Micromachining of Si substrate Using Electrochemical Etch-Stop in Aqueous TMAH/IPA/pyrazine Solution (TMAH/IPA/Pyrazine 수용액에서 전기화학적 식각정지법을 이용한 Si 기판의 미세가공)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1997.11a
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- pp.397-400
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- 1997