• 제목/요약/키워드: OC4

검색결과 611건 처리시간 0.027초

Fluorine 첨가에 의한 F-doped SiOC : H 박막의 저 굴절률 특성 (Refractive index control of F-doped SiOC : H thin films by addition fluorine)

  • 윤석규;강삼묵;정원석;박우정;윤대호
    • 한국결정성장학회지
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    • 제17권2호
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    • pp.47-51
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    • 2007
  • 저굴절 재료인 F-doped SiOC : H 박막을 Si 웨이퍼와 유리기판위에 rf power, 기판온도, 그리고 가스유량($SiH_4,\;CF_4$ and $N_2O$)을 변수로 하여 PECVD법으로 증착하였다. 기판 온도와 rf power증가에 따라 F-doped SiOC : H 박막의 굴절률은 감소하는 경향을 보였다. $N_2O$ 가스 유량이 감소함에 따라 증착된 박막의 굴절률은 감소하였으며, rf power가 180W 기판온도 $100^{\circ}C$, 그리고 $N_2O$ 가스를 첨가하지 않은 조건에서 증착한 박막은 최소 굴절률인 1.3778을 갖는 것을 알 수 있었다. Rf power 60W에서 180W로 증가시킴에 따라 증착된 박막의 불소 함량은 1.9at%에서 2.4at%로 증가하였으며 이러한 이유로 박막의 굴절률은 감소하는 경향을 나타냈다.

Correlation Between Energy Gap and Defect Formation of Al Doped Zinc Oxide on Carbon Doped Silicon Oxide

  • Oh, Teresa;Kim, Chy Hyung
    • Transactions on Electrical and Electronic Materials
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    • 제15권4호
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    • pp.207-212
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    • 2014
  • Aluminum-doped zinc oxide (AZO) films were deposited on SiOC/Si wafer by an RF-magnetron sputtering system, by varying the deposition parameters of radio frequency power from 50 to 200 W. To assess the correlation of the optical properties between the substrate and AZO thin film, photoluminescence was measured, and the origin of deep level emission of AZO thin films grown on SiOC/Si wafer was studied. AZO formed on SiOC/Si substrates exhibited ultraviolet emission due to exciton recombination, and the visible emission was associated with intrinsic and extrinsic defects. For the AZO thin film deposited on SiOC at low RF-power, the deep level emission near the UV region is attributed to an increase of the variations of defects related to the AZO and SiOC layers. The applied RF-power influenced an energy gap of localized trap state produced from the defects, and the gap increased at low RF power due to the formation of new defects across the AZO layer caused by lattice mismatch of the AZO and SiOC films. The optical properties of AZO films on amorphous SiOC compared with those of AZO film on Si were considerably improved by reducing the roughness of the surface with low surface ionization energy, and by solving the problem of structural mismatch with the AZO film and Si wafer.

AZO 투명전극의 결정성과 광학적 특성 (Crystallization and Optical Properties of Transparent AZO Thin Films)

  • 오데레사
    • 한국진공학회지
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    • 제21권4호
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    • pp.212-218
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    • 2012
  • RF 마그네트론 스퍼터에 의해 만들어진 AZO 박막을 기판의 화학적 특성에 따른 광학적 특성에 대하여 조사하였다. 기판은ICP-CVD방법으로 제작된 SiOC 박막으로 화학적 특성의 변화를 관찰하기 위해서 산소와 아르곤(DMDMOS)가스의 유량비를 다르게 하여 증착하였다. 아르곤의 유량이 증가할수록 Si-O 결합이 증가하였으며, 비정질구조가 증가되었다. 비정질도가 높은 SiOC 박막 위에 성장된 AZO 박막의 거칠기는 감소하였으며, 표면의 평탄도가 개선되었다. 더불어 비정질도가 높은 SiOC박막 위에 성장된 AZO 박막에서 자외선 영역의 방사 강도가 제일 높았다.

수온에 따른 강도다리 Platichthys stellatus의 산소소비 리듬 (Diel Rhythm of Oxygen Consumption of the Starry Flounder Platichthys stellatus by Water Temperature)

  • 변순규;정민환;이종하;이배익;구학동;박상언;김이청;장영진
    • 한국수산과학회지
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    • 제41권2호
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    • pp.113-118
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    • 2008
  • Diel rhythm of oxygen consumption (OC) of the starry flounder Platichthys stellatus was measured at different water temperatures in a closed recirculating seawater system with a respiratory chamber. The fish consumed 70.5, 79.7, and 90.6 mg $O_2/kg/hr$ at 15, 20, and $25^{\circ}C$, respectively, showing a linear increase in OC with water temperature. The OC of fish showed a clear diel rhythm, with lower values during the day and higher values at night, in accordance with the light (09:00-21:00) and dark (21:00-09:00) phases of the diel cycle (12L:12D) in water at 15 and $20^{\circ}C$. However, the OC of the fish showed an unclear diel rhythm with the light and dark phases of the diel cycle at $25^{\circ}C$. The respective OC at 15, 20 and $25^{\circ}C$ was 63.8, 72.4, and 88.4 mg $O_2/kg/hr$ during the light phases and 77.2, 87.1, and 92.8 mg $O_2/kg/hr$ during the dark phase. The starry flounder is thought to be a nocturnal fish with a higher OC at night, while it rests during the day. Its OC was the most stable in the light, when it did not feed. Consequently, the night-time OC is the active OC and the day-time OC is the resting OC in the starry flounder.

저 유전체 SiOC 박막의 열처리 공정 온도에 따른 전기적인 특성에 관한 연구 (Study on the Electrical Characteristic of Low-k SiOC films due to the Appropriate Annealing Temperature)

  • 오데레사
    • 대한전자공학회논문지SD
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    • 제48권8호
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    • pp.1-4
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    • 2011
  • SiOC 박막과 같은 유무기 하이브리드 저유전 물질에서의 열처리효과에 의한 전기적인 특성의 변화와 유전상수에 관하여 연구하였다. SiOC 박막은 분극에 따른 특성을 분석하기 위해서 TMS과 산소의 혼합가스를 이용한 CVD방법에 의하여 증착되었으며, 300~500도까지 변화하면서 열처리를 하였다. SiOC 박막은 열처리에 의하여 유전상수는 더욱 낮아지며, 400도에서 열처리 한 경우 전기적인 특성이 우수한 것을 확인하였다. XRD 패턴에 의하면 300도이하에서 열처리한 박막과 400도 이상에서 열처리 한 경우 결합구조가 달라지는 것을 알 수 있고 400도 근처에서 급격한 변화가 일어나고 있는 것을 확인하였다.

준실시간 연속관측을 통한 제주 고산 PM2.5 OC와 EC의 계절별 사례별 특성 (Semi-continuous Measurements of PM2.5 OC and EC at Gosan: Seasonal Variations and Characteristics of High-concentration Episodes)

  • 한지현;방병조;이미혜;윤순창;김상우;장임석;강경식
    • 한국대기환경학회지
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    • 제29권3호
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    • pp.237-250
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    • 2013
  • At Gosan ABC superstation in Jeju Island, we measured organic carbon (OC) and elemental carbon (EC) in $PM_{2.5}$ from October 2009 to June 2010 using a Sunset Laboratory Model-4 Semi-Continuous OC/EC Field Analyzer. It employs TOT (Thermal-Optical-Transmittance) method with NIOSH 5040 protocol and enables to continuously monitor OC and EC concentrations with 1-hour time resolution. The mean values of OC and EC for the entire period of measurements were $2.1{\pm}1.4{\mu}g/m^3$ and $0.7{\pm}0.6{\mu}g/m^3$, respectively. The OC/EC ratio was 3 and EC accounted $25{\pm}2.1%$ of total carbon (TC, TC=OC+EC). Although OC and EC showed similar trend in seasonal variation, the ratio of OC to EC was the highest in early summer when temperature was the highest and the air was affected by biomass burning in the southern part of China. In winter, the high OC and EC concentrations were likely influenced by increased coal combustion from residential heating. The high OC and EC concentrations were observed during events such as haze, dust, and the combination of the two. During the haze events, OC and EC were enhanced with increase in $PM_{10}$, $PM_{2.5}$, $SO_2$, and $NO_2$ with broad maxima. When dust occurred, both OC and EC started decreasing after reaching their maxima a couple of hours before $PM_{10}$ maximum. The peak separation of carbonaceous species and aerosol masses with time was more noticeable when haze event was followed by dust plume. These results confirm that OC and EC are key components of haze occurring in the study region.

$\textrm{Ta}(\textrm{OC}_{2}\textrm{H}_{5})_{5}$$\textrm{NH}_3$를 이용한 산화탄탈륨 막의 원자층 증착 및 특성 (Atomic Layer Deposition and Characterization of Tantalum Oxide Films Using Ta(OC2H5)5 and $\textrm{NH}_3$)

  • 송현정;심규찬;이춘수;강상원
    • 한국재료학회지
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    • 제8권10호
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    • pp.945-949
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    • 1998
  • Ta(OC2H5)5와 NH3를 이용하여 Cycle-CVD법으로 산화탄탈륨 막을 증착하였다. Cycle-CVD법에서는 Ta(OC2H5)5와 NH3사이에 불활성 기체를 주입한다. 하나의 cycle은 Ta(OC2H5)5주입, Ar주입, NH3 주입, Ar 주입의 네 단계로 이루어진다. Cycle-CVD법으로 산화탄탈륨 막을 증착할 때, 온도 $250-280^{\circ}C$에서 박막의 증착 기구는 원자층 증착(Atomic Layer Deposition:ALD)이었다. $265^{\circ}C$에서 Ta(OC2H5)5:Ar:NH3:Ar:NH3:Ar의 한 cycle에서 각 단계의 주입 시간을 1-60초:5초:5초:5초로 Ta(OC2H5)5 주입 시간을 변화시키면서 산화탄탈륨 막을 Cycle-CVD법으로 증착하였다. Ta(OC2H5)5주입시간이 증가하여도 cycle 당 두께가 $1.5\AA$/cycle로 일정하였다. $265^{\circ}C$에서 증착된 박막의 누설 전류는 2MV/cm에서 2x10-2A/$\textrm{cm}^2$이었고 열처리후의 산화탄탈륨 막의 누설 전류값은 $10-4A\textrm{cm}^2$ 이하고 감소하였다. 증착한 산화탄탈륨 막의 성분을 Auger 전자 분광법으로 분석하였다. 2$65^{\circ}C$에서 증착한 막의 성분은 탄탈륨 33at%, 산소 50at%, 탄소 5at%, 질소 12at% 이었으며 90$0^{\circ}C$, O2300torr에서 10분 동안 열처리한 박막은 탄탈륨 33at%, 산소 60wt%, 탄소 4at%, 질소 3at%이었다. 박막의 열처리 온도가 높을수록 불순물인 탄소와 질소의 박막 내 잔류량이 감소하였다. 열처리 후의 박막은 O/Ta 화학정량비가 증가하였으며 Ta의 4f7/5와 4f 5/2의 결합 강도가 열처리 전 박막보다 증가하였다. 열처리 후 누설 전류가 감소하는 것은 불순물 감소와 화학정량비 개선 및 Ta-O 결합 강도의증가에 의한 것으로 생각된다.

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Distribution of Organic Carbon in Pitch Pine Plantation in Kongju, Korea

  • Han, A-Reum;Mun, Hyeong-Tae
    • Journal of Ecology and Environment
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    • 제32권1호
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    • pp.27-31
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    • 2009
  • Organic carbon (OC) distribution in 32-year-old pitch pine plantation at Mt. Hotae in Kongju, Korea, was studied from August 2007 to July 2008. In order to investigate the OC distribution, OC in plant biomass, litterfall, litter layer on forest floor, and soil within 50cm depth were estimated. The density of P. rigida plantation was 3,200 trees/ha, average DBH was $18.7{\pm}5.53cm$ and average tree height was $11.1{\pm}1.85m$. Organic carbon stored in plant biomass, litterlayer on forest floor and soil in 2008 was 89.46 ton C/ha (46.09%), 4.32 ton C/ha (2.23%) and 100.32 ton C $ha^{-1}$ 50cm-$depth^{-1}$ (51.68%), respectively. Amount of OC returned to forest floor via litterfall was 2.21 ton C $ha^{-1}\;yr^{-1}$. Total amount of OC stored in this P. rigida plantation was 194.1 ton C/ha. Net increase of OC in above- and below-ground biomass in this pitch pine plantation was 4.82 ton C $ha^{-1}\;yr^{-1}$.

Anticancer Effects of Organic Chinese Cabbage Kimchi

  • Park, Woon-Young;Park, Kun-Young
    • Preventive Nutrition and Food Science
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    • 제4권2호
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    • pp.113-116
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    • 1999
  • The anticancer effect of methanol extracts from common Chinese cabbage kimchi(CC kimchi ) and organically cultivated Chinese cabbage kimchi (OC kimchi) was studied on the cell growth, MTT assay and SRB assay using AGS human gastric cancer cells. Methanol extracts from CC kimchi and OC kimchi exhibited the anticancer activites in vitro and in vivo. Methanol extract from 6 day-fermented CC kimchi and OC kimchi inhibited the growth of AGS cells by 55.2 and 60.7% , respectively. At MTT assay an dSRB assay, 6 day-fermented OC kimchi showed higher inhibition rate (MTT : 42%, SRB : 61%) than 6 day-fermented CC kimchi(MTT : 33%, SRB : 52%). Methanol extracts from 6-day fermented CC kimchi and OC reduced the tumor formation and prolonged the life span of sarcoma-180 cell injected Balb.c mouse. OC kimchi treated group resulted in the smaller tumor weight of 4.58$\pm$0.32g compared th the CC kimchi group of 5.40$\pm$0.78g and the control group of 7.50$\pm$0.54g and OC kimchi treted group (25.3 days) lived longest among control (20.2days ) and CC kimchi(23.5days) treted groups.

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태화산 PM2.5 OC와 EC의 변화 특성 (Variation of OC and EC in PM2.5 at Mt. Taehwa)

  • 함지영;이미혜;김현석;박현주;조강남;박정민
    • 한국대기환경학회지
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    • 제32권1호
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    • pp.21-31
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    • 2016
  • Organic carbon (OC) and elemental carbon (EC) in $PM_{2.5}$ were measured with Sunset OC/EC Field Analyzer at Taehwa Research Forest (TRF) near Seoul metropolitan area from May 2013 to April 2014. During the study period, the mean concentrations of OC and EC were $5.0{\pm}3.2{\mu}gC/m^3$ and $1.7{\pm}1.0{\mu}gC/m^3$, respectively. They showed clear seasonality reaching their maximum in winter ($6.5{\mu}gC/m^3$ and $1.9{\mu}gC/m^3$) and minimum in wet summer ($2.5{\mu}gC/m^3$ and $1.4{\mu}gC/m^3$). While OC showed greater seasonal variation, the diurnal variation was more noticeable for EC through all seasons with a clear maximum in the morning, which reveals the influence of vehicle emissions. In contrast, OC exhibited a broad second peak in the afternoon during May~June, when biological activities were the highest. Using the morning peaks of EC and OC, primary OC/EC ratio was assessed, which was assumed to be anthropogenic origin. It was the greatest in winter followed by spring and the lowest in wet summer. The seasonal difference in primary OC/EC ratio implies the influence of non-local sources of OC at the Mt. Taehwa.