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http://dx.doi.org/10.5139/JKSAS.2006.34.6.035

Development of Micropump using Circular Lightweitht Piezo-composite Actuator  

구옌탄텅 (건국대학교)
구남서 (건국대학교)
Publication Information
Journal of the Korean Society for Aeronautical & Space Sciences / v.34, no.6, 2006 , pp. 35-41 More about this Journal
Abstract
In this paper, we focus on improving the performance of the piezoelectric diaphragms of valveless micropumps. A circular lightweight piezoelectric composite actuator (LIPCA) with a high level of displacement and output force has been developed for piezoelectrically actuated micropumps. We used numerical and experimental methods to analyze the characteristics of the actuator to select optimal design. With the developed circular LIPCA, we fabricated a valveless micropump by photo-lithography and PDMS molding techniques. The displacement of the diaphragm, the flow rate and the back pressure of the micropump were evaluated and discussed. With a semi-empirical method, the flow rate with respect to driving frequency was predicted and compared with experimental one. The test results confirm that the circular LIPCA is a promising candidate for micropump application and can be used as a substitute for a conventional piezoelectric actuator diaphragm.
Keywords
Valveless micropump; Circular LIPCA; Photo-lithography법; PDMS molding techniques;
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