Development of Polygonal Model for Shape-Deformation Analysis of Amorphous Carbon Hard Mask in High-Density Etching Plasma |
Song, Jaemin
(Department of Energy Systems Engineering, Seoul National University)
Bae, Namjae (Department of Energy Systems Engineering, Seoul National University) Park, Jihoon (Department of Energy Systems Engineering, Seoul National University) Ryu, Sangwon (Department of Energy Systems Engineering, Seoul National University) Kwon, Ji-Won (Department of Energy Systems Engineering, Seoul National University) Park, Taejun (Department of Energy Systems Engineering, Seoul National University) Lee, Ingyu (Department of Energy Systems Engineering, Seoul National University) Kim, Dae-Chul (Plasma E.I. Convergence Research Center, Korea Institute of Fusion Energy) Kim, Jong-Sik (Plasma E.I. Convergence Research Center, Korea Institute of Fusion Energy) Kim, Gon-Ho (Department of Energy Systems Engineering, Seoul National University) |
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