Effects of the Contents of Hydrochloric Gas on the Electrical Properties of the RTO/RTN Dual Dielectric Films (HCI 첨가에 의한 RTO/RTN 이중 절연박막의 전기적 특성 변화)
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- Journal of the Korean Institute of Telematics and Electronics
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- v.25 no.11
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- pp.1350-1357
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- 1988