• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권7호
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• pp.339-343
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• 2006

In this study, the variations of the important characteristics of solenoid-type RF chip inductors utilizing a low-loss A1203 core material on inductor dimensions were investigated systematically. Four dimensions of the chip inductors fabricated in this work were $1.0\times0.5\times0.5mm^3,\;1.5\times1.0\times0.7mm^3,\;2.1\times1.5\times1.0mm^3,\;and\;2.4\times2.0\times1.4mm^3$ and copper (Cu) wire with $40{\mu}m$ diameter was used as the coils. High frequency characteristics of the inductance, quality factor, and impedance of developed inductors as a function of inductor dimensions were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). It was observed that the developed inductors with the number of turns of 6 have the inductance (L) of 12 to 82 nH and exhibit the self-resonant frequency (SRE) of 3.6 to 1.2 GHz. The SRF of inductors decreases with increasing the inductor size while the L increases with the inductor size. The smallest inductors of $1.0\times0.5\times0.5mm^3$ exhibited the L of 12 nH, SRF of 3.6 GHz, and the quality factor of 67 near the frequency of 1.1 GHz. The calculated data predicted the high-frequency data of the L, and Q of the developed inductors well.

• 대한전자공학회논문지SD
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• 제44권8호
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• pp.22-29
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• 2007

[ $0.18{\mu}m$ ] CMOS공정을 이용하여 supply voltage 1.8V에서 2.5Gb/s 이상의 데이터 처리속도를 가지는 2:1 Multiplexer(MUX) 설계를 하였다. High speed 동작을 위한 주파수의 한계를 극복하기 위해서 4.7 nH의 on-chip micro spiral micro inductor $(20\times20{\mu}m2)$가 설계 되었고, 10개 이상의 inductor를 사용하고도 칩 면적 증가가 거의 없으면서 inductive peaking 효과를 극대화할 수 있었다. 칩 측정은 on-wafer로 진행되었고, micro spiral inductor가 있는 2:1 MUX와 그것이 없는 2:1 MUX 각각 측정하여 그 결과를 비교하였다. 측정결과 micro spiral inductor를 가진 2:1MUX가 rise time과 fall time이 1.25Gb/s에서는 rise time이 23%, fall time은 3%의 peaking 개선 효과가 있는 것을 확인하였다. 2.5Gb/s에서는 fall time이 약 5.3%, rise time 3.5%의 개선 효과를 보았다. 전체 소비전력은 61.2mW, 2.5Gb/s에서 voltage output swing은 $180mV_{p-p}$로 측정되었다.

• 한국전기전자재료학회논문지
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• 제19권8호
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• pp.780-784
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• 2006

We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 하계종합학술대회 논문집(1)
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• pp.221-224
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• 2004

This paper has researched on-chip spiral inductor in digital CMOS technology by modeling physical structure based on foundry parameter. To show the possibility of its application to RF design, we designed dual band RF front-end receiver. The simulated receiver have gain of 23/23.5 dB and noise figure of 2.8/3.36 dB at 2.45/5.25 GHz, respectively. It occupies $16mm^2$ in $0.25{\mu}m$ CMOS with 5 metal layer.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.283-288
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• 2000

In this work, small-size, high-performance simple solenoid-type RF chip inductors utilizing an Al2O3 core material were investigated. Copper (Cu) wire with $40\mum$ diameter was used as the coils and the size of the chip inductor fabricated in this work was $2.1mm\times1.5mm\times1.0mm$. The external current source was applied after bonding Cu coil leads to gold pads electro-plated on each end of backsides of a core material. High frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. The developed inductors have the self-resonant frequency (SRF) of 1.1 to 3.1 GHz and exhibit L of 22 to 150 nH. The L of the inductors decreases with increasing the SRF. The Z of the inductors has the maximum value at the SRF and the inductors have the quality factor of 70 to 97 in the frequency range of 500 MHz to 1.5 GHz.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.1776-1778
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• 2000

The demands placed on portable wireless communication equipment include low cost, low supply voltage, low power, dissipation, low noise, high frequency of operation, and low distortion. These design requirements cannot be met satisfactorily in many cases without the use of RF inductors. However, implementing the inductor on-chip has been regarded as an impractical task because of excessive substrate capacitance and substantial resistive losses due to metallization and the conductive silicon substrate. Hence, there is a great incentive to design, optimize, and model spiral inductors on Si substrate. So, we analyzed a chip inductors using electromagnetic analysis and established a set of design rules for rectangular spiral inductors.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2008년도 정보통신설비 학술대회
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• pp.35-38
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• 2008

In this paper, study noise performance of LNA to enhance Q-factor of input circuit by patterned ground shield is inserted inductor using TSMC 0.18um. Applied LNA technology is cascode method. The input matching circuit was constituted on-chip and wirebonding inductor. Taguchi's method is used for the best suited structure of PGS. We confirmed enhancement of Q-factor by inserted PGS into inductor. The input matching circuit enhanced Q-factor by inductor with PGS improve noise figure of LNA.

• Journal of Magnetics
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• 제13권2호
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• pp.37-42
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• 2008

In this paper, design parameters of high Q (> 50), high current inductor for on-chip power module were optimized by 4 Xs 3 Ys DOE (Design of Experiment). Coil spacing, coil thickness, ferrite thickness, and permeability were assigned to Xs, and inductance (L) and Q factor at 10 MHz, and resonance frequency ($f_r$) were determined Ys. Effects of each X on the Ys were demonstrated and explained using known inductor theory. Multiple response optimizations were accomplished by three derived regression equations on the Ys. As a result, L of 125 nH, Q factor of 197.5, and $f_r$ of 316.3 MHz were obtained with coil space of $127\;{\mu}m$, Cu thickness of $67.8\;{\mu}m$, ferrite thickness of $130.3\;{\mu}m$, and permeability 156.5. Loss tan ${\delta}=0$ was assumed for the estimation. Accordingly, Q factor of about 60 is expected at tan ${\delta}=0.02$.

• Journal of Advanced Marine Engineering and Technology
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• 제31권6호
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• pp.777-783
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• 2007

In this work, a highly integrated downconverter MMIC employing HBT(heterojunction bipolar transistor) was developed for application to one chip tranceiver solution of Ku-band commercial wireless communication system. The downconverter MMIC (monolithic microwave integrated circuit) includes mixer filter. amplifier and input/output matching circuit. Especially, spiral inductor structures employing SiN film were used for a suppression of LO and its second harmonic leakage signals. Concretely, they were properly designed so that the self-resonance frequency was accurately tuned to LO and its second harmonic frequency, and they were integrated on the downconverter MMIC.

• 대한전자공학회논문지TC
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• 제44권7호통권361호
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• pp.96-104
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• 2007

본 논문에서는 필드 솔버와 회로 시뮬레이션을 통한 온 칩 인덕터의 패드 및 주변 그라운드의 디임베드 방법을 설명하였으며, 필드 솔버의 결과와 회로 시뮬레이션을 통한 디임베드 방법은 각각 측정 결과와 메트리스 연산 결과와 비교하여 검증하였다. 또한 디임베드 된 인덕터의 모델을 적용한 LNA 설계하고 제작하였으며 제작한 LNA의 결과는 측정 결과와 비교하여 디임베드를 적용하였을 때 2.5GHz 이상의 대역에서 보다 측정치에 접근함을 확인하였다. 본 논문에서 제시한 회로 시뮬레이션을 통한 디임베드 방법은 다른 수동 온칩 소자의 소자값을 얻는 데 손쉽게 사용될 수 있는 방법이며 이를 적용하여 보다 정확한 RFIC(radio frequency integrated circuit) 회로 설계가 가능할 것으로 사료된다.