• Title/Summary/Keyword: PLASMA SURFACE TREATMENT

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Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide (초임계이산화탄소를 이용한 플라즈마 손상된 다공성 저유전 막질의 복원)

  • Jung, Jae-Mok;Lim, Kwon-Taek
    • Clean Technology
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    • v.16 no.3
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    • pp.191-197
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    • 2010
  • Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

The Surface Treatment Effect for Nanoimprint Lithography using Vapor Deposition of Silane Coupling Agent (나노임프린트 공정에서 실란커플링제 기상증착을 이용한 표면처리 효과)

  • Lee, Dong-Il;kim, Ki-Don;Jeong, Jun-Ho;Lee, Eung-Sug;Choi, Dae-Geun
    • Korean Chemical Engineering Research
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    • v.45 no.2
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    • pp.149-154
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    • 2007
  • Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.

Sensitivity Analyses of Finite Element Parameters of Laser Shock Peening for Improving Fatigue Life of Metalic components (금속 재료 피로수명 향상을 위한 LSP 유한요소 변수 민감도 해석)

  • Kim, Ju-Hee;Kim, Yun-Jae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.12
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    • pp.1821-1828
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    • 2010
  • Laser shock peening(LSP) is an innovative surface treatment technique, and it has been successfully used to improve the fatigue performance of metallic components. It is widely known, that cracks caused by metal fatigue occur only at the location where the metal is subject to tension, and not at the location where the metal is subjected to compression. Therefore, LSP can be employed to improve fatigue life because it generates a high-magnitude compressive residual stress on the surface and interior of metallic components. In this study, we analyzed the applicability of the LSP method in improving fatigue performance and evaluated the various parameters that influence the compressive residual stress. Further, we analyzed the change in the mechanical properties such as surface dynamic stress and the compressive residual stress on the surface and interior of metallic components.

Microstructural and Mechanical Characteristics of Al-Si-Cu Die Casting Alloy for Engine Mount Bracket (엔진 마운트 브라켓용 다이캐스팅 Al-Si-Cu 합금의 미세조직과 기계적 특성)

  • Chyun, In-Bum;Hong, Seung-Pyo;Kim, Chung-Seok
    • Journal of the Korean Society for Heat Treatment
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    • v.27 no.6
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    • pp.281-287
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    • 2014
  • Microstructural and mechanical characteristics of Al-6Si-2Cu alloy for engine mount bracket prepared by gravity casting (as-cast) and die-casting (as-diecast) process have been investigated. For the microstructural characterization, the inductively coupled plasma mass spectrometry (ICP-MS), optical microscope (OM), scanning electron microscope (SEM) and electron probe microanalysis (EPMA) analyses are conducted. For the intermetallic phases, the X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS) are also conducted with quantitative and qualitative analysis. Micro Vickers hardness and static tensile test are achieved in order to measure mechanical properties of alloys. Secondary dendrite arm spacing (SDAS) of as-cast and as-diecast show 37um and 18um, respectively. A large amount of coarsen eutectic Si, $Al_2Cu$ intermetallic phase and Fe-rich phases are identified in the Al-6Si-2Cu alloy. Mechanical properties of gravity casting alloy are much higher than those of die-casting alloy. Especially, yield strength and elongation of gravity casting alloy show 2 times higher than die-casting alloy. After shot peening, shot peening refined the surface grains and Si particles of the alloys by plastic deformation. The surface hardness value shows that shot peening alloy has higher value than unpeening alloy.

Removal Torque of Mg-ion Implanted Clinical Implants with Plasma Source Ion Implantation Method (마그네슘 이온주입 임플란트의 뒤틀림 제거력에 관한 연구)

  • Kim, Bo-Hyoun;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra
    • Journal of Dental Rehabilitation and Applied Science
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    • v.25 no.1
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    • pp.41-52
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    • 2009
  • The surface treatment of titanium implant could bring out the biochemical bonding between bone and implant. The purpose of this study was to evaluate the biomechanical bone response of Mg-ion implanted implants with plasma source ion implantation method. Twelve New Zealand white rabbits were included in this study. Each rabbit received one control fixture (blasted with resorbable blasting media, RBM) and three types of Mg ion implanted fixtures in tibiae. The implants were left in place for 6 weeks before the rabbits were sacrificed. Removal torque value and resonance frequency analysis (ISQ) were compared. The repeated measured analysis of variance was used with $P{\leq}0.05$ as level of statistical significance. ISQ was not different among all groups. However, the ISQ was increased after 6 weeks healing. The group had lowest ISQ value showed the greatest increment. Mg-1 implants with 9.4% retained ion dose showed significantly higher removal torque value than that of the other implants. From this results, it is concluded that the Mg-1 implants has stronger bone response than control RBM surface implant.

Characterizations of Adhesion Property, Morphology and Cure Reaction of Epoxy/Polyamide/MPD Reactive Blend with Imidazole(2E4MZ-CN) Catalyst (이미다폴(2E4MZ-CN) 촉매 첨가에 의한 에폭시/폴리아미드/MPD 반응성 블렌드의 경화 반응, 형태학적 특징 및 접착력 향상 연구)

  • Song, Hyun-Woo;Kang, Hak-Su;Kim, Won-Ho;Marzi, Stephan;Kim, Byung-Min;Choe, Young-Son
    • Polymer(Korea)
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    • v.33 no.4
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    • pp.290-296
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    • 2009
  • The morphology and mechanical properties of epoxy/polyamide/MPD/2E4MZ-CN reactive blends with various amount of catalyst were investigated. The cure behaviors, mechanical strengths, and morphological changes of the epoxy blend systems were analyzed by using DSC, UTM, and SEM, respectively. The amount of catalyst ranged from 0 to 3 phr, and the cure reaction occurred at $170^{\circ}C$ for 30 min. The maximum peaks in heat flow during cure reactions appeared at slightly lower temperature with increasing catalyst content, indicating that the cure reactions start at lower temperature by adding catalyst and polyamide rarely hinders the cure reaction paths. The co-continuous morphology was found in epoxy/polyamide(20 phr) blends and by adding catalyst to the blends much clearer and uniform co-continuous phase was observed. The surface tension of the mechanical test specimen was increased due to the AP plasma surface treatment, and then adhesion strength was increased by over 20% by adding 2 phr of catalyst to the blends. When considering morphological tuning of the blends by means of catalyst incorporation, it is expected that the increased elongation and adhesion strength can be achieved in the structural adhesive systems.

Convergence study of mechanical properties and biocompatability of Ti Gr4 surface coated with HA using plasma spray for ossoeintegration (골융합 촉진을 위한 Ti Gr4의 HA 코팅에 대한 물리적 특성과 생체안정성에 대한 융합적 연구)

  • Hwang, Gab-Woon
    • Journal of the Korea Convergence Society
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    • v.12 no.12
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    • pp.145-151
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    • 2021
  • This study aimed to investigate the efficient conduct of HA coating on Ti Gr4 for the practical use of medical device. Ti Gr4 alloy specimens measuring 𝜱 25mm × 1mm were sprayed with hydroxyapatite using thermal spray according to ASTM F1185-88. The surface was evaluated at #120, #400, #1,000 sandpaper and barrel finishing. Each coating properties was analyzed using SEM, UTS 20,000psi cap. and in vitro cytotoxicity. Surface morphology consists of well molten particles with very little resolidified or unmolten areas. The average Ca/P ratio is 1.74 which is in good agreement with theoretical value of 1.67. The average roughness Ra is very representative of roughness of specimen. The coatings are dense and well adhered to the substrate. The average bond strength was 61.74 MPa with a standard deviation of 4.06 which indicates fairly reliable results for ASTM 633 type tests. Variations in results from jig design, epoxy used, crosshead speeds etc. in vitro cytotoxicity result had a Grade 3. The results of the study are expected to be helpful in osseointegration and plasma-spray HA coated Ti Gr4 are more satisfactory in HA coating thickness elevation which is preferable to any other system.

Surface Treatment of IHX Materials for VHTR (원자력 중간열교환기 열수송계 소재의 표면처리)

  • Lee, Byeong-U;Lee, Myeong-Hun;Bang, Gwang-Hyeon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.11a
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    • pp.35-50
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    • 2012
  • $900^{\circ}C$이상 초고온 He-gas 분위기 또는 용융불화염 (molten salts, FLINAK) 환경에서 사용될 VHTR(Very High Temperature Reactor)의 IHX(Intermediate heat exchanger)용 열수송 구조재료로 가장 가능성이 높은 합금인 Inconel 617 및 Hastelloy X 상에 습식화학적, 물리적기상합성법(Vacuum arc-plasma과 RF magnetron sputtering) 및 pack cementation에 의한 표면개질 및 마이크로 초내열(refractory ceramics) 코팅층(TiN, TiCN, TiAlN, $Al_2O_3$, $TiO_2$)을 형성시켰다. 고온 장기사용 시 문제가 될 수 있는 고온에서의 조직변화, 미세구조와 상(phase)형성, 고온 부식 및 그에 따른 마모(wear resistance) 손상 등 이들 소재의 내열, 내식 및 내마모 물성을 개선하는 연구를 수행하였다. TiAlN 박막의 경우 공기분위기에서 N이 분해되나 치밀한 산화물($TiO_2/Al_2O_3$ layer)을 형성하여 내식성 있는 보호피막을 형성함으로 기판과의 열팽창 계수로 인한 박리가 발생하지 않아 보호피막으로 적합하였다. Pack cementation법에 의한 aluminiding(Al-Ni합금)도 He 및 공기분위기에서 고온물성의 저하를 가져오는 $Cr_2O_3$의 생성을 충분히 억제하고 있었으며 He 및 air 분위기에서 사용이 가능한 박막으로 여겨진다. 내열 및 내식성에 대한 실험을 종합한 결과, 공기분위기에서 사용할 수 없는 박막은 He-gas 및 FLINAK(LiF-NaF-KF) 용융염 분위기에서도 사용할 수 없었으며, He-gas, FLINAK 및 air 분위기에서 모두 사용이 가능한 박막으로는 Inconel 617에서는 $(TiO_2-)Al_2O_3$, TiAlN 및 Al-Ni이었고 Hastelloy에서는 Al-Ni 및 $Al_2O_3$가 가장 적당하였다.

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Comparison of PEO Coating Layer of AZ31 Alloy Surface according to EDTA Contained in Electrolytic Solution (전해 용액에 포함된 EDTA에 따른 AZ31 합금 표면의 PEO 코팅 층 비교)

  • Woo, Jin-Ju;Kim, Min-Soo;Koo, Bon-Heun
    • Composites Research
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    • v.33 no.4
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    • pp.185-190
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    • 2020
  • Titanium is widely used as an implant material due to its excellent biocompatibility, but has a problem due to high cost and high Young's modulus compared to bone. Magnesium alloy is attracting attention as a material to replace it. Magnesium alloy, like titanium, has excellent biocompatibility and has a Young's modulus similar to that of bone. However, there are corrosion resistance problems due to corrosion, and various surface treatment methods are being studied to solve them. In this study, the ceramic coating layer was grown on the surface of the AZ31 magnesium alloy in an electrolytic solution containing EDTA, and the properties of the formed coating were analyzed through SEM and XRD to analyze the microstructure and shape, and measured the micro hardness of the coating layer. Corrosion properties in the body were evaluated through a corrosion test in SBF solution, a component similar to blood plasma.

Imprinted Graphene-Starch Nanocomposite Matrix-Anchored EQCM Platform for Highly Selective Sensing of Epinephrine

  • Srivastava, Juhi;Kushwaha, Archana;Singh, Meenakshi
    • Nano
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    • v.13 no.11
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    • pp.1850131.1-1850131.19
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    • 2018
  • In this paper, an electrochemical sensor for epinephrine (EP), a neurotransmitter was developed by anchoring molecularly imprinted polymeric matrix (MIP) on the surface of gold-coated quartz crystal electrode of electrochemical quartz crystal microbalance (EQCM) using starch nanoparticles (Starch NP) - reduced graphene oxide (RGO) nanocomposite as polymeric format for the first time. Use of EP in therapeutic treatment requires proper dose and route of administration. Proper follow-up of neurological disorders and timely diagnosis of them has been found to depend on EP level. The MIP sensor was developed by electrodeposition of starch NP-RGO composite on EQCM electrode in presence of template EP. As the imprinted sites are located on the surface, high specific surface area enables good accessibility and high binding affinity to template molecule. Differential pulse voltammetry (DPV) and piezoelectrogravimmetry were used for monitoring binding/release, rebinding of template to imprinted cavities. MIP-coated EQCM electrode were characterized by contact angle measurements, AFM images, piezoelectric responses including viscoelasticity of imprinted films, and other voltammetric measurements including direct (DPV) and indirect (using a redox probe) measurements. Selectivity was assessed by imprinting factor (IF) as high as 3.26 (DPV) and 3.88 (EQCM). Sensor was rigorously checked for selectivity in presence of other structurally close analogues, real matrix (blood plasma), reproducibility, repeatability, etc. Under optimized conditions, the EQCM-MIP sensor showed linear dynamic ranges ($1-10{\mu}M$). The limit of detection 40 ppb (DPV) and 290 ppb (EQCM) was achieved without any cross reactivity and matrix effect indicating high sensitivity and selectivity for EP. Hence, an eco-friendly MIP-sensor with high sensitivity and good selectivity was fabricated which could be applied in "real" matrices in a facile manner.