Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
- /
- Pages.362-363
- /
- 2006
The Study of Particle Removal Efficiency (PRE) with Alkaline Ozonized Water
알칼라인 오존수를 아용한 입자제거에 관한 연구
- Lee, Seung-Ho (Department of Metallurgy and Materials Engineering, Hanyang University) ;
- Kim, Tae-Gon (Department of Metallurgy and Materials Engineering, Hanyang University) ;
- Lee, Jae-Hwan (Department of Metallurgy and Materials Engineering, Hanyang University) ;
-
Park, Jin-Goo
(Department of Metallurgy and Materials Engineering, Hanyang University) ;
- Bae, So-Ik (Advanced Technology Team, R&D Center) ;
- Lee, Gun-Ho (Advanced Technology Team, R&D Center) ;
- Kim, In-Jung (Advanced Technology Team, R&D Center)
- Published : 2006.11.09
Abstract
Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with