Study of Oxygen Plasma Effects to Reduce the Contact Resistance of n-type GaN with Nitrogen Polarity
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Nam, T.Y.
(Dept. of Electronics Eng., Korea Univ.)
Kim, D.H. (Dept. of Electronics Eng., Korea Univ.) Lee, W.H. (Dept. of Electronics Eng., Korea Univ.) Kim, S.J. (Dept. of Electronics Eng., Korea Univ.) Lee, B.G. (Dept. of Electronics Eng., Korea Univ.) Kim, T.G. (Dept. of Electronics Eng., Korea Univ.) Jo, Y.C. (Dept. Medical IT Convergence Center, Korea Electronics Technology Institute) Choi, Y.S. (Dept. Medical IT Convergence Center, Korea Electronics Technology Institute) |
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