Browse > Article
http://dx.doi.org/10.5369/JSST.2008.17.5.375

Fabrication method of PDMS microlensesusing water-based molding method  

Kim, Hong-Ki (Department of Electronic Engineering, Sogang University)
Yun, Kwang-Seok (Department of Electronic Engineering and Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Publication Information
Journal of Sensor Science and Technology / v.17, no.5, 2008 , pp. 375-379 More about this Journal
Abstract
This paper reports a new fabrication method of polydimethylsiloxane (PDMS) microlenses with various curvatures by using a water-based mold. The hydrophobic surface of Polypropylene (PP) substrate was modified by corona discharge using tesla coil to have hydrophilic surface. Then hydrophilic surface of PP substrate takes hydrophobic recovery to have various contact angles from less than $25^{\circ}$ to about $84^{\circ}$. By using the water droplets with various contact angles as replica molds for PDMS process, we could obtain PDMS microlenses with various curvatures.
Keywords
PDMS; microlens; contact angle; surface modification;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 정귀상, 우형순, "PDMS 몰드를 이용한 초고온 MEMS용 SiCN 미세구조물 제작과 그 특성", 센서 학회지, 제15권, 제1호, pp. 53-7, 2006   과학기술학회마을   DOI
2 S. Park, Y. Jeong, J. Kim, K. Choi, H.C. Kim, D.S. Chung and K. Chun, "Fabricaton of poly (dimethyl- siloxane) microlens for laser-induced fluorescence detection", Jpn. J. Appl. Phys., vol. 45, no. 6B, pp. 5614-5617, 2006   DOI
3 윤광석, "바이오 멤스 및 마이크로 시스템 적용을 위 한 3차원 마이크로 유로 제작", 센서학회지, 제15권, 제5호, pp. 357-361, 2006   과학기술학회마을   DOI
4 M.-K. Wei and I-L. Su, "Method to evaluate the enhancement of luminance efficiency in planar OLED light emitting devices for microlens array",Optics Express, vol. 12, no. 23, pp. 5777-5782, 2004   DOI
5 O.J. Cayre and V.N. Paunov, "Fabrication of microlens arrays by gel trapping of self-assembled particle monolayers at the decane-water interface", J. Mater. Chem., vol. 14, pp. 3300-3302, 2004   DOI   ScienceOn
6 S.-H. Chao, R. Carlsonb, and D.R. Meldrum, "apid fabrication of microchannels using microscale plasma activated templating ($\mu$PLAT) generated water molds", Lab Chip, vol. 7, pp. 641-643, 2007   DOI   ScienceOn
7 J. Karger-Kocsis, Polypropylene An A-Z reference, Kluwer Academic Publishers, Dordrecht, pp. 800-805, 1999
8 J. Chen, W. Wang, J. Fang, and K. Varahramyan, "Variable-focusing microlens with microfluidic chip", J. Micromech. Microeng., vol. 14, no. 5, pp. 675-680, 2004   DOI   ScienceOn
9 S.-I. Chang and J.-B. Yoon, "Shape-controlled high fill-factor microlens arrays fabricated with a 3D diffuser lithography and plastic replication method", Optics Express, vol. 12, no. 25, pp. 6366-6371, 2004   DOI
10 M.-H. Wu and G.M. Whitesides, "Fabrication of two-dimensional arrays of microlenses and their applications in photolithography", J. Micromech. icroeng., vol. 12, no. 6, pp. 747-758, 2002   DOI   ScienceOn
11 H.J. Nam, D.-Y. Jung, G.-R. Yi and H. Choi, "Close- packed hemispherical microlens array from two-dimensional ordered polymeric microspheres", Langmuir, vol. 22, pp. 7358 -7363, 2006   DOI   ScienceOn
12 T.-K. Shih, C.-F. Chen, J.-R. Ho, and F.-T. Chuang, "Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding", Microelectronic Engineering, vol. 83, no. 11-12, pp. 2499-2503, 2006   DOI   ScienceOn