• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.53-58
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• 2022

Shape changes of hard mask play a key role in the aspect ratio dependent etch (ARDE). For etch process using high density and energy ions, deformation of hard mask shape becomes more severe, and high aspect ratio (HAR) etch profile is distorted. In this study, polygonal geometric model for shape-deformation of amorphous carbon layered hard mask is suggested to control etch profile during the process. Mask shape is modeled with polygonal geometry consisting of trapezoids and rectangles, and it provides dynamic information about angles of facets and etched width and height of remained mask shape, providing important features for real-time HAR etch profiling.

• 한국암반공학회:학술대회논문집
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• 한국암반공학회 2008년도 국제학술회의
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• pp.173-181
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• 2008

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• 에너지공학
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• 제25권4호
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• pp.62-73
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• 2016

자연채광 시스템은 자연광의 건물 실내 유입을 통한 실내조명에 상당히 효율적으로 적용될 수 있다. 특히, 건물에서 사용되는 에너지 중 28%는 조명에너지에 사용되는 점을 감안하면, 인공조명에의 의존도를 낮출 수 있는 자연채광시스템의 역할은 상당히 중요하다고 할 수 있다. 본 연구에서는 최근 국내에 보급된 다양한 추적식 자연채광시스템(Active Daylighting System)의 특성 및 이용 현황에 대한 조사와 분석을 수행하였다.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제5권5호
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• pp.909-937
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• 2011

Energy efficiency is one of the most critical issues in the design of wireless sensor networks. In object-tracking sensor networks, the data storage and query processing should be energy-conserving by decreasing the message complexity. In this paper, a Prediction-based Energy-conserving Approximate StoragE schema (P-EASE) is proposed, which can reduce the query error of EASE by changing its approximate area and adopting predicting model without increasing the cost. In addition, focusing on reducing the unnecessary querying messages, P-EASE enables an optimal query algorithm to taking into consideration to query the proper storage node, i.e., the nearer storage node of the centric storage node and local storage node. The theoretical analysis illuminates the correctness and efficiency of the P-EASE. Simulation experiments are conducted under semi-random walk and random waypoint mobility. Compared to EASE, P-EASE performs better at the query error, message complexity, total energy consumption and hotspot energy consumption. Results have shown that P-EASE is more energy-conserving and has higher location precision than EASE.

• 한국군사과학기술학회지
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• 제24권2호
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• pp.211-218
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• 2021

This paper deals with the computational work to characterize the formation and pinching of a plasma in an X-pinch configuration. A resistive magnetohydrodynamic model of a single fluid and two temperature is adopted assuming a hollow conical structure in the (r,z) domain. The model includes the thermodynamic parameter of tungsten from the corrected Thomas-Fermi EOS(equation of state), determining the average ionization charge, pressure, and internal energy. The transport coefficients, resistivity and thermal conductivity, are obtained by the corrected Lee & More model and a simple radiation loss rate by recombination process is considered in the simulation. The simulation demonstrated the formation of a core-corona plasma and intense compression process near the central region which agrees with the experimental observation in the X-pinch device at Seoul National University. In addition, it confirmed the increase in radiation loss rate with the density and temperature of the core plasma.

• 한국태양에너지학회 논문집
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• 제33권5호
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• pp.95-104
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• 2013

This study set out to devise an optimized system to take into account life cycle cost(LCC) and ton of carbon dioxide($TCO_2$) by applying the weighted coefficient method(WCM) to "public-purpose" facility buildings according to the mandatory 5% and 11% of new renewable energy in total construction costs and anticipated energy consumption, respectively, based on the changes of the public obligation system. (1) System installation capacity is applied within the same new renewable energy facility investment according to the mandatory 5% of new renewable energy in total construction costs. Both LCC and $TCO_2$ recorded in the descending order of geothermal, solar, and photovoltaic energy. The geothermal energy systems tended to exhibit an excellent performance with the increasing installation capacity percentage. (2) Optimal systems include the geothermal energy(100%) system in the category of single systems, the solar energy(12%)+geothermal energy(88%) system in the category of 2-combined systems, and the photovoltaic energy(12%)+solar energy(12%)+geothermal energy(76%) system and the photovoltaic energy(12%)+solar energy(25%)+geothermal energy(63%) system in the category of 3-combined systems. (3) LCC was the highest in the descending order of photovoltaic, geothermal and solar energy due to the influences of each energy source's correction coefficient according to the mandatory 11% of new renewable energy in anticipated energy consumption. The greater installation capacity percentage photovoltaic energy had, the more excellent tendency was observed. $TCO_2$ recorded in the descending order of geothermal, photovoltaic and solar energy with the decreasing installation capacity of photovoltaic energy. The greater installation capacity percentage a geothermal energy system had, the more excellent tendency it demonstrated. (4) Optimal systems include the geothermal energy(100%) system in the category of single systems, the photovoltaic energy(62%)+geothermal energy(38%) system in the category of 2-combined systems, and the photovoltaic energy(50%)+solar energy(12%)+geothermal energy(38%) system and the photovoltaic energy(12%)+solar energy(12%)+geothermal energy(76%) system in the category of 3-combined systems.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2017년도 춘계학술대회
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• pp.735-737
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• 2017

An Off grid or remote solar electric systems are an energy supply to our home or to our companies without the utility of Grid at all. Off grid solar systems are very important for those who live in remote locations especially for developing countries where getting the electric grid is extremely expensive, inconvenient or for those who doesn't need to pay a monthly bill with the electric bill in general. The main critical components of any solar power system or renewable energy harvesting systems are the energy storage systems and its charge controller system. Energy storage systems are the essential integral part of a solar energy harvesting system and in general for all renewable energy harvesting systems. To provide an optimal solution of both high power density and high energy density at the same time we have to use hybrid energy storage systems (HESS), that combine two or more energy storage technologies with complementary characteristics. In this present work, design and simulation we use two storage systems supercapacitor for high power density and lithium based battery for high energy density. Here the system incorporates fast-response supercapacitors to provide power to manage solar smoothing and uses a battery for load shifting. On this paper discuss that the total energy throughout of the battery is much reduced and the typical thermal stresses caused by high discharge rate responses are mitigated by integrating supercapacitors with the battery storage system. In addition of the above discussion the off grid solar electric energy harvesting presented in this research paper includes battery and supercapacitor management system, MPPT (maximum power point tracking) system and back/boost convertors. On this present work the entire model of off grid electric energy harvesting system and all other functional blocks of that system is implemented in MATLAB Simulink.

• 한국지구물리탐사학회:학술대회논문집
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• 한국지구물리탐사학회 2011년도 학술대회 및 정기총회
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• pp.41-44
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• 2011

• 한국지구물리탐사학회:학술대회논문집
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• 한국지구물리탐사학회 2011년도 학술대회 및 정기총회
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• pp.37-40
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• 2011