• 한국공간구조학회논문집
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• 제16권1호
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• pp.85-94
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• 2016

In this study, an acceleration sensor that has optical fibers to measure the inclination and acceleration of a structure through contradictory changes in two-component FBG sensors was examined. The proposed method was to ensure precise measurement through the unification of the deformation rate sensor and the angular displacement sensor. A high sensitivity three-axis accelerometer was designed and prepared using this method. To verify the accuracy of the accelerometer, the change in wavelength according to temperature and tension was tested. Then, the change in wavelength of the prepared accelerometer according to the sensor angle, and that of the sensor according to the change in ambient temperature were measured. According to the test results on the FBG-based vibration sensor that was developed using a high-speed vibrator, the range in measurement was 0.7 g or more, wavelength sensitivity, 2150 pm/g or more, and the change in wavelength change, $9.5pm/^{\circ}C$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.408-413
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• 1995

Nowadays, manufacturing system is trending toward integrated circumstance by helping of CAD/CAM/CAT. To use this system effectively, it is necessary to get exact 3 dimensional surface data of an object. We have been using contact method to measure 3 dimensional object profile. But his method has demerit of leaving scrach or small distortion on the object. To improve this, a non-contact measuring method using optical system is adopted. In this paper, We propose optical ring method. Withthis system, We could measure displacement of the object in the range of 45mm having 150mm having 150 .mu. m resolution with no scratch or distortion.

• 대한기계학회논문집
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• 제12권3호
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• pp.440-449
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• 1988

본 연구에서는 미소한 진동진폭의 정밀한 측정을 위해 비교적 광선정렬(opti- cal alignment)이 쉽고 광손실이 적으며 국소부위의 진동측정이 가능한 다중반사계를 Michelson간섭계에 도입하였다.미소 진동진폭의 정밀한 값을 결정하기 위해서는 간 섭신호를 측정하여 간섭무늬 보간법과 곡선 맞춤법을 이용하는 방법이 있다. 전자는 간단한 계산과 시간을 절약할 수 있는 반면 후자는 복잡한 계산으로 인해 많은 시간이 소요된다. 그러나 정밀계측장비의 교정에서와 같이 경우에 따라서는 많은 시간과 노 력이 소요되더라도 정밀한 측정결과를 얻어야할 필요가 있기 때문에 이들 두가지 방법 의 정밀도를 확인하기 위해 컴퓨터에 의한 모의실험을 수행하였다.

• 한국정밀공학회지
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• 제29권8호
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• 비파괴검사학회지
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• 제6권2호
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• pp.37-45
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• 1987

Speckle photography is a very useful method for measuring in-plane surface displacement. In its basic form, the object to be studied is illuminated with a divergent laser beam, and a double exposure photograph of the object is recorded, on a fine-grain film or plate, before and after the object is deformed, The magnitude and the direction of the displacement can then be obtained by measuring the spacing and the direction of the Young's fringe, which is produced by probing the developed negative with an unexpaned laser beam, and consists of a pattern of parallel equi-spaced dark bands. In this paper, a hybrid optical and electronic image processing is described-Young's fringe on the viewing screen is observed by a TV-camera and the 2-D video signal is converted from analog to digital and transfered to the computer where the spacing and direction of the fringes are calculated. Several examples of application show that the displacement magnitude and direction can be determined with an accuracy of $0.1{\mu}m\;and\;0.1^{\circ}$ respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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• pp.248-251
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• 1996

Langmuir-Biodgett(LB) method is known as a unique method for preparing organic thin films, which can control thickness of the films in molecular level, and many kinds of ultra thin films of functional molecules have been prepared using this method. In this study, The organization of phospholipid monolayers on a water surface was investigated by means of displacement current measurement technique.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.93-96
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• 2000

This study discusses a non-contact optical technique, phase shifting electronic speckle pattern interferometry, that is well suited for a deformation measurement. However, the phase shifting method has difficulties for determinating a deformation quantitatively beacuse of the characteristics of arctan function. In order to solve this problem, phase unwrapping methods has been studied during the last few years. In this study, using phase unwrapping based on line by line scanning phase shifted fringe patterns are studied to determinate a deformation quantitatively. Also least square fitting method is applied to reduce noise and improve image resolution.

• 대한전자공학회논문지
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• 제22권2호
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• pp.1-5
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• 1985

본 연구에서는 단일모드 광섬유에서의 온도에 의한 위상변조 현상을 분석하고 단일모드 광섬유 간섭계를 이용한 온도센서를 설계. 제작하여 그 온도특성을 조사하였다. 설계한 fiber-optic온도센서는 Mach-Zehnder 간섭계를 이용한 위상감지형 고감도 센서로서 온도변화는 간섭무의의 이동으로써 측정되어졌다. 간섭계에 의한 측정에서 중요한 문제중의 하나는 온도분만 아니라 모든 피측정 물리량의 변화방향에 따른 간섭무의의 이동갯수와 이동방향을 동시에 측정하는 것이다. 이를 위해 다중모드 광섬유를 이용한 배열 검출기를 제작하여 매우 간편하게 간섭무늬의 이동갯수와 이동방향을 측정하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.22-25
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• 2008

The dynamic response of the head arm assembly (HAA) of a hard disk drive to an impact load was obtained from a 3D non-linear finite element model using ANSYS/LS-DYNA and from experiments using a modified levitation mass method (LMM). In the finite element model, the impact load was created by modeling the mass as a rigid body and making it collide with the HAA. The velocity, displacement, acceleration, and inertial force of the mass were then obtained from the time history data of the finite element analysis. In the LMM, a mass that was levitated with an aerostatic linear bearing, and hence encountered negligible friction, was made to collide with the actuator arm, resulting in a dynamic bending test for the arm. During the collision, the Doppler frequency shift of the laser beam reflected from the mass was accurately measured with an optical interferometer. The velocity, displacement, acceleration, and inertial force of the mass were accurately calculated from the measured time-varying Doppler frequency shift. A good correlation between the experimental data and FEA results was observed. The FEA was also used to investigate the dynamic response of the HAA to impact by different masses.