Refractive index control of F-doped SiOC : H thin films by addition fluorine |
Yoon, S.G.
(Department of Advanced Materials Engineering, Sungkyunkwan University)
Kang, S.M. (Department of Advanced Materials Engineering, Sungkyunkwan University) Jung, W.S. (Department of Advanced Materials Engineering, Sungkyunkwan University) Park, W.J. (Department of Advanced Materials Engineering, Sungkyunkwan University) Yoon, D.H. (Department of Advanced Materials Engineering, Sungkyunkwan University) |
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