• 대한전자공학회논문지SD
• /
• 제41권9호
• /
• pp.31-37
• /
• 2004

oxide 층의 위치와 두께 조절을 통하여 oxide-VCSEL이 단일모드로 동작하는 활성영역의 반경을 확장하는 방법을 Self-consistent effective-index 방법을 이용하여 제시하였다. 이렇게 활성영역이 넓어지면 고속, 고신뢰도, 고출력 동작에 유리한 단일모드 VCSEL을 만들 수 있게 된다. 고출력을 위하여 단일모드로 동작하는 활성영역을 확대하는 방법을 하면 다음과 같다. 첫째 oxide 층은 활성층에서 멀리 떨어진 곳에 위치시켜야 한다 둘째, oxide 층은 얇게 만들어야 한다. 셋째, oxide층을 node에 위치시켜야 한다. 그리고 고출력을 위하여 p-DBR 쌍의 수를 줄이는 것은 단일모드 동작조건을 변화시키지 않는다. 이 방법을 사용하면 단일모드로 동작하는 oxide-aperture 크기를 3m% 이상 키울 수 있다.

• 반도체디스플레이기술학회지
• /
• 제2권2호
• /
• pp.9-15
• /
• 2003

This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

• 한국표면공학회지
• /
• 제47권3호
• /
• pp.121-127
• /
• 2014

In this study, in order to improve corrosion resistance and wear resistance of aluminum, surface treatment was made by anodizing with oxalic acid solution and sealing with nano-diamond powder. Average size of nano-diamond powder was 30nm. Anodizing with oxalic acid made many pores in the aluminum oxide layer. Pore size and oxide thickness were investigated by scanning electron microscope (SEM). Pore size increased as temperature increased and voltage increased. It was possible to make oxide layer with pore diameter more than 50 nm. Oxide thickness increased as temperature and voltage and treatment time increased. Oxide layer with above $10{\mu}m$ thickness was made. Aluminum oxide layer with many pores was sealed by water with nano-diamond powder. Surface morphology was investigated by SEM. After sealing treatment with nano-diamond powder, corrosion resistance, wear resistance and hardness increased.

• 한국정보통신학회:학술대회논문집
• /
• 한국해양정보통신학회 2002년도 추계종합학술대회
• /
• pp.800-803
• /
• 2002

The MONOS capacitor are fabricated to investigate the carrier trapping due to Fowler-Nordheim tunneling injection. The carrier trapping in scaled multi-dielectric(ONO) depends on the nitride and Op oxide thickness under Fowler_Nordheim tunneling injection. Carriers captured at nitride film could not escape from nitride to gate, but be captured at top oxide and nitride interface traps because of barrier height of top oxide. Therefore, it is expected that the MONOS memory devices using multi dielectric films enhance memory effect and have a long memory retention characteristic.

• 한국표면공학회지
• /
• 제35권3호
• /
• pp.149-157
• /
• 2002

Spectral emissivity depends on the surface conditions of the materials. The mechanisms that affect the spectral emissivity in anodic oxide films on aluminum were investigated. The aluminum specimens were anodized in a sulfuric acid solution and the thickness of the resulting oxide film formed changed with the anodizing time. FT-IR spectrum analysis identified the anodic oxide film as boehmite ($Al_2$$O_3$.$H_2$O). Both the infrared emisivity and reflectivity of the anodized aluminum were affected by the structure of the anodic oxide film because Al-OH and Al-O-Al have a pronounced absorption band in the infrared region of the spectrum. The presence of an anodic oxide film on aluminum caused a rapid drop in the infrared reflectivity. An aluminum surface in the clean state had an emissivity of approximately 0.2. However, the infrared emissivity rapidly increased to 0.91 as the thickness of the anodic oxide film increased.

• 대한기계학회논문집A
• /
• 제27권3호
• /
• pp.335-342
• /
• 2003

In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to from the oxide layer and the characteristics of the oxide layer formation are investigated. AISI 52100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4 ${\mu}{\textrm}{m}$ in coating thickness. AISI 1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

• 한국윤활학회:학술대회논문집
• /
• 한국윤활학회 2001년도 제34회 추계학술대회 개최
• /
• pp.109-116
• /
• 2001

In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to form the oxide layer and the characteristics of the oxide layer formation are investigated. AIS152100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4um in coating thickness. AISI1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitride environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 하계학술대회 논문집 D
• /
• pp.1931-1933
• /
• 1999

In this paper, the current and voltage properties on the gate oxide film due to the variation of thickness are studied. The specimen is used for n-ch power MOSFET. It is shows the leakage current and current density characteristics due to the applied electric field when the oxide thickness is each $600[\AA],\;800[\AA]$ and $1000[\AA]$, respectively. We known that the leakage current is a little higher when the voltage as reverse bias contrast with forward bias in poly gate is applied. In order to experiment for AC properties is measured for capacitance characteristics. It is confirmed that the value of input capacitance have been a lot of influenced on $SiO_2$ thickness contrast with the value of output capacitance.

• 한국전기전자재료학회논문지
• /
• 제31권5호
• /
• pp.278-282
• /
• 2018

We propose a SPICE model of drain-induced barrier lowering (DIBL) for a junctionless cylindrical surrounding gate (JLCSG) MOSFETs. To this end, the potential distribution in the channel is obtained via the Poisson equation, and the threshold voltage model is presented for the JLCSG MOSFET. In a JLCSG nano-structured MOSFET, a channel radius affects the carrier transfer as well as the channel length and oxide thickness; therefore, DIBL should be expressed as a function of channel length, channel radius, and oxide thickness. Consequently, it can be seen that DIBLs are proportional to the power of -3 for the channel length, 2 for the channel radius, 1 for the thickness of the oxide film, and the constant of proportionality is 18.5 when the SPICE parameter, the static feedback coefficient ${\eta}$, is between 0.2 and 1.0. In particular, as the channel radius and the oxide film thickness increase, the value of ${\eta}$ remains nearly constant.

• 한국원자력학회:학술대회논문집
• /
• 한국원자력학회 1995년도 추계학술발표회논문집(2)
• /
• pp.680-686
• /
• 1995

It has been known that water-side corrosion of fuel rods in nuclear reactor is accompanied with the loss of metallic wall thickness and pickup of hydrogen. This corrosion is one of the important limiting factors ill the operating life of fuel rods. In connection with the fuel cladding corrosion, a device to measure the water-side oxide layer thickness by means of the eddy-current method without destructing the fuel rod was developed by KAERI. The device was installed on the multi-function testing bench in the nondestructive test hot-cell and its calibration was carried out successfully for the standard rod attached with plastic thin films whose thicknesses are predetermined. It shows good precision within about 10% error. And a PWR fuel rod, one of the J-44 assembly discharged from Kori nuclear power plant Unit-2, has been selected for oxide layer thickness measurements. With the result of data analysis, it appeared that the oxide layer thicknesses of Zircaloy cladding vary with the length of the fuel rod, and their thicknesses were compared with those of the destructive test results to confirm the real thicknesses.