Properties and Preparation of AlNO Multi-layer Thin Films Using DC Magnetron Sputter Method
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Kim, Hyun-Hoo
(Department of Display Engineering, Doowon Technical University)
Oh, Dong-Hyun (Department of Display Engineering, Doowon Technical University) Baek, Chan-Soo (Department of Display Engineering, Doowon Technical University) Jang, Gun-Eik (Department of Material Engineering, Chungbuk National University) Choi, Dong-Ho (Research Development Team, Sunda Korea) |
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