• 한국재료학회지
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• 제2권1호
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• pp.76-82
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• 1992

$TEOS-O_3$ 산화막은 깔개층 물질에 따라 증착속도가 변하는 특성을 나타낸다. 본 논문에서는 $TEOS-O_3$ 산화막의 깔개층 물질 의존성 이외에도 배선 밀도, 배선 간격에 따라 증착속도가 달라지는 패턴 의존성에 대하여 조사하였다. 또한 $TEOS-O_3$ 산화막의 깔개층 물질 의존성 및 패턴 의존성을 줄이기 위해 다층 배선에서 1차 배선후에 깔개층, 즉 TEOS-base 프라즈마 산화막 및 $SiH_4-base$ 프라즈마 산화막을 증착했을 때 $TEOS-O_3$ 산화막의 증착 특성을 조사하였다. 그리고 그 깔개층 물질에 $N_2$ 프라즈마 처리를 했을 때 $TEOS-O_3$ 산화막의 증착 특성에 대해 조사하였다. 그 결과 $TEOS-O_3$ 산화막에서 기판 위에 배선 밀도와 배선 간격에 따른 의존성은 깔개층물질이 $SiH_4-base$ 일때보다 TEOS-base 프라즈마 산화막인 경우 $N_2$ 프라즈마 처리를 하면 깔개층 물질 표면이 O-Si-N화 되므로써 의존성이 사라지게 된다.

• 한국인터넷방송통신학회논문지
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• 제20권3호
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• pp.135-140
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• 2020

반도체 공정에서 필수적인 공정가스가 유해가스이기 때문에 이를 친환경적으로 해결하는 것이 필수과제이다. 현재 반도체 공정에서 사용되는 세정기술은 대부분이 1970년대 개발된 과산화수소를 근간으로 하는 습식 세정으로, 표면의 입자를 제거하기 위한 SC-1 세정액은 암모니아와 과산화수소 혼합액을 사용하고 있다. 따라서 환경적 문제를 유발하며, 또한 과도한 용수 사용으로 인한 경제적 문제도 심각하다. 이러한 이유로 본 연구를 통한 개발 제품은 챔버 출구에서 나오는 공정 유해가스를 진공펌프에 입력되기 전 가스를 분해하여 해가 없는 가스로 만들거나 소각과 동시에 펌프에 가스의 성분이 증착되어 반도체 공정의 환경적 문제를 해결하고자 한다. 본 논문에서는 반도제 공정에서 필수 불가결하게 사용되는 유해가스(N2, CF4, SF6⋯. 등)를 사람에게 무해한 가스로 치환하거나 플라스마로 소각하여 환경을 살리고 생산성 향상이 되도록 제안된 CPS (Confined Plasma Source)를 연구하고자 한다.

• Current Photovoltaic Research
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• 제2권3호
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• pp.120-123
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• 2014

Thermal doping method using furnace is generally used for solar-cell wafer doping. It takes a lot of time and high cost and use toxic gas. Generally selective emitter doping using laser, but laser is very high equipment and induce the wafer's structure damage. In this study, we apply atmospheric pressure plasma for solar-cell wafer doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (1 kHz ~ 100 kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer (120 ohm/square). SIMS (Secondary Ion Mass Spectroscopy) are used for measuring wafer doping depth and concentration of phosphorus. We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.75-75
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• 2018

Commercially pure titanium (CP-Ti) and Ti-6Al-4V alloys have been widely used in implant materials such as dental and orthopedic implants due to their corrosion resistance, biocompatibility, and good mechanical properties. However, surface modification of titanium and titanium alloys is necessary to improve osseointegration between implant surface and bone. Especially, when titanium oxide nanotubes are formed on the surface of titanium alloy, cell adhesion is greatly improved. In addition, plasma electrolytic oxide (PEO) coatings have a good safety for osseointegration and can easily and quickly form coatings of uniform thickness with various pore sizes. Recently, the effects of bone element such as magnesium, zinc, strontium, silicon, and manganese for bone regeneration are researching in dental implant field. The purpose of this study was researched on the surface morphology of PEO-treated Ti-6Al-4V alloy after anodic titanium oxide treatmentusing various instruments. Ti-6Al-4V ELI disks were used as specimens for nanotube formation and PEO-treatment. The solution for the nanotube formation experiment was 1 M $H_3PO_4$ + 0.8 wt. % NaF electrolyte was used. The applied potential was 30V for 1 hours. The PEO treatment was performed after removing the nanotubes by ultrasonics for 10 minutes. The PEO treatment after removal of the nanotubes was carried out in the $Ca(CH_3)_2{\cdot}H_2O+(CH_3COO)_2Mg{\cdot}4H_2O+Mn(CH_3COO)_2{\cdot}4H_2O+Zn(CH_3CO_2)_2Zn{\cdot}2H_2O+Sr(CH_2COO)_2{\cdot}0.5H_2O+C_3H_7CaO_6P$ and $Na_2SiO_3{\cdot}9H_2O$ electrolytes. And the PEO-treatment time and potential were 3 minutes at 280V. The morphology changes of the coatings on Ti-6Al-4V alloy surface were observed using FE-SEM, EDS, XRD, AFM, and scratch tester. The morphology of PEO-treated surface in 5 ion coating solution after nanotube removal showed formation or nano-sized mesh and micro-sized pores.

• 한국표면공학회지
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• 제56권6호
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• pp.401-411
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• 2023

This study investigates the synthesis, characterization, and application of zinc oxide (ZnO) nanoparticles for corrosion resistance and stress corrosion cracking (SCC) mitigation in high-temperature and high-pressure environments. The ZnO nanoparticles are synthesized using plasma discharge in water, resulting in rod-shaped particles with a hexagonal crystal structure. The ZnO nanoparticles are applied to Alloy 600 tubes in simulated nuclear power plant atmospheres to evaluate their effectiveness. X-ray diffraction and X-ray photoelectron spectroscopy analysis reveals the formation of thermodynamically stable ZnCr₂O₄and ZnFe₂O₄ spinel phases with a depth of approximately 35 nm on the surface after 240 hours of treatment. Stress corrosion cracking (SCC) mitigation experiments reveal that ZnO treatment enhances thermal and mechanical stability. The ZnO-treated specimens exhibit increased maximum temperature tolerance up to 310 ℃ and higher-pressure resistance up to 60 bar compared to non-treated ZnO samples. Measurements of crack length indicate reduced crack propagation in ZnO-treated specimens. The formation of thermodynamically stable Zn spinel structures on the surface of Alloy 600 and the subsequent improvements in surface properties contribute to the enhanced durability and performance of the material in challenging high-temperature and high-pressure environments. These findings have significant implications for the development of corrosion-resistant materials and the mitigation of stress corrosion cracking in various industries.

• 열처리공학회지
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• 제11권2호
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• pp.99-110
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• 1998

The effects of pre-heat treatment(Q/T) on microstructure and hardness of SCM435 structural steel nitrided by micro-pulse plasma was investigated. The quenching and tempering temperatures for obtaining matrix hardness of SCM435 steel on range of HRC30 to HRC40 desired for machine parts were about $860^{\circ}C$ and $500^{\circ}C$ respectively. The case depth of SCM435 nitrided at $480^{\circ}C$ for 5 hours was independent of pre-heat treatment condition and was approximately $150{\mu}m$. However, hardness and compactness of nitrified layer on Q/T treated specimen were more heigher than annealed specimen. The case depth increased linearly with the increase of nitriding temperature, however, the hardness of nitrified layer decreased with the temperature. Phase mixture of ${\gamma}^{\prime}$-phase($Fe_4N$) and ${\varepsilon}$-phase($Fe_3N$) were detected by XRD analysis in the nitrified layer formed at optimum nitriding condition, and only single ${\gamma}^{\prime}$-phase was detected in the nitrified layer formed at higher nitriding temperature such as $540^{\circ}C$. The optimum nitriding temperature was approximately $480^{\circ}C$ which is lower than tempering temperature for preventing softening behavior of SCM435 matrix during nitriding process and the surface hardness of nitrified layer obtained by optimum preheat treatment condition was about Hv930.

• 한국진공학회지
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• 제19권1호
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• pp.10-13
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• 2010

본 논문은 N-face n-type GaN 표면에 산소 플라즈마 처리에 의해서 오믹전극과 접촉 저항을 낮추기 위한 연구를 하였다. 120초 산소 플라즈마 처리후 Ti (50 nm) / Al (35 nm)을 증착한 결과 오믹 전극을 구현하였으며, $1.25{\times}10^{-3}\;{\Omega}cm^2$의 접촉저항을 보였다. 이는 산소 플라즈마 처리가 기존의 플라즈마 처리와 같이 질소결원이 발생하였기 때문이다. 이를 통해 쇼트키장벽 높이(SBH)이 낮아지게 되었고, 오믹 전극및 플라즈마 처리를 안 한 경우보다 더 낮은 접촉저항의 결과를 획득하였다.

• 한국응용과학기술학회지
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• 제24권3호
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• pp.264-271
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• 2007

Effect of dispersion methods for Vapor Grown Carbon Fibers (VGCF) in epoxy caused the change in mechanical properties of VGCF/epoxy nanocomposites, such as tensile modulus and tensile strength. The influence of VGCF types - atmospheric plasma treated (APT) VGCF and raw VGCF - and their contents was discussed in detail. Treating VGCF with atmospheric plasma enhanced the surface energy, therefore improved the bonding strength with epoxy matrix. Two different methods used to disperse VGCF were ultrasonic and mechanical homogenizer methods. When using dispersion solutions, the VGCF demonstrated good dispersion in ethanol in both homogenizer and ultrasonic method. The uniform dispersion of VGCF was investigated by scanning electron microscopy (SEM) which showed well-dispersion of VGCF in epoxy matrix. The tensile modulus of raw VGCF/epoxy nanocomposites obtained by ultrasonic method was higher than that of one obtained by homogenizer method. APT VGCF/epoxy nanocomposites showed higher tensile strength than that of raw VGCF/epoxy nanocomposites.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.103-105
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• 2005

The importance of protecting people from harsh weather conditions cannot be over-emphasized and the way to. do so should be sought vigorously. The most well known and widely used weather protection fabric in the current industry is $Gor-Tex.^1$ However, the Gore-Tex membrane cannot be attached to cotton or other natural fibers so it's use is not suitable for clothing such as underwear. If the exterior of cotton fabric can be made to be hydrophobic without sacrificing the comfort and breathability, the result will be a cotton fabric with the weather protection capability equivalent to Gore-Tex as well as the ability to provide the best wear comfort. However, this should be done without using toxic and expensive gases to be environmentally friendly and cost effective. Therefore, our approach for hydrophobic treatments of fabric and metal surfaces is to utilize a plasma-based technique. In general, plasma processes do not produce chemical wastes or waste disposal problems and they are fully automated.

• 한국재료학회지
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• 제27권10호
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• pp.563-568
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• 2017

In this study, the coating of an Al-Cr layer on the surface of a Zircaloy-4 alloy was carried out through plasma pretreatment coating and a laser surface melting process. Two different conditions for laser treatment, severe or minimal surface melting of the Zr alloy substrate, were applied to form the final coating. When there was significant surface melting of the Zr alloy, the solidification microstructure of the newly formed coating layer was mainly composed of needle-shaped $Al_3Zr$, Al(Cr) and $Al_7Cr$ phases. On the other hand, the solidification microstructure of the coating layer was mainly composed of Al(Cr) and $Al_7Cr$ phases when there was minimal surface melting of Zr base in the laser process. However, when the coating was maintained at $1100^{\circ}C$ for 2 hours, significant inter-diffusion occurred between the phases in the coating. As a result, the upper part of the coating layer was observed to mainly consist of $Al_3Zr$ and $Al_8Cr_5$ phases, regardless of the laser treatment conditions.