• Journal of Korean Association for Spatial Structures
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• v.16 no.1
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• pp.85-94
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• 2016

In this study, an acceleration sensor that has optical fibers to measure the inclination and acceleration of a structure through contradictory changes in two-component FBG sensors was examined. The proposed method was to ensure precise measurement through the unification of the deformation rate sensor and the angular displacement sensor. A high sensitivity three-axis accelerometer was designed and prepared using this method. To verify the accuracy of the accelerometer, the change in wavelength according to temperature and tension was tested. Then, the change in wavelength of the prepared accelerometer according to the sensor angle, and that of the sensor according to the change in ambient temperature were measured. According to the test results on the FBG-based vibration sensor that was developed using a high-speed vibrator, the range in measurement was 0.7 g or more, wavelength sensitivity, 2150 pm/g or more, and the change in wavelength change, $9.5pm/^{\circ}C$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.408-413
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• 1995

Nowadays, manufacturing system is trending toward integrated circumstance by helping of CAD/CAM/CAT. To use this system effectively, it is necessary to get exact 3 dimensional surface data of an object. We have been using contact method to measure 3 dimensional object profile. But his method has demerit of leaving scrach or small distortion on the object. To improve this, a non-contact measuring method using optical system is adopted. In this paper, We propose optical ring method. Withthis system, We could measure displacement of the object in the range of 45mm having 150mm having 150 .mu. m resolution with no scratch or distortion.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.3
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• pp.440-449
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• 1988

Small vibration displacements may be measured by optical interferometers, based on the Michelson method. The standard Michelson interferometer works well when the mirror displacements are relatively large compared to the optical wavelength. But it does not work for displacements less than approximately a quater of optical wavelength. Several multiple reflection laser interferometers, simply modified standard Michelson interferometer, have been developed to decrease the minimum detectable limits. Among these a relatively simple and easy multiple reflection system is used to measure the small vibration displacements. This multiple reflection system is constructed with a right angle prism and a convex lens. Therefore this system makes it possible to measure a vibration displacement of the small area on the vibrating structure. The fringe interpolation method and curve fitting method are used to determine accurately the small vibration displacements from the measured interference fringe patterns. Also computer simulation technique is used to check the accuracies of these method. According to the results of the computer simulation technique, the curve fitting method is more accurate than the fringe interpolation method. The optically measured results are in good agreement with those of the standard accelerometer with high accuracy and it is possible to measure the peak vibration displacement as small as 9.01nm using multiple reflection system and curve fitting method.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Journal of the Korean Society for Nondestructive Testing
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• v.6 no.2
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• pp.37-45
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• 1987

Speckle photography is a very useful method for measuring in-plane surface displacement. In its basic form, the object to be studied is illuminated with a divergent laser beam, and a double exposure photograph of the object is recorded, on a fine-grain film or plate, before and after the object is deformed, The magnitude and the direction of the displacement can then be obtained by measuring the spacing and the direction of the Young's fringe, which is produced by probing the developed negative with an unexpaned laser beam, and consists of a pattern of parallel equi-spaced dark bands. In this paper, a hybrid optical and electronic image processing is described-Young's fringe on the viewing screen is observed by a TV-camera and the 2-D video signal is converted from analog to digital and transfered to the computer where the spacing and direction of the fringes are calculated. Several examples of application show that the displacement magnitude and direction can be determined with an accuracy of $0.1{\mu}m\;and\;0.1^{\circ}$ respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.248-251
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• 1996

Langmuir-Biodgett(LB) method is known as a unique method for preparing organic thin films, which can control thickness of the films in molecular level, and many kinds of ultra thin films of functional molecules have been prepared using this method. In this study, The organization of phospholipid monolayers on a water surface was investigated by means of displacement current measurement technique.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.93-96
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• 2000

This study discusses a non-contact optical technique, phase shifting electronic speckle pattern interferometry, that is well suited for a deformation measurement. However, the phase shifting method has difficulties for determinating a deformation quantitatively beacuse of the characteristics of arctan function. In order to solve this problem, phase unwrapping methods has been studied during the last few years. In this study, using phase unwrapping based on line by line scanning phase shifted fringe patterns are studied to determinate a deformation quantitatively. Also least square fitting method is applied to reduce noise and improve image resolution.

• Journal of the Korean Institute of Telematics and Electronics
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• v.22 no.2
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• pp.1-5
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• 1985

In this paper, temperature-induced optical phase shifts in single-mode fibers are studied both analytically and experimentally. Temperature sensor using single-mode fiber interferometer is designed and the temperature sensitivity of the sensor system is investigated. This fiber-optic temperature sensor which employs the Mach-Zehnder arrangement is a high sensitivity sensor of phase detection type. In this type, temperature changes are ob-served as a motion of an optical interference fringe pattern. In the measurements using interferometer, one of the important problems is to detect simultaneously the number and direction of fringe displacement resulting from physical perturbations (temperature, pressure, etc.). To realize this, the array detector using multi-mode fiber is designed. By this array detector the number and direction of fringe displacement is Ineasured very conveniently.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.22-25
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• 2008

The dynamic response of the head arm assembly (HAA) of a hard disk drive to an impact load was obtained from a 3D non-linear finite element model using ANSYS/LS-DYNA and from experiments using a modified levitation mass method (LMM). In the finite element model, the impact load was created by modeling the mass as a rigid body and making it collide with the HAA. The velocity, displacement, acceleration, and inertial force of the mass were then obtained from the time history data of the finite element analysis. In the LMM, a mass that was levitated with an aerostatic linear bearing, and hence encountered negligible friction, was made to collide with the actuator arm, resulting in a dynamic bending test for the arm. During the collision, the Doppler frequency shift of the laser beam reflected from the mass was accurately measured with an optical interferometer. The velocity, displacement, acceleration, and inertial force of the mass were accurately calculated from the measured time-varying Doppler frequency shift. A good correlation between the experimental data and FEA results was observed. The FEA was also used to investigate the dynamic response of the HAA to impact by different masses.