• Journal of the Korean Ceramic Society
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• v.45 no.9
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• pp.518-523
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• 2008

The mechanical properties of silicon carbide deposited by chemical vapor deposition process onto a graphite substrate are studied using nanoindentation techniques. The silicon carbide coating was fabricated in a chemical vapor deposition process with different microstructures and thicknesses. A nanoindentation technique is preferred because it provides a reliable means to measure the mechanical properties with continuous load-displacement recording. Thus, a detailed nanoindentation study of silicon carbide coatings on graphite structures was conducted using a specialized specimen preparation technique. The mechanical properties of the modulus, hardness and toughness were characterized. Silicon carbide deposited at $1300^{\circ}C$ has the following values: E=316 GPa, H=29 GPa, and $K_c$=9.8 MPa $m^{1/2}$; additionally, silicon carbide deposited at $1350^{\circ}C$ shows E=283 GPa, H=23 GPa, and $K_c$=6.1 MPa $m^{1/2}$. The mechanical properties of two grades of SiC coating with different microstructures and thicknesses are discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.63-68
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• 2005

The nanoindentation technique is widely used to investigate the mechanical properties of nano-microscale materials. The nanoindentation method for assessing mechanical properties at low loads and shallow depths is already well established fur the characterization of thin films as well as bulk materials. In this study, we evaluated residual stress in DLC and Au thin films usign nanoindentation technique with a new stress-relaxation model. Moreover, We suggest a composite hardness equation and quantify the magnitude of hardness increase by using an equation based on the interface hardness and the interface thickness, derived by comparing results derived from this equation and those determined in nanoindentation tests. Finally, We present an indentation size effect (ISE) model that extends the available contact depth for ISE application down to several tens of nanometers by considering the tip bluntness effect.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1270-1279
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• 2002

Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

• Journal of the Korean Ceramic Society
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• v.40 no.7
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• pp.667-671
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• 2003

Tape cast laminar composites with alumina/zircon(reaction-bonded mullite/zirconia) as an inner layer and alumina/zirconia or mullite/zirconia as an outer layer have been fabricated by hot-pressing. The mechanical properties(hardness and Young's modulus) and microstructure of laminar composites were examined using a nanoindentation technique and Scanning Electron Microscopy (SEM), respectively. The indentation load-displacement curve revealed the existence of residual stress in laminar composites.

• Journal of the Korean Society for Heat Treatment
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• v.33 no.2
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• pp.72-79
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• 2020

To improve the mechanical properties of most structural materials for industrial applications, the control of microstructure is essential by heat treatment process or plastic deformation process. Since the mechanical behavior of structural materials is significantly influenced by their microstructure, it is inevitably preceded to understand the relationship between microstructure and strengthening mechanisms of materials which can be easily changed by heat treatment. In this regard, the nanoindentation test is useful technique for analyzing the influence of the localized microstructural change on small-scale mechanical behavior of various structural materials. Here, the interesting studies performed on various heat-treated materials are reviewed with focus on micromechanical properties obtained by nanoindentation, which are reported in the available literature.

• Proceedings of the Korean Nuclear Society Conference
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• 2001.05a
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• pp.323-323
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• 2001

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.6
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• pp.390-402
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• 2006

The elastic properties and thickness of mullite environmental barrier coatings grown through chemical vapor deposition (CVD) on silicon carbide substrates were measured using frequency domain photoacoustic microscopy. In this technique, extremely narrow bandwidth surface acoustic waves are generated with an amplitude modulated laser source. A photorefractive crystal based interferometer is used to detect the resulting surface displacement. The complex displacement field is mapped as a function of source-to-receiver distance in order to extract the wavelength of the surface acoustic wave at a given excitation frequency, and the phase velocity is determined. The coatings tested exhibited spatial variations in thickness and mechanical properties. The measured surface wave dispersion curves were used to extract an effective value for the elastic modulus and the coating thickness. Nanoindentation was used to validate the measurements of the effective elastic modulus. The average elastic modulus measured through the coating thickness using nanoindentation is compared to the effective modulus found using the photoacoustic system. Optical microscopy is used to validate the thickness measurements. The results indicate that the photoacoustic microscopy technique can be used to estimate the effective elastic properties in coatings exhibiting spatial inhomogeneities, potentially providing valuable feedback for the optimization of the CVD growth process.

• Journal of the Korean Society for Heat Treatment
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• v.35 no.3
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• pp.139-149
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• 2022

In the automobile and shipbuilding industries, various materials and components require superior surface strength, excellent wear resistance and good resistance to repeated loads. To improve the surface properties of the materials, various surface heat treatment methods are used, which include carburizing, nitriding, and so on. Among them, carburizing treatment is widely used for structural steels containing carbon. The effective carburizing thickness required for materials depends on the service environment and the size of the components. In general, however, there is a limit in evaluation of the surface properties with a standardized mechanical test method because the thickness or cross-sectional area of the carburized layer is limited. In this regard, the nanoindentation technique has lots of advantages, which can measure the mechanical properties of the material surface at the nano and micro scale. It is possible to understand the relationship between the microstructural change in the hardened layer by carburizing treatment and the mechanical properties. To be spread to practical applications at the industrial level, in this paper, the principle of the nanoindentation method is described with a representative application for analyzing the mechanical properties of the carburized material.

• Journal of the Korean Ceramic Society
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• v.38 no.4
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• pp.365-369
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• 2001

플라즈마 화학증착법(PECVD)에 의해 실리콘 (100) 기판 위에 3C-SiC막을 증착하였다. 증착반응시 유입가스비, R$_{x}$[=CH$_4$/(CH$_4$+H$_2$)]에 따른 증착막의 결정성에 대해 검토하였다. 증착된 3C-SiC막의 결정성은 R$_{x}$ 값이 감소할수록 더욱 향상되었으며, 형성된 결정상은 (111) 면으로 최대의 우선배향성을 가졌다. Nanoindentation 방법을 이용하여 3C-SiC막의 압입깊이에 따른 경도 및 탄성계수를 측정하였으며, 유입가스비(R$_{x}$)의 변화에 따라서 막의 경도 및 탄성계수가 뚜렷이 변화하였다.

• Journal of the Korean Ceramic Society
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• v.37 no.6
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• pp.596-603
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• 2000

The hardness and elastic modulus of three bulk materials are computed from the load and displacement data which are measured during basic nanoindentation test and compared with values determined by independent means to assess the accuracy of the method. The results show that with this technique, modulus and hardness and elastic modulus profile through depth of silicon nitride and silicon oxynitride films. The results show that for silicon nitride film deposited on silicon, hardness and elastic modulus increase as the volume ratio of NH3 : SiH4, which had been used for deposition, increases up to 20.0; and for silicon oxynitride film on silicon, the hardness and elastic modulus profile changes distinctly as the relative amount of oxygen in deposition gas mixture changes.