. Chen, H, Liao, and B. C. Cai, Microelectronics Journal., 39, 802 (2008).   DOI   ScienceOn
8 M. Kim, B. Hwang, Y. H. Ham, J. Jeong, N. K. Min, and K. H. Kwon, J. Micro/Nanolith. MEMS MOEMS., 11, 033009 (2012).
9 M. Kim, B. Hwang, N. K. Min, J. Jeong K. H. Kwon, and K. B. Park, J. Nanosci. Nanotechnol., 11, 6510 (2011).   DOI
10 S. N. Yun and D. G. Kim, J. KSPSE., 13, 65 (2009).
11 K. H. Kwon, S. Y. Kang, G. Y. Yeom, N. K. Hong, and J. H. Lee, J. Electron. Soc., 147, 1807 (2000).   DOI   ScienceOn
12 A. M. Efremov, D. P Kim, and C. I. Kim, Thin Solid Films, 474, 267 (2005).   DOI   ScienceOn
13 Y. B. Jeon, R. Sood, J. H. Jeong, and S. G. Kim, Sensor Actuat., A122, 16 (2005).
14 K. Sugano and O. Tabata, Microsyst. Technol., 9, 11 (2002).   DOI
15 D. Shen, J. H. Park, J. H. Noh, S. Y. Choe, S. H. Kim, H. C. Wikle III, and D. J. Kim, Sensor Actuat., A154, 103 (2009).
16 P. Gardonio, Y. S. Lee, S. J. Eloitt, and S. Debot, J. Acoust. Soc. Am., 110, 3025 (2001).   DOI   ScienceOn
17 S. Wolf and R. F. M. Smith, Student Reference Manual for Electronic Instrumentation Laboratories (Pearson, Upper Saddle River, 2004) p. 80.