• Applied Science and Convergence Technology
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• 제24권3호
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• pp.53-59
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• 2015

The field-effect transistors (FETs) with a graphene-based p-n junction channel were fabricated using the patterned self-assembled monolayers (SAMs). The self-assembled 3-aminopropyltriethoxysilane (APTES) monolayer deposited on $SiO_2$/Si substrate was patterned by hydrogen plasma using selective coating poly-methylmethacrylate (PMMA) as mask. The APTES-SAMS on the $SiO_2$ surface were patterned using selective coating of PMMA. The APTES-SAMs of the region uncovered with PMMA was removed by hydrogen plasma. The graphene synthesized by thermal chemical vapor deposition was transferred onto the patterned APTES-SAM/$SiO_2$ substrate. Both p-type and n-type graphene on the patterned SAM/$SiO_2$ substrate were fabricated. The graphene-based p-n junction was studied using Raman spectroscopy and X-ray photoelectron spectroscopy. To implement low voltage operation device, via ionic liquid ($BmimPF_6$) gate dielectric material, graphene-based p-n junction field effect transistors was fabricated, showing two significant separated Dirac points as a signature for formation of a p-n junction in the graphene channel.

• 태양에너지
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• 제8권1호
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• pp.68-73
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• 1988

In the glass/TCO/p-i-n a-Si/Al type of amorphous silicon solar cell, the effects on solar cell efficiency and metastability for the various kinds of TCO analyzed by SAM and ESCA, which was used to measure the diffusion profiles of In and Sn and the Fermi energy shifts in the TCO/p interface respectively. Indium which diffused into a-Si p-layer did not have any significant effects on the Fermi level shift of p-layer when the content of $B_2H_6/SiH_4$ in p-layer was at 1 gas%. The cell fabricated on $SnO_2$ turned out to have the best cell photovoltaic characteristics. ITO fabricated by electron beam deposition system, which was shown to have the greatest rate of diffusion of Indium in ITO/p interface produced the worst metastability among the cells tested.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1526-1528
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• 2003

본 연구에서는 P-type Si wafer에 1000[$^{\circ}C$]의 조건에서 열산화방식으로 성장시킨 산화막($SiO_2$) 두께 3000[${\AA}$] 그 위에 APCVD방법으로 형성시킨 질화막($Si_3N_4$)의 두께 500[${\AA}$], 1500[${\AA}$]인 시료에 대하여 전기적 특징 중 유전정접 특성에 관하여 조사하였다. [1] 또한 각각의 두께에 대하여 측정 온도범위 상온${\sim}150[^{\circ}C]$ 와 인가전압 범위 1[V]${\sim}$20[V]에서 유전정접의 주파수 의존성과 온도 의존특성을 조사하고 특히 정전용량 변화에 따른 유전특성에 대하여 조사하고 변환기 소자재료 개발을 위한 기초물성을 실험한 결과를 보고한다.

• 반도체디스플레이기술학회지
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• 제16권2호
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• pp.9-14
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• 2017

$ISnO_2$ thin films were prepared on p-type and n-type Si substrates to research the interface characteristics between $SnO_2$ and substrate. After the annealing processes, the amorphous structure was formed at the interface to make a Schottky contact. The O 1s spectra showed the bond of 530.4 eV as an amorphous structure, and the Schottky contact. The analysis by the deconvoluted spectra was observed the drastic variation of oxygen vacancies at the amorphous structure because of the depletion layer is directly related to the oxygen vacancy. $SnO_2$ thin film changed the electrical properties depending on the characteristics of substrates. It was confirmed that it is useful to observe the Schottky contact's properties by complementary using the XPS analysis and I-V measurement.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 제5회 영호남 학술대회 논문집
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• pp.63-66
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• 2003

To diffuse Zn at solid-state, the $SiO-2$/ZnO/$SiO_2$ wafers was made by PECVD and RF Sputter. Thicknesses of bottom $SiO_2$ and cap $SiO_2$ was about 500 ${\AA}$ and about 3500 ${\AA}$. Diffusion temperatures were $760^{\circ}C$, $780^{\circ}C$, and $800^{circ}C$, and diffusion times were 1, 2, 3, 4, 5, and 6 hr. LED chips were fabricated by the diffused wafers at Fab. The peak wavelength of all chips showed about 625~650 nm and red color. Main reason for Iv change was by diffusion temperature not diffusion time. The lower temperature was the higher Iv. We thick that these properties is because of the very high diffusion temperature.

• 한국전기전자재료학회논문지
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• 제16권7호
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• pp.557-563
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• 2003

SiC has been an useful material for the high voltage, high temperature, and high frequency devices, however, the required high process temperature to activate the implanted p-type dopants has hindered further developments. In this study, we report, for the first time, on the laser activation of implanted Al and non-alloyed Mo ohmic contacts and its application to MOSFET fabrication. The contact and sheet resistance measured from CTLM patterns have decreased by increasing laser power, and the lowest values are 3.9 $K\Omega$/$\square$ and 1.3 $\times$ 10$^{-3}$ $\Omega$-cm$^2$, respectively, at the power density of 1.45 J/cm$^2$ The n-MOSFETs fabricated on laser activated p-well exhibit well-behaved I-V characteristics and threshold voltage reduction by reverse body voltage. These results prove that the laser process for implant activation is an alternative low temperature technology applicable to SiC devices.

• 한국광물학회지
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• 제30권2호
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• pp.59-70
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• 2017

$SiO_2$는 지각과 맨틀을 구성하는 풍부한 물질로 고압 상태의 $SiO_2$ 원자구조를 결정짓는 전자구조적 특성에 대한 상세한 이해는 지구 내부의 탄성과 열역학적 성질에 대한 통찰을 제공한다. $SiO_2$처럼 경원소(low-z)로 이루어진 지구 물질의 고압상 전자구조는 in situ 고압 XRS (x-ray Raman scattering) 실험을 통해 연구되어 왔다. 하지만 기존의 고압 실험 방법으로는 물질의 국소 원자구조와 XRS 스펙트럼 간 상관관계를 밝히는데 한계가 있다. 이를 극복하고 더 높은 압력에서 존재하는 $SiO_2$에 대한 XRS 정보를 얻기 위해 밀도 범함수 이론(density functional theory; DFT)에 기반을 둔 제1원리(ab initio) 계산법을 이용한 XRS 스펙트럼 계산 연구들이 진행되고 있다. 비탄성 X-선 산란에 의하여 원자핵 주변 1s 오비탈에 만들어지는 전자-정공(core-hole)은 경원소 물질의 국소 전자구조에 크게 영향을 미치기 때문에 O K-edge XRS 스펙트럼 형태를 계산할 때 중요하게 고려해야 한다. 본 연구에서는 온-퍼텐셜 선형보충파(full-potential linearized augmented plane wave; FP-LAPW) 방법론에 기반하는 WIEN2k 프로그램을 사용하여 ${\alpha}-quartz$, ${\alpha}-cristobalite$ 그리고 $CaCl_2$-구조를 갖는 $SiO_2$에 대한 O 원자 전자 오비탈의 부분 상태밀도(partial density of states; PDOS)와 O K-edge XRS 스펙트럼을 계산하였다. 또한, $CaCl_2$-구조를 갖는 $SiO_2$의 O 원자 PDOS의 전자-정공 효과의 적용 여부에 따른 차이를 비교하여, 원자핵 부근 전자구조 변화에 따른 PDOS의 피크 세기와 위치 변화가 크게 나타났다는 사실을 확인할 수 있었다. 또한 계산된 각 $SiO_2$ 구조의 O K-edge XRS 스펙트럼이 각 $SiO_2$ 구조에서 계산된 O 원자의 $p^*$ 오비탈의 PDOS 결과와 매우 유사한 형태를 갖고 있음을 확인하였다. 이는 O K-edge XRS 스펙트럼이 갖는 대부분의 특징적인 피크들이 O 원자의 점유 1s 오비탈에서 $2p^*$ 오비탈로의 전자전이에 기인하기 때문이다. 본 연구의 결과는 $SiO_2$에 대한 정확한 O K-edge XRS 스펙트럼을 계산하는데 있어 전자-정공 효과를 고려해야 한다는 사실을 보여준다. 또한, 실험적으로는 재현이 어려운 고압 환경에 존재하는 $CaCl_2$-구조를 갖는 $SiO_2$ (~63 GPa)에 대한 O K-edge XRS 스펙트럼 계산을 통해, 제1원리 계산이 고압상 물질의 물성 연구에 이용될 수 있다는 사실을 보여준다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.366-366
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• 2010

Simulation Program (AFORS-HET 2.4.1) was used, include the basic structure of crystalline silicon thin film as above, below Intrinsic a-Si:H films bonded symmetrical structure (Symmetrical structure) were used. Efficiency with variation of the concentration was grown by the a-Si p-type with increasing concentrations of Na, efficiency with increasing a-Si n-type of Nd Concentrations was not changed, was decreased rapidly when concentrations were decreased. Efficiency was increased when c-Si n-type of Nd concentration was increased, otherwise efficiency was decreased when concentration was decreased.

• Bulletin of the Korean Chemical Society
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• 제18권4호
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• pp.369-373
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• 1997

When 1H NMR spectra of pyridine, 4-amino-, 4-methyl-, and 4-cyanopyridine coordinated to the paramagnetic polyoxometalate, [SiW11CoⅡO39]6- in D2O are compared, both α- and β-proton peaks are shifted upfield as the basicity of the ligand decreases. The isotropic shifts are separated into contact and pseudocontact contributions by assuming that the contact shifts are proportional to the isotropic shifts of the same ligands coordinated to [SiW11NiⅡO39]6-. This separation reveals that the shift variations with the axial ligand basicity are dominated by changes in the magnetic anisotropy (pseudocontact shift) of [SiW11CoⅡ(ptl)O39]6- (ptl=pyridine-type ligand). The magnitude of the magnetic anisotropy in a series of pyridine-type ligands increases linearly as the pKa of their conjugate acids decreases.

• Journal of Korean Vacuum Science & Technology
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• 제7권2호
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• pp.39-44
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• 2003

Recent ULSI and multilevel structure trends in microelectronic devices minimize the line width down to a quarter micron and below, which results in the high current densities in thin film interconnections. Under high current densities, an EM(electromigration) induced failure becomes one of the critical problems in a microelectronic device. This study is to improve thin film interconnection materials by investigating the EM characteristics in PSG(phosphosilicate glass)/SiO$_2$ passivated Al-l%Si thin film interconnections. Straight line patterns, wide and narrow link type patterns, and meander type patterns, etc. were fabricated by a standard photholithography process. The main results are as follows. The current crowding effects result in the decrease of the lifetime in thin film interconnections. The electric field effects accelerate the decrease of lifetime in the double-layered thin film interconnections. The lifetime of interconnections also depends upon the current conditions of P.D.C.(pulsed direct current) frequencies applied at the same duty factor.