Mechanical and Chemical Characterization of NbNx Coatings Deposited by ICP Assisted DC Magnetron Sputtering |
Jun, Shinhee
(School of Materials Science and Engineering, University of Ulsan)
Kim, Junho (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) Kim, Sunkwang (School of Materials Science and Engineering, University of Ulsan) You, Yong Zoo (School of Materials Science and Engineering, University of Ulsan) Cha, Byungchul (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) |
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