• 대한전자공학회논문지SD
• /
• 제41권12호
• /
• pp.13-19
• /
• 2004

반도체 또는 평판디스플레이 제조에 있어 노광공정 후의 PR(photo-resist) 제거 공정으로서 기존의 황산기반 용액을 대체하는 고농도 오존 수 생성 기술에 대한 연구를 수행하였다. 세라믹 연면방전구조의 오존발생장치를 개발하여, 0.5［ℓ/min］의 산소 유량에서 최대 12［wt%］이상의 오존가스 농도를 얻었으며, 이를 고농도로 물과 혼합하기 위한 고효율 오존접촉장치를 개발하였다. 오존 수 생성 실험 결과, 오존가스 10［wt%］에서 80［ppm］이상의 오존 수 농도를 달성하였으며, 70［ppm］의 오존 수에서 PR 제거율 147［nm/min］의 양호한 결과를 얻었다.

• 치위생과학회지
• /
• 제23권1호
• /
• pp.13-19
• /
• 2023

Background: Periodontitis is a chronic inflammatory condition associated with dysbiosis of the oral microbiota. The aim of the present clinical study was to explore the adjunctive effect of ozonized water irrigation in the circuits of ultrasonic scalers for the full-mouth decontamination of patients with periodontitis Stage I or II. Methods: The study was a randomized, single-blinded, parallel-group clinical trial. The test group (n=25) was treated with ultrasonic scalers irrigated with ozonized water, whereas the control group (n=25) received normal tap water irrigation within the ultrasonic scalers used during the professional mechanical debridement. Full mouth plaque score, bleeding score, probing pocket depth, and the gingival index were evaluated at baseline, two, and 4 weeks after treatment. The pain perceived and dental anxiety were also assessed after treatment by means of the visual analog scale (VAS). Results: All periodontal parameters resulted in significant improvement for both study groups. The effect of the treatment group on the gingival index was significant, in particular, patients in the test group experienced a greater reduction in this score. No significant differences could be observed with regards to the average probing depth, full mouth plaque index and bleeding score. Patients treated with ozonized water running in the circuits of ultrasonic scalers displayed also lower scores for pain and dental anxiety. Conclusion: The present study showed a significant clinical effect on gingival inflammation attributable to adjunctive ozone irrigation during nonsurgical periodontal therapy. Further studies, including patients with severe periodontitis and greater sample sizes, are recommended to test the clinical effect of ozonized water in the circuits of ultrasonic scalers.

• 전기화학회지
• /
• 제11권3호
• /
• pp.135-140
• /
• 2008

An electrochemical generation of ozonized water was investigated by using ${\beta}-PbO_2$ as an anode and tap water as an anolyte. According to the potentiometric ozone detection which utilizes potential differences arisen from a chemical reaction of ozone and iodide, increasing tendency of ozone concentration on electrolysis time could be observed to show the maximum value of 8 ppm at an electrolysis time of 10 min. Ozone could be generated promptly even at an electrolysis time of 10 sec., suggesting great advantages of this electrochemical process in terms of simplicity and readiness that might be applied directly to practical uses including medical and/ or food industries. Influences of electrolysis on the properties and surface conditions of a $PbO_2$ electrode were also discussed from the results of cyclic voltammetry, scanning electron microscope, and X-ray diffractometer.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.362-363
• /
• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• 한국재료학회지
• /
• 제8권6호
• /
• pp.532-537
• /
• 1998

본 연구는 반도체 공정중 습식세정시 사용되는 초순수내에서의 오존의 거동과 오존이 주입된 초순수와 실리콘 웨이퍼와의 반응성에 대해 연구하였다. 초순수내 오존의 용해도는 주입되는 오존의 농도와 초순수의 온도가 낮을수록 증가하였고 주입되는 오존의 농도에 정비례하여 증가하였다. 초순수내 오존의 반감기는 초순수내 오존의 용해농도와 초순수의온도가 낮을수록 증가함을 나타내었고 반응차수는 약 1.5로 계산되었다. 초순수의산화환원전위(redox potential)값은 오존 주입시 5분 이내에 포화되어 일정한 값을 나타내었고 주입되는 오존의 농도가 증가함에 따라 약간 증가하였다. HF처리된 실리콘 웨이퍼는 오존이 2ppm 이상 용해된 초순수에서 세정하였을 때 1분 이내에 접촉각이 $10^{\circ}$미만의 친수성 표면을 형성하였고 piranha 세정액($H_2SO_4$과 $H_2O_2$의 혼합액)에 의해 형성된 자연산화막보다 오존이 주입된 초순수에 의해 형성된 산화막이 약간 더 두꺼움을 Spectroscopic Ellip-someter에 의해 관찰하였다. 오존의 농도가 1.5ppm에서 90초내에 계면활성제로 오염된 실리콘 웨이퍼를 piranha용액과 오존이 함유된 황산 그리고 오존이 함유된 초순수에서 세정시 오존이 함유된 초순수가 가장 탁월한 오염제거능력을 나타내었다.

• 한국전기전자재료학회논문지
• /
• 제20권11호
• /
• pp.977-982
• /
• 2007

The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.

• Applied Science and Convergence Technology
• /
• 제23권6호
• /
• pp.309-316
• /
• 2014

A large particle accelerator requires an ultrahigh vacuum (UHV) system of average pressure under $1{\times}10^{-7}$ Pa for mitigating the impact of beam scattering from the residual gas molecules. The surface inside the beam ducts should be controlled with an extremely low thermal outgassing rate under $1{\times}10^{-9}Pa{\cdot}m^3/(s{\cdot}m^2)$ for the sake of the insufficient pumping speed. To fulfil the requirements, the aluminum alloys were adopted as the materials of the beam ducts for large accelerator that thanks to the good features of higher thermal conductivity, non-radioactivity, non-magnetism, precise machining capability, et al. To put the aluminum into the large accelerator vacuum systems, several key technologies have been developed will be introduced. The concepts contain the precise computer numerical control (CNC) machining process for the large aluminum ducts and parts in pure alcohol and in an oil-free environment, surface cleaning with ozonized water, stringent welding process control manually or automatically to form a large sector of aluminum ducts, ex-situ baking process to reach UHV and sealed for transportation and installation, UHV pumping with the sputtering ion pumps and the non-evaporable getters (NEG), et al. The developed UHV technologies have been applied to the 3 GeV Taiwan Photon Source (TPS) and revealed good results as the expectation. The problems of leakage encountered during the assembling were most associated with the vacuum baking which result in the consequent trouble shootings and more times of baking. Then the installation of the well-sealed UHV systems is recommended.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1849-1852
• /
• 2005

An automatic cap-washing machine is developed for rinse and dry of synthetic resin cap which is used in spring water bottle. This machine should be achieved all processes washing and drying, array, transfer automatically. A cap is washed by an ozonized water and pure water first. Next, a cap is dried by a hot wind drying equipment. In this paper, structural and modal analysis for the cap-washing machine is carried out to check the design criterion of the machine. The analysis is carried out by FEM simulation using the commercial software, CATIA V5. And a fictitious mass properties was used for the analysis of the machine. Finally, the machine performance is shown to be satisfactory.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.22-23
• /
• 2006

A process for removal of photoresist(PR) m semiconductor manufacturing using water vapor with ozone is presented. For the realization of the ozone/vapor mixture process, high concentration ozone generator and process facilities have developed. As a result of the silicon wafer PR strip test, we confirmed the high efficiency PR strip rates of 400nm/mm or more at the ozone concentration of 16wt%/$O_2$. The ozone/vapor mixture process is more effective than the ozonized water Immersion process.

• Journal of the Korean Wood Science and Technology
• /
• 제38권4호
• /
• pp.316-322
• /
• 2010

본 연구의 목적은 폐식용유를 오존산화 처리에 의한 구조적 변성을 시도하고 이를 pMDI와 반응시켜 목재접착제로 개발하고자 하는 것이다. 폐식용유를 사용하여 1, 2, 3시간 오존산화 처리 한 후 화학적 변화를 알아보기 위하여 FT-IR을 측정하였다. 또한 접착강도를 조사하기 위하여 상태, 내수, 내온수, 반복끓임 실험을 하였다. FT-IR 측정 결과, 폐식용유의 오존산화가 진행될수록 불포화 이중결합에 기인한 3,010 $cm^{-1}$ 부근의 흡수가 사라지고 1,700 $cm^{-1}$ 부근의 카르복실기의 흡수가 크게 나타났다. 특히 3시간대에 3,010 $cm^{-1}$ 부근에 이중결합이 거의 사라짐을 알 수 있었다. 3시간 처리한 폐식용유의 상태 접착력 시험 결과, 폐식용유: pMDI 비율이 1 : 0.5일 때 8.08 kgf/$cm^2$, 1 : 0.75일 때 9.53 kgf/$cm^2$, 1 : 1일 때 44.16 kgf/$cm^2$ 1 : 2일 때 58.08 kgf/$cm^2$, 1 : 3일 때 61.41 kgf/$cm^2$, 1 : 4일 때는 46.95 kgf/$cm^2$를 나타내어 MDI와의 적정당량이 1 : 2, 1 : 3 부근에서 결정됨을 알 수 있었다. 중량비 1 : 2, 1 : 3만을 선택하여 각각 내수, 내온수, 반복끓임 상태로 접착강도 시험을 실시하였다. 내수 접착강도에서는 1 : 3의 경우가 더 높은 값을 보였으나 실험조건이 강화된 내온수, 반복 끓임에서는 혼합비율 1 : 2와 1 : 3이 비슷한 값을 나타내었다.