Properties and Preparation of AlNO Multi-layer Thin Films Using DC Magnetron Sputter Method (직류 마그네트론 스퍼터법에 의한 AlNO 복층박막의 제조와 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.9
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- pp.589-593
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- 2014