• Title/Summary/Keyword: PZT Thin Film

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Design of the Half-bridge inverter for driving CCFL using manufactured PAN-PZT piezoelectric transformer (PAN-PZT 압전변압기 제작과 CCFL 구동용 하프브리지 인버터 설계)

  • Han, Jae-Hyun;Lim, Young-Cheol;Yang, Seung-Hak;Kweon, Gie-Hyoun
    • Proceedings of the KIEE Conference
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    • 2002.11d
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    • pp.194-196
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    • 2002
  • 액정표시장치(LCD; Liquid Crystal Display)는 표현된 정보를 가시화하기 위해 램프의 백라이트가 필수적인데 대부분 부피가 작고 효율과 휘도특성이 좋은 냉음극 방전램프가 사용된다. 램프는 고압으로 구동되며 높은 전압을 얻기 위해 일반적으로 권선 변압기를 사용한다. 그러나 권선 변압기의 경우 자체의 철심이나 권선의 손실로 인하여 출력 효율의 한계가 있으며, 고압을 위해 감긴 코일은 부피를 크게 하며 무겁게 만든다 이를 해결하기 위해 변압기 자체 손실을 줄이고 소형화가 가능하며 높은 승압비을 가진 PAN-PZT계의 적층형 압전 변압기를 제작하였다. 또한 회로의 손실을 줄이기 위한 영전압 스위칭(ZVS; Zero Voltage Switching)과 그리고 LCD패널과 인버터의 불필요한 간섭현상(EMI; Electro-Magnetic Interference)을 줄일 수 있으며 소형화가 가능한 하프 브리지형 압전 인버터를 설계하였다.

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Dielectric and piezoelectric properties of Ag doped $Pb(Zr,Ti)O_3-Pb(Mn,W,Sb,Nb)O_3$ Ceramics (Ag첨가에 따른 $Pb(Zr,Ti)O_3-Pb(Mn,W,Sb,Nb)O_3$의 유전 및 압전 특성)

  • Chung, Hyun-Woo;Lim, Sung-Hun;Lee, Eun-Sun;Jeon, Chang-Sung;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.117-120
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    • 2004
  • The dielectric and piezoelectric properties of silver doped $Pb(Zr,Ti)O_3-Pb(Mn,W,Sb,Nb)O_3$ ceramics was examined. By varying the contents of silver(0.0, 0.4, 1.0 mol%), the effect of doped silver on PZT-PMWSN thin film was investigated at various sintering temperature(900, 1000, $1100^{\circ}C$). As increasing silver contents, the relative dielectric constant is increased and sinterbility is enhanced. At the specimen with 0.4 mol% Ag and sintered at $1100^{\circ}C$, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\varepsilon}r$) and dielectric loss were 0.502, 811, 991, 0.006, respectively. The results show that the PZT-PMWSN/Ag composites have enhanced piezoelectic and dielectric properties and processing condition is improved.

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Comparison of retention characteristics of ferroelectric capacitors with $Pb(Zr, Ti)O_3$ films deposited by various methods for high-density non-volatile memory.

  • Sangmin Shin;Mirko Hofmann;Lee, Yong-Kyun;Koo, June-Mo;Cho, Choong-Rae;Lee, June-Key;Park, Youngsoo;Lee, Kyu-Mann;Song, Yoon-Jong
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.3 no.3
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    • pp.132-138
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    • 2003
  • We investigated the polarization retention characteristics of ferroelectric capacitors with $Pb(Zr,Ti)O_3$ (PZT) thin films which were fabricated by different deposition methods. In thermally-accelerated retention tests, PZT films which were prepared by a chemical solution deposition (CSD) method showed rapid decay of retained polarization charges as the thickness of the films decreased down to 100 nm, while the films which were grown by metal organic chemical vapor deposition (MOCVD) retained relatively large non-volatile charges at the corresponding thickness. We concluded that in the CSD-grown films, the thicker interfacial passive layer compared with the MOCVD-grown films had an unfavorable effect on retention behavior. We observed the existence of such interfacial layers by extrapolation of the total capacitance with thickness of the films and the capacitance of these layers was larger in MOCVD-grown films than in CSD-grown films. Due to incomplete compensation of surface polarization charges by the free charges in the metal electrodes, the interfacial field activated the space charges inside the interfacial layers and deposited them at the boundary between the ferroelectric layer and the interfacial layer. Such space charges built up an internal field inside the films, which interfered with domain wall motion, so that retention property at last became degraded. We observed less imprint which was a result of less internal field in MOCVD-grown films while large imprint was observed in CSD-grown films.

Piezoelectric nanocomposite sensors assembled using zinc oxide nanoparticles and poly(vinylidene fluoride)

  • Dodds, John S.;Meyers, Frederick N.;Loh, Kenneth J.
    • Smart Structures and Systems
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    • v.12 no.1
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    • pp.55-71
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    • 2013
  • Structural health monitoring (SHM) is vital for detecting the onset of damage and for preventing catastrophic failure of civil infrastructure systems. In particular, piezoelectric transducers have the ability to excite and actively interrogate structures (e.g., using surface waves) while measuring their response for sensing and damage detection. In fact, piezoelectric transducers such as lead zirconate titanate (PZT) and poly(vinylidene fluoride) (PVDF) have been used for various laboratory/field tests and possess significant advantages as compared to visual inspection and vibration-based methods, to name a few. However, PZTs are inherently brittle, and PVDF films do not possess high piezoelectricity, thereby limiting each of these devices to certain specific applications. The objective of this study is to design, characterize, and validate piezoelectric nanocomposites consisting of zinc oxide (ZnO) nanoparticles assembled in a PVDF copolymer matrix for sensing and SHM applications. These films provide greater mechanical flexibility as compared to PZTs, yet possess enhanced piezoelectricity as compared to pristine PVDF copolymers. This study started with spin coating dispersed ZnO- and PVDF-TrFE-based solutions to fabricate the piezoelectric nanocomposites. The concentration of ZnO nanoparticles was varied from 0 to 20 wt.% (in 5 % increments) to determine their influence on bulk film piezoelectricity. Second, their electric polarization responses were obtained for quantifying thin film remnant polarization, which is directly correlated to piezoelectricity. Based on these results, the films were poled (at 50 $MV-m^{-1}$) to permanently align their electrical domains and to enhance their bulk film piezoelectricity. Then, a series of hammer impact tests were conducted, and the voltage generated by poled ZnO-based thin films was compared to commercially poled PVDF copolymer thin films. The hammer impact tests showed comparable results between the prototype and commercial samples, and increasing ZnO content provided enhanced piezoelectric performance. Lastly, the films were further validated for sensing using different energy levels of hammer impact, different distances between the impact locations and the film electrodes, and cantilever free vibration testing for dynamic strain sensing.

Non-volatile Control of 2DEG Conductance at Oxide Interfaces

  • Kim, Shin-Ik;Kim, Jin-Sang;Baek, Seung-Hyub
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.211.2-211.2
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    • 2014
  • Epitaxial complex oxide thin film heterostructures have attracted a great attention for their multifunctional properties, such as ferroelectricity, and ferromagnetism. Two dimensional electron gas (2DEG) confined at the interface between two insulating perovskite oxides such as LaAlO3/SrTiO3 interface, provides opportunities to expand various electronic and memory devices in nano-scale. Recently, it was reported that the conductivity of 2DEG could be controlled by external electric field. However, the switched conductivity of 2DEG was not stable with time, resulting in relaxation due to the reaction between charged surface on LaAlO3 layer and atmospheric conditions. In this report, we demonstrated a way to control the conductivity of 2DEG in non-volatile way integrating ferroelectric materials into LAO/STO heterostructure. We fabricated epitaxial Pb(Zr0.2Ti0.8)O3 films on LAO/STO heterostructure by pulsed laser deposition. The conductivity of 2DEG was reproducibly controlled with 3-order magnitude by switching the spontaneous polarization of PZT layer. The controlled conductivity was stable with time without relaxation over 60 hours. This is also consistent with robust polarization state of PZT layer confirmed by piezoresponse force microscopy. This work demonstrates a model system to combine ferroelectric material and 2DEG, which guides a way to realize novel multifunctional electronic devices.

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A Circuit Simulation Model of Ferroelectric Capacitors and its AHDL Implementation (강유전체 캐패시터의 회로 시뮬레이션 모델과 이의AHDL 구현)

  • Kim, Shi-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.10
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    • pp.25-32
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    • 2000
  • We provided a model for accurately computing the Hysteresis characteristics of the ferrelectric thin film capacitors. This model is developed form the semi-empirical ferroelectric model based on the double well harmonic oscillator. We have seen that this model is consistent with physical analysis using the Preisach's hysteresis distribution. This model includes the parameters representing the slope of changing Hysteresis curves and the imprint of ferroelectric capacitors. Besides, we showed that this model could predict accurate sub-hystersis loop by the turning points when the polarities of applied voltage were changed before saturation. The simulation and measurement result showed that this model is well applicable to both PZT and SBT materials. This model has been described by AHDL and successfully implemented into Spectre simulator to provide circuit design environment of commercial CAD tools such as Cadence software.

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Real Time Monitoring of Ionic Species Generated from Laser-Ablated Pb$(Zr_{0.52}Ti_{0.48})O_3$ Target Using Pulsed-Field Time-Of-Flight Mass spectrometer

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • v.19 no.8
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    • pp.830-835
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    • 1998
  • The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

Piezoelectric Polymer Ultrasound Transducers and Its Biomedical Applications (압전고분자 초음파 트랜스듀서와 생의학적 응용)

  • Ha, Kang-Lyeol;Cao, Yonggang
    • Journal of the Korean Society for Nondestructive Testing
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    • v.32 no.5
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    • pp.585-596
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    • 2012
  • PVDF(poly vinylidene fluoride) and P(VDF-TrFE)(poly vinylidene fluoride-tetrafluoroethylene) are the typical piezoelectric polymers with unique properties. Even they are inferior to conventional piezoelectric ceramics PZT in electromechanical conversion efficiency and interior loss, though they are superior in receiving sensitivity and frequency bandwidth. Their acoustic impedances are relatively close to water or biological tissue and it is easier to make thin film than other piezoelectric materials. Futhermore, the film is so flexible that it is easy to attach on a complex surface. Those properties are suitable for the ultrasound transducers which are useful for medical and biological application, so that various types of polymer transducers have been developed. In this paper, several important considerations for design and fabrication of piezoelectric polymer transducers were described and their effect on the transducer performance were demonstrated through the KLM model analysis. Then, it was briefly reviewed about the structures of the polymer transducers developed for obtaining images as well as the characteristics of the images in several important medical and biological application fields.

Fabrication and Characteristics of Micro PZT Cantilever Energy Harvester Using MEMS Technologies (MEMS 공정을 이용한 마이크로 PZT 외팔보 에너지 수확소자의 제작 및 특성)

  • Kim, Moon-Keun;Hwang, Beom-Seok;Jeong, Jae-Hwa;Min, Nam-Ki;Kwon, Kwang-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.6
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    • pp.515-518
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    • 2011
  • In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)$O_3$ cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 12 ${\mu}M$, and an integrated Si proof mass with dimensions of about 1,410 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 450 ${\mu}M$. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 ${\mu}Wat$ 1.0 g and 23.7 ${\Omega}$, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.

Fabrication and characterization of optical fiber fabry-perot tunable filter for WDM transmission (WDM 전소용 광섬유 fabry-perot 가변 광필터의 제작 및 특성 분석)

  • 김윤중;김창민;김명진;윤대원
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.3
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    • pp.70-81
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    • 1998
  • Fiber-Fabry-Perot (FFP) tunable filters, the essential component of WDM transmission, were designed, fabricated and characterized. Multi-layered thin film mirrors that consists of an optical collimater's corss section as a substrate and TiO$_{2}$SiO$_{2}$ alternating multi-layered films as a filter wer designed by means of the transfer matrix method. Fabricated mirrors showed the high reflectivity over around 98% as expected. After fabricating the tuneable filters using PZT, we measured FSR, FWHM, finesse , crosstalk and insertion loss, confirming that the built devices satisfied the optical filter's specifications required in the SEDM transmission systems.

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