• Title/Summary/Keyword: O:N ratio

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Characteristics of oxynitride films grown by PECVD using $N_2O$ gas ($N_2O$가스를 사용하여 PECVD로 성장된 Oxynitride막의 특성)

  • 최현식;이철인;장의구
    • Electrical & Electronic Materials
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    • v.9 no.1
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    • pp.9-17
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    • 1996
  • Plasma enhanced chemical vapor deposition (PECVD) allows low temperature processing and so it is widely used, but it causes instability of devices due to serious amount of impurities within the film. In this paper, electrical and chemical characteristics of the PECVD oxynitride film formed by different N$_{2}$O to N$_{2}$O+NH$_{3}$ gas ratio is studied. It has been found that hydrogen concentration of PECVD oxynitride film was decreased from 4.25*10$^{22}$ [cm$^{-2}$ ] to 1.18*10$^{21}$ [cm$^{-2}$ ] according to the increase of N$_{2}$O gas. It was also found that PECVD oxynitride films have low trap density in the oxide and interface in comparison with PECVD nitroxide films, and has higher refractive index and capacitance than oxide films. In particular, oxynitride film formed in gas ratio of N$_{2}$O/(N$_{2}$O+NH$_{3}$)= 0.88 shows increased capacitance and decreased leakage current due to small portion of hydrogen in oxide and the accumulation of nitrogen about 4[atm.%] at the interface.

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Simultaneous Catalytic Reduction of NO and N2O over Pd-Rh Supported Mixed Metal Oxide Honeycomb Catalysts - Use of H2 or CO as a Reductant (혼합금속산화물에 담지된 Pd-Rh의 허니컴 촉매에서 NO와 N2O의 동시 환원 - H2 또는 CO 환원제의 사용)

  • Lee, Seung Jae;Moon, Seung Hyun
    • Korean Chemical Engineering Research
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    • v.47 no.1
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    • pp.96-104
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    • 2009
  • In order to lower a reaction temperature with high conversions for simultaneous catalytic reduction of NO and $N_2O$ over Pd-Rh supported mixed metal oxide honeycomb catalysts, $H_2$ or CO was utilized as a reductant. When using the reductants, the effects of reaction conditions were examined in NO and $N_2O$ conversions, where reaction temperatures, concentrations of the reductants and oxygen and the concentration ratio of $N_2O$ to NO were varied. In using $H_2$ reductant, larger than 50% of NO and $N_2O$ conversions was observed at the temperatures below $200^{\circ}C$ in absence of $O_2$. In using CO reductant, NO and $N_2O$ conversions increased from the temperatures higher than $200^{\circ}C$ and $300^{\circ}C$, respectively. However, in use of both reductants, NO and $N_2O$ conversions decreased with increasing oxygen concentration. As a result, $H_2$ reductant could reduce simultaneously NO and $N_2O$ at relatively lower reaction temperature than CO. Also, NO and $N_2O$ conversions were less influenced by using $H_2$ reductant than CO one. Concentration ratio between NO and $N_2O$ did not affect their conversions regardless the type of reductants. Pretreatment of the catalyst in $H_2$ was more effective in simultaneous reduction of NO and $N_2O$ at low reaction temperature than that in $O_2$.

Sticking Characteristics in Bi2Sr2CanCun+1Ox Thin Films Fabricated by using the Evaporation Method to Improve the Sticking Ratio (부착율 개선을 위해 증발 법으로 제작한 Bi2Sr2CanCun+1Ox 박막의 부착 특성)

  • 천민우;박용필
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.11
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    • pp.1029-1034
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    • 2003
  • The Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$, superconducting thin films arc fabricated by using the sputtering and evaporation method. Because we confirmed the sticking ratio of Bi element in the Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$ superconducting thin film fabricated by using the sputtering method was much lower than the expected value, to get the enough number of the flakes of Bi, faraday cup was used to evaporate Bi clement. As a result of the fabrication, Bi 2201 and Bi 2212 single phases could be made by the optima of deposition condition. And we confirmed the sticking coefficient of Bi element was clearly related to the temperature change of the substrate and the generation of Bi22l2 phase

High performance of ZnO thin film transistors using $SiN_x$ and organic PVP gate dielectrics

  • Kim, Young-Woong;Park, In-Sung;Kim, Young-Bae;Choi, Duck-Kyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.5
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    • pp.187-191
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    • 2007
  • The device performance of ZnO-thin film transistors(ZnO-TFTs) with gate dielectrics of $SiO_2,\;SiN_x$ and Polyvinylphenol(PVP) having a bottom gate configuration were investigated. ZnO-TFTs can induce high device performance with low intrinsic carrier concentration of ZnO only by controlling gas flow rates without additional doping or annealing processes. The field effect mobility and on/off ratio of ZnO-TFTs with $SiN_x$ were $20.2cm^2V^{-1}s^{-1}\;and\;5{\times}10^6$ respectively which is higher than those previously reported. The device adoptable values of the mobility of $1.37cm^2V^{-1}s^{-1}$ and the on/off ratio of $6{\times}10^3$ were evaluated from the device with organic PVP dielectric.

Effect of Nitrogen Compounds and Organic Carbon Concentrations on $N_2O$ Emission during Denitrification (탈질에서 질소성분 및 유기탄소 농도가 $N_2O$ 배출에 미치는 영향)

  • Kim, Dong-Jin;Kim, Heon-Ki;Kim, Yu-Ri
    • Clean Technology
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    • v.17 no.2
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    • pp.134-141
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    • 2011
  • The effects of the compounds and concentrations of nitrogenous electron acceptor, the ratio of electron donor/electron acceptor (C/N), and the complexity of electron donor on the emission of $N_2O$ during wastewater denitrification were quantitatively investigated in this study. The higher ${NO_3}^-$ and ${NO_2}^-$ concentrations, the more $N_2O$ emission was observed. ${NO_2}^-$ has strong effect on $N_2O$ emission as it emitted morc $N_2O$ than ${NO_3}^-$, 50 mg/L of ${NO_2}^-$-N gave the highest conversion (9.3%) and yield (9.8%) of $N_2O$ while ${NO_3}^-$-N (50 mg/L) gave 5.6% conversion and 11.0% yield. Lower C/N ratio decreases nitrogen removal efficiency, but it increases the conversion of $N_2O$ because of the incomplete denitrification by the limited organic carbon. When real domestic wastewater is used as the electron donor of the denitrification, $N_2O$ emission is reduced to 1/10 of the emission when single carbon (acetate) is used. It is thought that multiple carbon source utilizes many denitrification pathways and it seems to be helpful for the reduction of $N_2O$ emission.

A Study on Characteristics of Insulation Breakdown and Surface Discharge by the Mixing Ratio of Dry Air/O2 gas mixtures (Dry Air/O2 혼합가스의 혼합비에 따른 절연파괴 및 연면방전 특성 연구)

  • Seok, Jeong-Hoo;Beak, Jong-Hyun;Lim, Dong-Young;Bae, Sungwoo;Kim, Ki-Chai;Park, Won-Zoo
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.29 no.6
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    • pp.49-57
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    • 2015
  • This paper presents the discharge characteristics and economic feasibility of a Dry $Air/O_2$ and a $N_2/O_2$ mixture gas in order to review $SF_6$ alternative. From AC discharge experiment in an quasi-uniform field, it was found that the optimal $N_2/O_2$ mixing ratio which breakdown voltage and surface flashover voltage were the highest was 70/30 and that the pressure dependence on the breakdown voltage was higher than that of the surface flashover voltage in the Dry $Air/O_2$ and the $N_2/O_2$ mixture gas. The mixing ratio (70/30) and the tendency of the pressure dependence were described in detail based on physical factors (impact ionization coefficient, electron attachment coefficient, secondary electron emission coefficient) involved in discharge mechanism and a electron source, respectively. In addition, the performance insulation and the economic feasibility of the Dry $Air/O_2$ and the $N_2/O_2$ mixture gas were discussed so that Dry $Air/O_2$ mixture gaswas more suitable than $N_2/O_2$ mixture gas to the $SF_6$ alternative.

Assessment of Nitrous Oxide (N2O) Emissions from Farmland in 2011 with IPCC Guideline Methodology

  • Jeong, Hyun Cheol;Kim, Gun Yeob;Lee, Jong Sik;Choi, Eun Jung;Ko, Jee Yeon;So, Kyu Ho
    • Korean Journal of Soil Science and Fertilizer
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    • v.46 no.6
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    • pp.570-574
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    • 2013
  • This study was conducted to assess $N_2O$ emissions in agricultural soils of Korea under the 1996 IPCC (Intergovernmental Panel on Climate Change) methodology. $N_2O$ emissions in agricultural soils were calculated the sum of direct emission and indirect emission by the N sources and emissions by field burning of crop residues. $N_2O$ emission was highest in animal manure as 1,547 $CO_2$-eq Gg. Indirect emissions by atmospheric deposition and leaching and runoff were 1,463 and 1,753 $CO_2$-eq Gg, respectively. $N_2O$ emission by field burning of crop residues was highest in pepper due to the residue/crop ratio and field burning ratio.

Studies on the Molybdenum Complexes with Tetradentate Schiff Base Ligand (I). N,N'-bis (Salicylaldehyde)-ethylene Diimine (네자리 Schiff Base 리간드의 몰리브덴착물에 관한 연구 (제1보))

  • Jo, Gi Hyeong
    • Journal of the Korean Chemical Society
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    • v.18 no.4
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    • pp.267-271
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    • 1974
  • The tetradentate schiff base, N,N'-bis(salicylaldehyde)-ethylene diimine has been reacted with a series of Mo(IV), Mo(V), Mo(IV), and Mo(III) oxidation states to form new Complexes; $[MoO_2(C_{16}H_{14}O_2N_2)], (MoO(C_{16}H_{14}O_2N_2)]_2O, (Mo(SCN)(C_{16}H_{14}O_2N_2)]_2O, and (Mo(H_2O)(C_{16}H_{14}O_2N_2)]_2O.$ These complexes have hexa coordinated configurations and the mole ratio of these ions to the ligand was 1:1. These complexes have been identified by visible spectra, infrared specra, T.G.A., D.T.A., and elemental analysis.

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X-Ray Absorption Spectroscopic Study of 120 MeV $Ag^{9+}$ Ion-Irradiated N-Doped ZnO Thin Films

  • Gautam, Sanjeev;Lim, Weon Cheol;Kang, Hee Kyung;Lee, Ki Soo;Song, Jaebong;Song, Jonghan;Asokan, K.;Chae, Keun Hwa
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.315-315
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    • 2013
  • We report the electronic structure modification in the swift heavy ion (SHI) irradiated N-doped ZnO thin films prepared by RF sputtering from ZnO target in different ratio of Ar/$N_2$ gas mixture using highly pure $N_2$ gas. The different N-ZnO thin lms were then irradiated with 120 MeV Ag ion beam with different doses ranging from $1{\times}10^{11}$ to $5{\times}10^{12}$ ions/$cm^2$ and characterized by XRD and near edge X-ray absorption ne structure (NEXAFS) at N and O K-edges. The NEXAFS measurements provide direct evidence of O 2p and Zn 3d orbital hybridization and also the bonding of N ions with Zn and O ions. The minimum value of resistivity of $790{\Omega}cm$, a Hall mobility of $22cm^2V^-1s^-1$ and the carrier concentration of $3.6{\times}10^{14}cm^{-3}$ were yielded at 75% $N_2$. X-ray diffraction (XRD) measurements revealed that N-doped ZnO films had the preferential orientation of (002) plane for all samples, while crystallinity start decreasing at 32.5% $N_2$. The average crystallite size varies from 5.7 to 8.2 nm for 75% and then decreases to 7.8 nm for 80% $Ar:N_2$ ratio.

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Diaminoplatinum(II) Complexes of Glutamic Acid: Obvious Chelating Isomerization

  • Young-A Lee;Jongki Hong;Ok-Sang Jung;Youn Soo Sohn
    • Bulletin of the Korean Chemical Society
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    • v.15 no.8
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    • pp.669-673
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    • 1994
  • Coordination isomers of cis-(N-N)Pt(Glu) prepared by reaction of cis-(N-N)Pt($SO_4$) (N-N=2$NH_3$, ethylenediamine(en),(R,R)-1,2-diaminocyclohexane (DACH), N,N,N',N'-tetramethylethylenediamine (TMEDA)) with barium glutamate in water have been monitored and characterized by $^1H-NMR$, $^{13}C-NMR$, IR, and mass spectra. The reaction at room temperature affords the mixture of O,O'-and N, ${\alpha}$ O-chelated platinum(II) complexes. The O,O'-chelate initially formed isomerized to N,${\alpha}$O-chelate on standing for a long time or increasing temperature. The ratio of the two isomers at room temperature depends on the nature of the nitrogen donor coligand (N-N).