• Title/Summary/Keyword: PVD

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EPD(Electrophoretic Deposition)를 이용한 Ni-$Al_2O_3$ 경사기능재료(FGM) 코팅에 관한 연구

  • Kim, Hyeong-Seop;Yang, Seung-Gyu;Lee, Seon-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.104.2-104.2
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    • 2012
  • 이종 재료의 접합에 대한 연구는 단일 재료에서 얻을 수 없는 물리적/기계적 특성과 이종 재료의 우수한 특성을 얻을 수 있다는 장점이 있어 국내외 적으로 연구가 활발히 진행되고 있다. 이러한 이종 접합 기술은 구조재료와 에너지 변환분야에 가장 많이 사용되고 있으며, 그 외 광촉매와 Thin film, 경량구조재료 등에도 사용되고 있다. 그 중 FGM(Functional Graded Materials)는 조성의 점진적인 변화를 통하여 접합하는 방법으로 이종 재료 접합 시 발생하는 내부 응력을 해소해줌으로써 적합한 방법이라고 할 수 있다. FGM 제작에 사용되는 방법으로 널리 알려진 것들로는 plasma spraying, 원심주조, 분말 야금법, PVD, CVD 그리고 EPD(electrophoretic deposition) 등이 있다. 이중에서 EPD는 수용액이나 유기용매와 같은 분산매체 중에 콜로이드 입자의 표면에 대전되는 전하를 이용하여, 외부에서 전장을 걸어서 입자의 움직임을 제어하는 기술이다 EPD는 코팅 속도가 상대적으로 빠르고 두꺼운 코팅 층 제작이 가능하다. 또한 바인더, 윤활제 또는 가소제를 사용하지 않고 다양한 종류와 모양의 기판 위에 균일한 코팅이 가능하다는 장점이 있다. 본 연구에서는 Ni substrate를 이용하여 그 위에 Ni과 $Al_2O_3$의 조성을 점진적으로 변화시켜 FGM을 EPD 방법으로 코팅하였다. 여기서 사용된 Ni은 높은 녹는점과 좋은 연성으로 인해 성형이 용이하여 구조재료로 적합하며, $Al_2O_3$는 고내열성과 내부식성을 가지며 경도가 높다는 장점이 있다. 본 연구에서는 EPD 방식을 이용하여 Ni/$Al_2O_3$ FGM을 코팅하였으며, 코팅 후 발생하는 substrate와의 접착력 문제를 해결하기 위해서 건조 방식과 substrate의 표면 상태를 최적화하여 다층의 Ni/$Al_2O_3$ FGM을 코팅 및 소결하였다. Zeta-potential 측정을 통해 electrophoretic mobility와 suspension의 분산 안정도를 평가 할 수 있었으며, X-ray 회절 분석(XRD)을 통하여 Ni 의 환원 여부를 확인하였다. 또한 Scanning electron microscopy(SEM) 분석을 통하여 미세구조 분석을 하였고, 최종적으로 Electron Probe Micro Analyzer (EPMA) 를 이용하여 다층 구조의 조성변화를 확인함으로 Ni/$Al_2O_3$의 FGM 코팅이 이루어졌음을 확인하였다.

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Assessment on Consolidation Material Function and Initial Stress for Soft Ground by Hydraulic Fill the at Southern Coast of Korea (남해안 준설매립 연약지반에 대한 압밀 물질함수 및 초기응력 산정)

  • Jeon, Je Sung;Koo, Ja Kap
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.15 no.4
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    • pp.136-145
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    • 2011
  • For a massive project related to building national industrial complexes on a soft ground applied to PVD after dredging and hydraulic fill, laboratory tests were carried out using undisturbed sample taken from various depth. Piezocone penetration and dissipation tests were carried out to assess horizontal coefficient of consolidation and initial stress in field. The ground consists of upper dredged fill and lower original clay layer having both similar marine clays. It should be, however, considered as multi-layered soft ground having different initial void ratio, initial water content, initial effective stress, and permeability and compressibility with directions. To assess initial stress of those soft layers in which have different stress history related to consolidation, CPTu test results, especially excess pore water pressure, were analyzed. It allows to find out distribution of excess pore water pressure and initial stress inner original clay layer.

A Study on the friction and Wear Characteristics of C-N Coated SCM415 Steel (C-N코팅 SCM415강의 마찰$\cdot$마모 특성에 관한 연구)

  • Lyu Sung-ki;Lu Long;Jin Tai-yu;Lian Zhe-Man;Cao Xing-Jin;Cho Sung-Min
    • Journal of the Korean Society of Safety
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    • v.20 no.1 s.69
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    • pp.18-23
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    • 2005
  • This study deals with the friction and wear characteristics of C-N coated SCM415 steel. The PSII(plasma source ion implantation) apparatus was built and a SCM415 test piece with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD(physical vapor decomposition) coated TiN layer. It was found that both of friction coefficient of C-N coating and TiN coating decreased with increasing load, however, C-N coating showed relatively lower faction coefficient than that of TiN coating. The micro-vickers hardness of C-N film is 3200 Hv, which is $32\~43\%$ higher than that of TiN film. The critical load of C-N film is 52N, which is $25\%$ higher than that of TiN film. The hardness of C-N film fabricated by Plasma ion implantation is $61\~70\%$ higher than that of base material, and faction coefficient is $14\~50\%$ lower than that of base material. It is also interesting to note that the friction was changed from adhesive wear mode to light oxidizing wear mode.

A Study on the Seed Step-coverage Enhancement Process (SSEP) of High Aspect Ratio Through Silicon Via (TSV) Using Pd/Cu/PVP Colloids (Pd/Cu/PVP 콜로이드를 이용한 고종횡비 실리콘 관통전극 내 구리씨앗층의 단차피복도 개선에 관한 연구)

  • Lee, Dongryul;Lee, Yugin;Kim, Hyung-Jong;Lee, Min Hyung
    • Journal of the Korean institute of surface engineering
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    • v.47 no.2
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    • pp.68-74
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    • 2014
  • The seed step-coverage enhancement process (SSEP) using Pd/Cu/PVP colloids was investigated for the filling of through silicon via (TSV) without void. TEM analysis showed that the Pd/Cu nano-particles were well dispersed in aqueous solution with the average diameter of 6.18 nm. This Pd/Cu nano-particles were uniformly deposited on the substrate of Si/$SiO_2$/Ti wafer using electrophoresis with the high frequency Alternating Current (AC). After electroless Cu deposition on the substrate treated with Pd/Cu/PVP colloids, the adhesive property between deposited Cu layer and substrate was evaluated. The Cu deposit obtained by SSEP with Pd/Cu/PVP colloids showed superior adhesion property to that on Pd ion catalyst-treated substrate. Finally, by implementing the SSEP using Pd/Cu/PVP colloids, we achieved 700% improvement of step coverage of Cu seed layer compared to PVD process, resulting in void-free filling in high aspect ratio TSV.

Microstructure and Mechanical Properties of Hardmaterials

  • Hayashi, Koji
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 1994.04c
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    • pp.6-6
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    • 1994
  • Har dmaterials such as cemented carbides with or without coated layer, cermets, ceramics and diamond or c-BN high pressure sintered compact are used for cutting tools, wear -resistant parts, rock drilling bits and/or high pressure vessels. These hardmaterials contain not only hard phase, but also second consituent as the element for forming ductile phase and/or sintering aid, and the mechanical properties of each material depend on (1) the amount of the second constituent as well as (2) the grain size of the hard phase. The hardness of each material mainly depends on these two factors. The fracture strength, however, largely depends on other microstructur a1 factors as well as the above two factors. For all hardmaterials, the fracture strength is consider ably affected by (3) the size of microstructur a1 defect which acts as the fracture source. In cemented carbides, the following factors which are generated mainly due to the addition of the second constituent are also important; (4) the variation of the carbon content in the normal phase region free from V-phase and graphite phase, (5) the precipitation of $Co_3$ during heating at about $800^{\circ}C$,(6) the domain size of binder phase, and (7) the formation of ${\beta}$-free layer or Co-rich layer near the surface of sintered compacts. For cemented carbides coated with thin hard substance, the important factors are as follows; (8) the kind of coated substance, (9) the formation of ${\eta}$-phase layer at the interface between coated layer and substrate, (10) the type of residual stress (tension or compression) in the coated layer which depends on the kind of coating method (CVD or PVD), and (11) the properties of the substrate, and (12) the combination, coherency and periodicity of multi-layers. In the lecture, the details of these factors and their effect on the strength will be explained.

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Effect of Working Pressure and Substrate Bias on Phase Formation and Microstructure of Cr-Al-N Coatings

  • Choi, Seon-A;Kim, Seong-Won;Lee, Sung-Min;Kim, Hyung-Tae;Oh, Yoon-Suk
    • Journal of the Korean Ceramic Society
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    • v.54 no.6
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    • pp.511-517
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    • 2017
  • With different working pressures and substrate biases, Cr-Al-N coatings were deposited by hybrid physical vapor deposition (PVD) method, consisting of unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) processes. Cr and Al targets were used for the arc ion plating and the sputtering process, respectively. Phase analysis, and composition, binding energy, and microstructural analyses were performed using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and field emission scanning electron microscopy (FESEM), respectively. Surface droplet size of Cr-Al-N coatings was found to decrease with increasing substrate bias. A decrease of the deposition rate of Cr-Al-N films was expected due to the increase of substrate bias. The coatings were grown with textured CrN phase and (111), (200), and (220) planes. X-ray diffraction data show that all Cr-Al-N coatings shifted to lower diffraction angles due to the addition of Al. The XPS results were used to determine the $Cr_2N$, CrN, and (Cr,Al)N binding energies. The compositions of the Cr-Al-N films were measured by XPS to be Cr 23.2~36.9 at%, Al 30.1~40.3 at%, and N 31.3~38.6 at%.

Electrochemical double layer capacitors with PEO and Sri Lankan natural graphite

  • Jayamaha, Bandara;Dissanayake, Malavi A.K.L.;Vignarooban, Kandasamy;Vidanapathirana, Kamal P.;Perera, Kumudu S.
    • Advances in Energy Research
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    • v.5 no.3
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    • pp.219-226
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    • 2017
  • Electrochemical double layer capacitors (EDLCs) have received a tremendous interest due to their suitability for diverse applications. They have been fabricated using different carbon based electrodes including activated carbons, single walled/multi walled carbon nano tubes. But, graphite which is one of the natural resources in Sri Lanka has not been given a considerable attention towards using for EDLCs though it is a famous carbon material. On the other hand, EDLCs are well reported with various liquid electrolytes which are associated with numerous drawbacks. Gel polymer electrolytes (GPE) are well known alternative for liquid electrolytes. In this paper, it is reported about an EDLC fabricated with a nano composite polyethylene oxide based GPE and two Sri Lankan graphite based electrodes. The composition of the GPE was [{(10PEO: $NaClO_4$) molar ratio}: 75wt.% PC] : 5 wt.% $TiO_2$. GPE was prepared using the solvent casting method. Two graphite electrodes were prepared by mixing 85% graphite and 15% polyvinylidenefluoride (PVdF) in acetone and casting n fluorine doped tin oxide glass plates. GPE film was sandwiched in between the two graphite electrodes. A non faradaic charge discharge mechanism was observed from the Cyclic Voltammetry study. GPE was stable in the potential windows from (-0.8 V-0.8 V) to (-1.5 V-1.5 V). By increasing the width of the potential window, single electrode specific capacity increased. Impedance plots confirmed the capacitive behavior at low frequency region. Galvanostatic charge discharge test yielded an average discharge capacity of $0.60Fg^{-1}$.

Characteristics and Thermal Stabilities of W-B-C-N Diffusion Barrier by Using the Incorporation of Boron Impurities (Boron 불순물에 의한 W-B-C-N 확산방지막의 특성 및 열적 안정성 연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Magnetics Society
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    • v.18 no.1
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    • pp.32-35
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    • 2008
  • Thermally stable diffusion barrier of tungsten carbon nitride(W-C-N) and of tungsten boron carbon nitride(W-B-C-N) thin films have studied to investigate the impurity behaviors of boron and nitrogen. In this paper we newly deposited tungsten boron carbon nitride(W-B-C-N) thin film for various $W_2B$ target power on silicon substrate. The impurities of the 100nm-thick W-C-N and W-B-C-N thin films provide stuffing effect for preventing the inter-diffusion between W-C-N or W-B-C-N thin films and silicon during the high temperature($700^{\circ}C{\sim}1000^{\circ}C$) annealing process.

A Study on Corrosion Resistance Characteristics of PVD Cr-N Coated Steels by Electrochemical Method

  • Ahn, SeungHo;Yoo, JiHong;Choi, YoonSeok;Kim, JungGu;Han, JeonGun
    • Corrosion Science and Technology
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    • v.2 no.6
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    • pp.289-295
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    • 2003
  • The corrosion behavior of Cr-N coated steels with different phases (${\alpha}-Cr$, CrN and $Cr_2N$) deposited by cathodic arc deposition on Hl3 steel was investigated in 3.5% NaCl solution at ambient temperature. Potentiodynamic polarization test, electrochemical impedance spectroscopy (EIS) and scanning electron microscopy (SEM) were the techniques applied to characterize the corrosion behavior. It was found that the CrN coating had a lower current density from potentiodynamic polarization test than others. The porosity, corresponding to the ratio of the polarization resistance of the uncoated and the coated substrate, was higher in the $Cr_2N$ coating than in the other Cr-N coated steels. EIS measurements showed, for the most of Cr-N coated steels, that the Bode plot presented two time constants. Also, the $Cr_2N$ coating represents the characteristic of Warburg behavior after 72hr of immersion. The coating morphologies were examined in planar view and cross-section by SEM analyses and the results were compared with those of the electrochemical measurement. The CrN coating had a dense, columnar grain-sized microstructure with minor intergranular porosity. From the above results, the CrN coating provided a better corrosion protection than the other Cr-N coated steels.

Preparation of Si/C Anode with PVA Nanocomposite for Lithium-ion Battery Using Electrospinning Method

  • Choi, Sung Il;Lee, Ye Min;Jeong, Hui Cheol;Jung, Eun-Jin;Lee, Mi Sun;Kim, Jinyoung;Kim, Yong Ha;Won, Yong Sun
    • Korean Chemical Engineering Research
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    • v.56 no.1
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    • pp.139-142
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    • 2018
  • Silicon (Si) is a promising anode material for next-generation lithium ion batteries (LIBs) because of its high capacity of 4,200 mAh/g ($Li_{4.4}Si$ phase). However, the large volume expansion of Si during lithiation leads to electrical failure of electrode and rapid capacity decrease. Generally, a binder is homogeneously mixed with active materials to maintain electrical contact, so that Si needs a particular binding system due to its large volume expansion. Polyvinyl alcohol (PVA) is known to form a hydrogen bond with partially hydrolyzed silicon oxide layer on Si nanoparticles. However, the decrease of its cohesiveness followed by the repeated volume change of Si still remains unsolved. To overcome this problem, we have introduced the electrospinning method to weave active materials in a stable nanofibrous PVA structure, where stresses from the large volume change of Si can be contained. We have confirmed that the capacity retention of Si-based LIBs using electrospun PVA matrix is higher compared to the conservative method (only dissolving in the slurry); the $25^{th}$ cycle capacity retention ratio based on the $2^{nd}$ cycle was 37% for the electrode with electrospun PVA matrix, compared to 27% and 8% for the electrodes with PVdF and PVA binders.