Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
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- Pages.149-149
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- 2010
Optical Properties Analysis of SiNx Double Layer Anti Reflection Coating by PECVD
- Gong, Dae-Yeong (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Park, Seung-Man (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Yi, Jun-Sin (School of Information and Communication Engineering, Sungkyunkwan University)
- Published : 2010.02.17
Abstract
The double-layer antireflection (DLAR) coatings have significant advantages over single-layer antireflection (SLAR) coatings. This is because they will be able to cover a broad range of the solar spectrum which would enhance the overall performance of solar cells. Moreover films deposited at high frequency are expected to show excellent and UV-stable passivation in the refractive index that we adopted. In this work, we present a novel DLAR coating using SiNx:H thin films with refractive indices 1.9 and 2.3 as the top and bottom layers. This approach is cost effective when compared to earlier DLAR coatings with two different materials. SiNx:H films were deposited by Plasma enhanced chemical vapor deposition (PECVD) technique using
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