• 제목/요약/키워드: PLASMA SURFACE TREATMENT

검색결과 991건 처리시간 0.028초

저온 산화공정에 의해 낮은 Dit를 갖는 실리콘 산화막의 제조 (Preparation of the SiO2 Films with Low-Dit by Low Temperature Oxidation Process)

  • 전법주;정일현
    • 공업화학
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    • 제9권7호
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    • pp.990-997
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    • 1998
  • ECR 산소플라즈마를 이용하여 저온 확산법에 의해 서로 다른 종류의 기판에 마이크로파 출력, 기판의 위치 등을 실험변수로 실리콘 산화막을 제조하고, 열처리 전 후 물리 화학적 특성을 분석하여 Si/O 의 조성비, 산화막 표면의 morphology와 전기적 특성과의 관계를 살펴보았다. 마이크로파 출력이 높은 영역에서, 산화속도는 증가하지만 식각으로 인하여 표면조도가 증가하였다. 따라서 막내에 결함이 증가하고 기판자체에 걸리는 DC bias의 증가로 기상에 존재하는 산소 양이온이 다량 함유되어 산화막의 질이 저하되었다. 기판의 종류에 따라 기상에 존재하는 산소 양이온의 함량은 Si(100) $Si/SiO_2$계면에 존재하는 결함들은 줄일 수 있으나, 고정전하와 계면포획전하 밀도는 열처리와 무관하고 단지 기상에 존재하는 반응성 산소이온의 양과 기판자체 DS bias에 의존하였다. 마이크로파 출력이 300, 400 W인 실험조건에서 표면조도가 낮고, 계면결함밀도가 ${\sim}9{\times}10^{10}cm^{-2}eV^{-1}$$Si/SiO_2$계면에서 결함이 적은 양질의 산화막이 얻어졌다.

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제조공정에 따른 n형 Bi2Te2.85Se0.15합금의 열전성능 평가 (Effects of Various Fabrication Routes on Thermoelectric Properties of n-type Bi2Te2.85Se0.15 Alloys)

  • ;신동원;이명원;이상현;홍순직
    • 열처리공학회지
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    • 제31권3호
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    • pp.135-142
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    • 2018
  • In this study, we have fabricated n-type $Bi_2Te_{2.85}Se_{0.15}$ compounds by different processing routes such as crushing, milling and mixing respectively. Subsequently, the obtained powders were consolidated by spark plasma sintering (SPS). The phase crystallinity of bulk samples were identified using X-ray diffraction technique. Powder morphology and fracture surface of bulk samples were observed using the scanning electron microscopy (SEM). The Seebeck coefficient and electrical conductivity values were significantly increased for the milling sample than crushing and mixing samples. As a result, the maximum power factor was obtained $2.4mW/mK^2$, which is thrice than that of crushing process. The maximum figure of merit (ZT) of 0.77 was achieved at 400 K for the milling sample. Furthermore, relatively high hardness and density values were noticed for the different processed samples.

Mechanical and Chemical Characterization of NbNx Coatings Deposited by ICP Assisted DC Magnetron Sputtering

  • Jun, Shinhee;Kim, Junho;Kim, Sunkwang;You, Yong Zoo;Cha, Byungchul
    • 열처리공학회지
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    • 제27권1호
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    • pp.10-14
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    • 2014
  • Niobium nitride coatings have many potential thin film applications due to their chemical inertness, good mechanical properties, temperature stability and superconducting properties. In this study, $NbN_x$ coatings were prepared by inductively coupled plasma (ICP) assisted DC magnetron sputtering method on the surface of AISI 304 austenitic stainless steels. Effects of target power were studied on mechanical and chemical properties of the coatings. The coating structure was analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). The coating hardness was measured by micro-knoop hardness tester. The coating thickness was measured using a 3D profiler and wear characteristics were estimated using a ball-on-disk wear tester. The thickness of the $NbN_x$ coatings increased linearly from 300 nm to 2000 nm as the Nb target power increased, and it showed over $HK_{0.005}$ 4000 hardness above Nb target power of 300 W. Hexagonal ${\delta}^{\prime}$-NbN phase and cubic ${\delta}$-NbN phase were observed in the coating films and the hardness of the NbNx coatings was higher when these two peaks were mixed. The corrosion resistance increased with the increase of the Nb target power.

Effect of Microstructure on the Environmentally Induced Cracking Behavior of Al-Zn-Mg-Cu-Zr Aluminum Alloy

  • Ghosh, Rahul;Venugopal, A.;Pradeep, PI;krishna, L. Rama;Narayanan, P. Ramesh;Pant, Bhanu;Cherian, Roy M
    • Corrosion Science and Technology
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    • 제17권3호
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    • pp.101-108
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    • 2018
  • AA7010 is an Al-Zn-Mg-Cu alloy containing Zr, developed as an alternate to traditional AA7075 alloy owing to their high strength combined with better fracture toughness. It is necessary to improve the corrosion resistance and surface properties of the alloy by incorporating plasma electrolytic oxidation (PEO) method. AA7010-T7452 aluminum alloy has been processed through the forging route with multi-stage working operations, and was coated with $10{\mu}m$ thick $Al_2O_3$ ceramic aluminina coating using the plasma electrolytic oxidation (PEO) method. The corrosion, stress corrosion cracking (SCC) and nano-mechanical behaviours were examined by means of potentiodynamic polarization, slow strain rate test (SSRT) and nano-indentation tests. The results indicated that the additional thermomechanical treatment during the forging process caused a fully recrystallized microstructure, which lead to the poor environmental cracking resistance of the alloy in 3.5% NaCl solution, despite the overaging treatment. Although the fabricated PEO coating improved general corrosion resistance, the brittle nature of the coating did not provide any improvement in SCC resistance of the alloy. However, the hardness and elastic modulus of the coating were significantly higher than the base alloy.

Electrochemical Characteristics of Zn and Si Ion-doped HA Films on Ti-6Al-4V by PEO Treatment

  • Lim, Sang-Gyu;Hwang, In-Jo;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.199-199
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    • 2016
  • Commercially pure titanium (cp-Ti) and Ti alloys (typically Ti-6Al-4V) display excellent corrosion resistance and biocompatibility. Although the chemical composition and topography are considered important, the mechanical properties of the material and the loading conditions in the host have, conventionally. Ti and its alloys are not bioactive. Therefore, they do not chemically bond to the bone, whereas they physically bond with bone tissue. The electrochemical deposition process provides an effective surface for biocompatibility because large surface area can be served to cell proliferation. Electrochemical deposition method is an attractive technique for the deposition of hydroxyapatite (HAp). However, the adhesions of these coatings to the Ti surface needs to be improved for clinical used. Plasma electrolyte oxidation (PEO) enables control in the chemical com position, porous structure, and thickness of the $TiO_2$ layer on Ti surface. In addition, previous studies h ave concluded that the presence of $Ca^{+2}$ and ${PO_4}^{3-}$ ion coating on porous $TiO_2$ surface induced adhesion strength between HAp and Ti surface during electrochemical deposition. Silicon (Si) in particular has been found to be essential for normal bone and cartilage growth and development. Zinc (Zn) plays very important roles in bone formation and immune system regulation, and is also the most abundant trace element in bone. The objective of this work was to study electrochemical characteristcs of Zn and Si coating on Ti-6Al-4V by PEO treatment. The coating process involves two steps: 1) formation of porous $TiO_2$ on Ti-6Al-4V at high potential. A pulsed DC power supply was employed. 2) Electrochemical tests were carried out using potentiodynamic and AC impedance methoeds. The morphology, the chemical composition, and the micro-structure an alysis of the sample were examined using FE-SEM, EDS, and XRD. The enhancements of the HAp forming ability arise from $Si/Zn-TiO_2$ surface, which has formed the reduction of the Si/Zn ions. The promising results successfully demonstrate the immense potential of $Si/Zn-TiO_2$ coatings in dental and biomaterials applications.

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Al 분말의 수화 반응과 스파크 플라즈마 열처리법으로 제조된 알루미나 성형체 연구 (Study of Hydrolysis of Al Powder and Compaction of Nano Alumina by Spark Plasma Sintering(SPS))

  • 엄영랑;이민구;이창규
    • 한국분말재료학회지
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    • 제12권6호
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    • pp.422-427
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    • 2005
  • The $Al_2O_3$ with various phases were prepared by simple ex-situ hydrolysis and spark plasma sintering (SPS) process of Al powder. The nano bayerite $(\beta-Al(OH)_3)$ phase was derived by hydrolysis of commercial powder of Al with micrometer size, whereas the bohemite (AlO(OH)) phase was obtained by hydrolysis of nano Al powder synthesized by pulsed wire evaporation (PWE) method. Compaction as well as dehydration of both nano bayerite and bohemite was carried out simultaneously by SPS method, which is used to fabricate dense powder compacts with a rapid heating rate of $100^{\circ}C$ per min. under the pressure of 50MPa. After compaction treatment in the temperature ranges from $100^{\circ}C\;to\; 1100^{\circ}C$, the bayerite and bohemite phases change into various alumina phases depending on the compaction temperatures. The bayerite shows phase transition of $Al(OH)_3{\to}{\eta}-Al_2O_3{\to}{\theta}-Al_2O_3{\to}\alpha-Al_2O_3$ sequences. On the other hand, the bohemite experiences the phase transition from AlO(OH) to ${\gamma}-Al_2O_3\;at\;350^{\circ}C.$ It shows AlO(OH) ${\gamma}-Al_2O_3{\to}{\delta}-Al_2O_3{\to}{\alpha}-Al_2O_3$ sequences. The ${\gamma}-Al_2O_3$ compacted at $550^{\circ}C$ shows a high surface area $(138m^2/g)$.

유도결합 플라즈마 화학기상증착법에 의해 활성화된 탄소원자를 이용한 Ni/SiO2/Si 기판에서 그래핀 성장 (Graphene Formation on Ni/SiO2/Si Substrate Using Carbon Atoms Activated by Inductively-Coupled Plasma Chemical Vapor Deposition)

  • 람반낭;김의태
    • 한국재료학회지
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    • 제23권1호
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    • pp.47-52
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    • 2013
  • Graphene has been synthesized on 100- and 300-nm-thick Ni/$SiO_2$/Si substrates with $CH_4$ gas (1 SCCM) diluted in mixed gases of 10% $H_2$ and 90% Ar (99 SCCM) at $900^{\circ}C$ by using inductively-coupled plasma chemical vapor deposition (ICP-CVD). The film morphology of 100-nm-thick Ni changed to islands on $SiO_2$/Si substrate after heat treatment at $900^{\circ}C$ for 2 min because of grain growth, whereas 300-nm-thick Ni still maintained a film morphology. Interestingly, suspended graphene was formed among Ni islands on 100-nm-thick Ni/$SiO_2$/Si substrate for the very short growth of 1 sec. In addition, the size of the graphene domains was much larger than that of Ni grains of 300-nm-thick Ni/$SiO_2$/Si substrate. These results suggest that graphene growth is strongly governed by the direct formation of graphene on the Ni surface due to reactive carbon radicals highly activated by ICP, rather than to well-known carbon precipitation from carbon-containing Ni. The D peak intensity of the Raman spectrum of graphene on 300-nm-thick Ni/$SiO_2$/Si was negligible, suggesting that high-quality graphene was formed. The 2D to G peak intensity ratio and the full-width at half maximum of the 2D peak were approximately 2.6 and $47cm^{-1}$, respectively. The several-layer graphene showed a low sheet resistance value of $718{\Omega}/sq$ and a high light transmittance of 87% at 550 nm.

돼지 지방세포 원형질막 단백질에 대한 다클론항체의 생산 및 이용에 관한 연구 (Studies on the Development and Utilization of Polyclonal Antibodies Against Swine Adipocyte Plasma Membrane Proteins)

  • 백경훈;곽태효;오영숙;최창원;정근기;최창본
    • Journal of Animal Science and Technology
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    • 제47권1호
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    • pp.19-28
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    • 2005
  • The objectives of the current study were to develop polyclonal antibodies in sheep against adipocyte plasma membrane(APM) proteins isolated from swine, to investigate tissue specificity, and to determine cytotoxic effects of antiserum on swine adipocytes. Plasma membrane proteins from adipocyte, brain, heart, kidney, liver, and spleen were isolated using a 32% sucrose gradient. Adult male sheep was immunized three times at three week interval with the purified swine APM proteins. Antiserum was taken from immunized sheep at 10, 12, and 14 days after the third immunization. Antiserum expressed strong reactivity with APM proteins determined by enzyme-linked immunosorbent assay(ELISA), and the reactivity could be detected at dilutions in excess of 1 : 81,000. Antiserum showed very low binding affinity with proteins isolated from brain, heart, kidney, liver, or spleen. Tissue specificity of the antiserum was reconfirmed by Western immunoblotting using anti-sheep immunoglobulin G•alkalinephosphatase conjugate as a secondary antibody. The reactivity of antiserum to the external surface of fixed swine adipocytes was confmned by an immunohistochemical technique using anti-sheep immunoglobulin G-FITC. Confluent swine adipocytes in culture were lysed by antiserum treatment and cytosolie lactate dehydrogenase(LDH) was released as a dose-dependent patterns while adipocytes treated with normal sheep serum maintained their integrity and expressed low level of LDH. These results implicate that fat contents in the pigs can be reduced by immunological methods.

대기압 유전체배리어방전 플라즈마를 이용한 형광체 분말 코팅 (Surface Coating Treatment of Phosphor Powder Using Atmospheric Pressure Dielectric Barrier Discharge Plasma)

  • 장두일;임태헌;쿠앙 흥 트린;조진오;목영선;이상백;헨리 J. 라모스
    • 공업화학
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    • 제25권5호
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    • pp.455-462
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    • 2014
  • 유러퓸-활성화 스트론튬 오쏘실리케이트($Sr_2SiO_4:Eu^{2+}$) 황색 형광체 분말의 소수성 코팅을 위하여 상압 유전체배리어 방전 플라즈마가 사용되었다. 전구물질은 헥사메틸다이실록세인(HMDSO), 톨루엔 및 n-헥세인이었으며, 운반기체는 아르곤이었다. 엑스선 회절분석 결과 플라즈마 코팅 처리 후에도 오쏘실리케이트의 격자구조는 변화가 없는 것으로 나타났다. 플라즈마 코팅된 형광체 분말의 특성은 주사전자현미경, 형광분광광도계, 접촉각 분석을 통해 조사되었다. HMDSO를 사용한 형광체 분말의 소수성 코팅시 물 접촉각은 $21.3^{\circ}$ (코팅 전)에서 $139.5^{\circ}$ (최대 $148.7^{\circ}$)로 증가되었고, 글리세롤 접촉각은 $55^{\circ}$ (코팅 전)에서 $143.5^{\circ}$ (최대 $145.3^{\circ}$)로 증가되었는데, 이 결과는 형광체 분말 표면에 소수성 박막 층이 잘 형성되었음을 나타낸다. 퓨리에변환적외선분광기 및 엑스선광전자분광기를 이용한 표면분석을 통해서도 형광체 분말에 소수성 박막 층이 잘 형성되어 있음을 알 수 있었다. HMDSO를 사용한 소수성 코팅 후 형광체의 광발광 효율이 증가하는 것으로 나타났으나, 톨루엔과 n-헥세인을 전구물질로 사용했을 때는 광발광 효율이 다소 저하되었다. 본 연구의 결과는 유전체배리어방전 플라즈마가 분말 형태인 형광체의 코팅에 이용될 수 있는 실용적인 방법임을 나타낸다.

스트레인 게이지를 이용한 적층방법에 따른 복합레진의 중합수축에 관한 연구 (A STUDY OF POLYMERIZATION SHRINKAGE OF COMPOSITE RESIN ACCORDING TO FILLING METHODS USING STRAIN GAUGE)

  • 김응학;김종수;유승훈
    • 대한소아치과학회지
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    • 제35권1호
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    • pp.18-29
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    • 2008
  • 본 연구는 복합레진 적층방법에 따른 복합레진의 수축양상을 스트레인 게이지를 이용하여 비교 평가하고자 하였다. 사용된 광중합기의 광원은 light-emitting diode(LED)와 plasma arc lamp(PAL)이었으며, 복합레진은 Filtek $Z350^{TM}$를 사용하였다. 교정 치료를 목적으로 발거된 60개의 소구치를 대상으로 하여, 교합면에 와동을 형성하고 일회충전법, 수평적층법, 사면적층법으로 나누어 복합레진을 충전하여 치면에 발생된 strain과 응력을 측정하였고, 법랑질 표면에 시편을 부착하여 동일한 적층방법으로 충전한 후 전단결합강도를 측정한 결과 다음과 같은 결론을 얻었다. 1. Strain의 변화를 살펴보면, LED와 PAL 조사군 모두 와동의 협설면에서는 주로 팽창이 일어났다가 시간이 지남에 따라 서서히 수축하는 양상을 보여주었다. 2. 와동의 근원심면에서는 팽창과 수축이 반복적으로 나타나면서 서서히 수축량이 증가하였다. 3. LED와 PAL 조사군 모두 적층방법 간의 응력 차이는 없었다(p>0.05). 4. LED 및 PAL 조사군 간의 응력 차이는 협면에서만 존재하였다(p<0.05). 5. 전단결합강도 측정 결과 LED 군에서는 사면적층법이 일회충전법, 수평적층법 보다 유의하게 낮게 나타났으나(p<0.05), PAL 광조사군에서는 유의차가 없었다(p>0.05). 6. 각 치면에 발생된 응력은 전단결합강도보다 낮았다(p<0.05).

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