• 한국항공우주학회지
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• 제34권6호
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• pp.35-41
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• 2006

본 논문에서는 무밸브 마이크로펌프에 사용되는 압전 다이아프램의 성능을 향상시키는 방법이 연구되었다. 큰 작동 변위와 작동력을 가지는 원형 형태의 경량 압전 복합재료 작동기(LIPCA)를 마이크로 펌프용으로 제작하였다. 유한요소 해석과 실험을 통하여 원형 LIPCA의 성능을 예측하여 최적의 적층 형태를 설계하였다. 최적의 원형 LIPCA를 기반으로 포토리소그라피법과 PDMS 몰딩법을 사용하여 무밸브 마이크로 펌프를 제작하였다. 압전 다이아프램의 작동 변위 및 마이크로 펌프의 유량과 배압을 실험적으로 계측하였고, 반경험식을 사용하여 예측한 유량과 비교하였다. 이상의 연구에서 원형 LIPCA가 마이크로 펌프용으로 사용되는 보통의 압전 작동 다이아프램을 대체할 수 있는 우수한 작동기임을 확인할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1224-1226
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• 2003

In this work, we developed a high resolution printing technique based on transferring a pattern from a PDMS stamp to a Pd and Au substrate by microcontact printing Also, we fabricated various 2D metallic and polymeric nano patterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (${\mu}$CP) based on soft lithography. Silicon masters for the micro molding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. From this work, it is certificated that composite PDMS mold and undercutting technique play an important role in the generation of a clear SAM nanopattern on Pd and Au substrate.

• 센서학회지
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• 제17권5호
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• pp.375-379
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• 2008

This paper reports a new fabrication method of polydimethylsiloxane (PDMS) microlenses with various curvatures by using a water-based mold. The hydrophobic surface of Polypropylene (PP) substrate was modified by corona discharge using tesla coil to have hydrophilic surface. Then hydrophilic surface of PP substrate takes hydrophobic recovery to have various contact angles from less than $25^{\circ}$ to about $84^{\circ}$. By using the water droplets with various contact angles as replica molds for PDMS process, we could obtain PDMS microlenses with various curvatures.

• 센서학회지
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• 제22권5호
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• pp.352-356
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• 2013

We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.

• 대한전자공학회논문지SD
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• 제46권4호
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• pp.15-20
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• 2009

레이저 광 산란을 이용한 검출 시스템 및 레이저를 이용한 광학적 검출에 있어서 높은 발광 강도를 통해 궁극적으로 높은 효율의 광 산란 신호를 광검출기에서 얻기 위해서는 발광 레이저빔을 미세유체 칩의 채널 중앙에 집광하는 것이 매우 중요하다. 본 논문을 통해 레이저 광 산란을 이용한 세포 검출을 위해 PDMS 마이크로렌즈가 집적화된 PDMS 미세유체 칩을 소개하고자 한다. 기존에 제작된 PDMS 미세유체 칩 위에 간편히 정렬하여 올려놓아 사용함으로써 검출 효율을 증가시킬 수 있는 PDMS 마이크로렌즈를 제작하였다. PDMS 마이크로렌즈는 포토레지스트 리플로우와 PDMS 복제 몰딩에 의해 제작되었다. 이 제작 방법은 간단하며 높은 치수 정확성 및 좋은 마이크로렌즈의 성능을 제공한다. PDMS 미세유체 칩 위에 집적화된 PDMS 마이크로렌즈가 적혈구를 이용한 레이저 광 산란을 통한 세포 검출 실험에서 레이저 강도를 증가시켜 신호대잡음비 및 감도를 증가시킴을 검증하였다.

• 대한기계학회논문집A
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• 제28권7호
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• pp.999-1005
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• 2004

A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.351-354
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• 2004

This work presents a simple and cost-effective approach for maskless fabrication of positive-tone silicon master for the replica molding of hyperfine elastomeric channel. Positive-tone silicon masters were fabricated by a maskless fabrication technique using the combination of nanoscratch by Nanoindenter ⓡ XP and XOH wet etching. Grooves were machined on a silicon surface coated with native oxide by ductile-regime nanoscratch, and they were etched in a 20 wt％ KOH solution. After the KOH etching process, positive-tone structures resulted because of the etch-mask effect of the amorphous oxide layer generated by nanoscratch. The size and shape of the positive-tone structures were controlled by varying the etching time (5, 15, 18, 20, 25, 30 min) and the normal loads (1, 5 mN) during nanoscratch. Moreover, the effects of the Berkovich tip alignment (0, 45$^{\circ}$) on the deformation behavior and etching characteristic of silicon material were investigated.

• 센서학회지
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• 제21권2호
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• pp.121-126
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• 2012

Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{\mu}m$ and $190{\mu}m$, respectively. The gap between sensing elements is only $10{\mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{\mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.676-679
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• 2005

Nano imprint Lithography (NIL) is regarded as one of the next-generation lithography technologies with EUV lithography, immersion lithography, Laser interference lithography. Because a Si wafer stamp and a quartz stamp, used to imprinting usually are very expensive and easily broken, it is suggested that master stamp is duplicated by PDMS and the PDMS stamp uses to imprint .For using the PDMS stamp, a thermally curable monomer resin was used for the imprinting process to lower pressure and temperature. As a result, NIL patterns were successfully fabricated.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.274.2-274.2
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• 2013

We described a simple and efficient fabrication method for generating microfluidic channels with a circular-cross sectional geometry by exploiting the reflow phenomenon of a thick positive photoresist. Initial rectangular shaped positive photoresist micropatterns on a silicon wafer, which were fabricated by a conventional photolithography process, were converted into a half-circular shape by tuning the temperature to around $105^{\circ}C$. Through optimization of the reflow conditions, we could obtain a perfect circular micropattern of the positive photoresist, and control the diameter in a range from 100 to 400 ${\mu}m$. The resultant convex half-circular photoresist was used as a template for fabricating a concave polydimethylsiloxane (PDMS) through a replica molding process, and a circular PDMS microchannel was produced by bonding two half-circular PDMS layers. A variety of channel dimensions and patterns can be easily prepared, including straight, S-curve, X-, Y-, and T-shapes to mimic an in vivo vascular network. To inform an endothelial cell layer, we cultured primary human umbilical vein endothelial cells (HUVECs) inside circular PDMS microchannels, and demonstrated successful cell adhesion, proliferation, and alignment along the channel.